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    • 2. 发明授权
    • Semiconductor manufacturing apparatus, method of detecting abnormality, identifying cause of abnormality, or predicting abnormality in the semiconductor manufacturing apparatus, and storage medium storing computer program for performing the method
    • 半导体制造装置,检测异常的方法,识别异常原因或预测半导体制造装置中的异常,以及存储用于执行该方法的计算机程序的存储介质
    • US07751921B2
    • 2010-07-06
    • US11794374
    • 2005-12-22
    • Koichi SakamotoMinoru ObataNoriaki Koyama
    • Koichi SakamotoMinoru ObataNoriaki Koyama
    • G06F19/00G06F11/30
    • C23C16/4412C23C16/52G05B23/0235H01L21/67288
    • In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of semiconductor manufacturing apparatus is prepared. As monitoring parameters, for example, a cumulative film thickness for deposition processes that have previously been performed in deposition apparatus and an opening of the pressure control valve located in a vacuum exhaust path to control the internal pressure of a reaction vessel are selected. Values of monitoring parameters obtained when the semiconductor manufacturing apparatus was normally operating are plotted on the biaxial coordinate system. A boundary between a normal condition and an abnormality status is set around a plot group. Values of monitoring parameters obtained during present operation of the semiconductor manufacturing apparatus are plotted on the biaxial coordinate system to determine whether or not there exists an abnormality and identify a type of abnormality based on a positional relation between the plots and the boundary.
    • 为了检测半导体制造装置的异常,准备了具有第一和第二轴的双轴坐标系分别分配了从表示半导体制造装置的状态的多个装置状态参数中选择的两个不同的监视参数。 作为监测参数,例如,选择先前在沉积设备中执行的沉积工艺的累积膜厚度和位于真空排气路径中的压力控制阀的打开以控制反应容器的内部压力。 在半导体制造装置正常工作时获得的监视参数的值被绘制在双轴坐标系上。 围绕绘图组设定正常状态与异常状态之间的边界。 在双轴坐标系上绘制在半导体制造装置的当前操作期间获得的监视参数的值,以基于图和边界之间的位置关系确定是否存在异常并识别异常的类型。
    • 5. 发明授权
    • Image pickup apparatus and image processing method
    • 图像拾取装置和图像处理方法
    • US07750950B2
    • 2010-07-06
    • US11606087
    • 2006-11-30
    • Masaya TamaruKoichi SakamotoKoji IchikawaMasahiko SugimotoManabu HyodoKazuhiko TakemuraHirokazu Kobayashi
    • Masaya TamaruKoichi SakamotoKoji IchikawaMasahiko SugimotoManabu HyodoKazuhiko TakemuraHirokazu Kobayashi
    • H04N9/73
    • H04N5/2355H04N5/202H04N5/235H04N9/69H04N9/735
    • An image combined high sensitivity image and low sensitivity image is provided with well-adjusted white balance and broad dynamic range. The image is obtained by multiplying the combined data by total gain that depends on scene. A white balance is adjusted with gain value calculated from of high output image data. Lv value representing luminance is calculated and compared with a threshold to decide whether or not the high sensitivity image and the low sensitivity image should be combined. First gamma correction unit performs gamma-correction for the image signal derived from the high sensitivity signal with first gamma character, second gamma correction unit performs gamma-correction for the image signal derived from the low sensitivity signal with second gamma character that is different from the first gamma character, and addition unit combines the image signal from the first gamma correction unit and the image signal from the second gamma correction unit.
