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1. 发明申请

US20090222753A1 DEFECT INSPECTION TOOL AND METHOD OF PARAMETER TUNING FOR DEFECT INSPECTION TOOL 有权
标题翻译：缺陷检查工具和缺陷检查工具参数调试方法
公开(公告)号：US20090222753A1
公开(公告)日：2009-09-03
申请号：US12370784
申请日：2009-02-13
申请人： Kohei YAMAGUCHI , Kenji Obara , Takehiro Hirai
发明人： Kohei YAMAGUCHI , Kenji Obara , Takehiro Hirai
IPC分类号： G06F3/048 , G06K9/00 , G06F19/00
CPC分类号： G06T7/0004 , G06T2207/10061 , G06T2207/30148
摘要： Setting of a parameter of a defect inspection tool is based on trial and error in which effects are confirmed one by one and set, and the setting requires a high technique and is significantly inefficient. The present invention is to provide an inspection method and an inspection tool capable of solving such a problem and of setting the parameter (hereinafter, referred to as an inspection parameter) required for detecting the defect easily.In order to solve the problem, a defect inspection tool according to the present invention is provided with image obtaining unit for obtaining an image by applying an electron beam to a specimen; an image processing unit for performing a calculation process by using each predetermined inspection parameter group based on the image obtained by the image obtaining unit; and a parameter tuning unit for performing a process to determine an effective inspection parameter group from calculation results by the calculation process and narrowing down an inspection parameter group range by repeating the process for a plurality of images obtained by the image obtaining unit, and is provided with a configuration to detect the defect by using the inspection parameter group narrowed down.
摘要翻译：缺陷检查工具的参数设置是基于一个一个确认效果并进行设置的试错法，设定要求较高的技术，效果显着。本发明提供一种能够解决这样的问题的检查方法和检查工具，并且容易地设定检测缺陷所需的参数（以下称为检查参数）。为了解决这个问题，根据本发明的缺陷检查工具设置有图像获取单元，用于通过向样本施加电子束来获得图像; 图像处理单元，用于基于由图像获取单元获得的图像，使用每个预定检查参数组来执行计算处理; 以及参数调整单元，用于通过计算处理执行从计算结果确定有效检查参数组的处理，并通过重复由图像获取单元获得的多个图像的处理来缩小检查参数组范围，并且提供通过使用缩小的检查参数组来检测缺陷。

2. 发明授权

US08188428B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08188428B2
公开(公告)日：2012-05-29
申请号：US12770244
申请日：2010-04-29
申请人： Kohei Yamaguchi , Kenji Obara
发明人： Kohei Yamaguchi , Kenji Obara
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J37/265 , H01J2237/216 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495
摘要： A technique executes autofocus adjustment stably even when a plurality of patterns or foreign matter capable of being imaged only by a specific detector are included independently. Such an image as a concavo-convex image having a weak contrast can be picked up. The technique can automatically focus such an image even when it is difficult to find a focus position in the image. A scanning electron microscope includes a plurality of detectors for detecting secondary signals from a specimen when irradiated with an electron beam, and a calculation unit for combining the signals obtained from the detectors. At least two of the detectors are provided to be symmetric with respect to the electron beam. The focus of the electron beam is adjusted based on the signals of the detectors or on a signal corresponding to a combination of the signals.
摘要翻译：即使独立地包括仅能够由特定检测器成像的多个图案或异物也能够稳定地执行自动聚焦调整。可以拾取这样的具有弱对比度的凹凸图像的图像。即使在图像中难以找到焦点位置，该技术也可以自动对焦这样的图像。扫描电子显微镜包括多个用于在用电子束照射时检测来自样本的次级信号的检测器，以及用于组合从检测器获得的信号的计算单元。至少两个检测器被提供为相对于电子束对称。基于检测器的信号或对应于信号的组合的信号来调整电子束的焦点。

3. 发明申请

US20090206259A1 REVIEW METHOD AND REVIEW DEVICE 有权
标题翻译：审查方法和审查装置
公开(公告)号：US20090206259A1
公开(公告)日：2009-08-20
申请号：US12366179
申请日：2009-02-05
申请人： Kenji Obara , Takehiro Hirai , Kohei Yamaguchi , Naoma Ban
发明人： Kenji Obara , Takehiro Hirai , Kohei Yamaguchi , Naoma Ban
IPC分类号： G01N23/00
CPC分类号： H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2817
摘要： A defect review method and a defect review device using an electron microscope, reduce the number of user processes necessary to set automatic focal adjustment of an electron beam to provide easier sample observation.The review method comprises the steps of: performing focal adjustment for a plurality of coordinate positions pre-registered on the coordinate on an object under observation; creating a criterion for focal adjustment based on a focal position at each of the plurality of coordinate positions; setting a focal probe range based on a deviation between the criterion and the focal position; and determining an automatic focal adjustment range for defect detection on the object under observation based on the set focal probe range.
摘要翻译：使用电子显微镜的缺陷检查方法和缺陷检查装置，减少设置电子束的自动聚焦调整所需的用户处理次数，以提供更容易的样品观察。检查方法包括以下步骤：对预先登记在观察对象上的坐标上的多个坐标位置执行焦点调整; 基于所述多个