    • 组合高灵敏度图像和低灵敏度图像的图像具有良好调整的白平衡和宽动态范围。 通过将组合数据乘以取决于场景的总增益来获得图像。 用高输出图像数据计算的增益值调整白平衡。 计算表示亮度的Lv值并将其与阈值进行比较,以决定是否应该组合高灵敏度图像和低灵敏度图像。 第一伽马校正单元对于具有第一伽玛字符的高灵敏度信号导出的图像信号执行伽马校正,第二伽马校正单元对于具有与第一伽玛校正不同的第二伽马字符从低灵敏度信号导出的图像信号进行伽马校正 第一伽马字符和加法单元组合来自第一伽马校正单元的图像信号和来自第二伽马校正单元的图像信号。
    • 8. 发明授权
    • Image pickup method and apparatus with ISO sensitivity setting variable
    • 具有ISO感光度设定变量的图像拾取方法和装置
    • US07570883B2
    • 2009-08-04
    • US11723695
    • 2007-03-21
    • Koichi Sakamoto
    • Koichi Sakamoto
    • G03B7/08H04N5/235
    • G03B7/28H04N5/2351
    • An image pickup apparatus includes an automatic exposure controller automatically controls ISO sensitivity in response to the output signal of an exposure metering circuit, and controls the exposure so that exposure setting is determined based on the brightness values of both the central photometry area and the remaining photometry area of an imaging frame. The automatic exposure controller controls the exposure setting so that when the ISO sensitivity is set to its higher value, the weighting factor of the central photometry area is higher than that of the remaining photometry area. The automatic exposure controller further determines whether or not a light source is behind an object, and, if it is the case, reduces the adjusted exposure setting so as to increase the amount of light incident on the image pickup apparatus.
    • 图像拾取装置包括自动曝光控制器,以响应于曝光计量电路的输出信号自动控制ISO感光度,并且控制曝光,使得基于中央测光区域和剩余测光学的亮度值确定曝光设置 成像框架的区域。 自动曝光控制器控制曝光设置,使得当ISO感光度设置为更高的值时,中央测光区域的加权系数高于其余测光区域的加权系数。 自动曝光控制器还确定光源是否在物体后面,并且如果是这种情况,则减小调整的曝光设置以增加入射在图像拾取装置上的光量。
    • 10. 发明授权
    • Image communication system and method
    • 图像通信系统及方法
    • US07315386B1
    • 2008-01-01
    • US09107486
    • 1998-06-30
    • Yoshiko ShiimoriYoshinori OhtaKoichi SakamotoNorihisa HanedaNobuyoshi Nakajima
    • Yoshiko ShiimoriYoshinori OhtaKoichi SakamotoNorihisa HanedaNobuyoshi Nakajima
    • G06F15/00H04N1/387
    • G06F3/14G06F19/00G09G2340/0407H04L29/06H04L67/06H04L69/04H04L69/329H04N1/33315H04N1/3871H04N2201/33328H04N2201/33378
    • In a system in which an editing server and a plurality of client computers are capable of communicating with one another, an edited image can be generated by the plurality of client computers.When image data is transmitted from the image server to the client computer, the resolution of image data to be transmitted is reduced in correspondence with the resolution of a monitor display device connected to the client computer. Further, the number of colors of an image represented by the image data is decreased in correspondence with the number of colors which can be displayed on the monitor display device. The data quantity of the image data to be transmitted is reduced, so that time required to transmit the image data is shortened.A client computer and a main image server are connected to each other. A user image to be synthesized on a template image is read in the client computer. Image data representing the template image used for the image synthesis and image data representing a mask image are transmitted from the main image server to the client computer. In the client computer, image synthesis processing is performed. Image data representing an area required for image synthesis of the user image used for the image synthesis is extracted. The extracted user image data and synthesis information required for the synthesis are transmitted from the client computer to the main image server. In the main image server, a composite image is printed.
    • 在编辑服务器和多个客户端计算机能够彼此通信的系统中,可以由多个客户端计算机生成编辑的图像。 当图像数据从图像服务器发送到客户端计算机时,与连接到客户端计算机的监视器显示装置的分辨率相对应地减少要发送的图像数据的分辨率。 此外,由图像数据表示的图像的颜色数量与可以在监视器显示装置上显示的颜色数量相对应地减少。 减少要发送的图像数据的数据量,从而缩短发送图像数据所需的时间。 客户端计算机和主映像服务器相互连接。 在客户端计算机中读取要在模板图像上合成的用户图像。 表示用于图像合成的模板图像的图像数据和表示掩模图像的图像数据从主图像服务器发送到客户端计算机。 在客户端计算机中,执行图像合成处理。 提取表示用于图像合成的用户图像的图像合成所需的区域的图像数据。 所提取的用户图像数据和合成所需的合成信息从客户计算机发送到主图像服务器。 在主映像服务器中,打印合成图像。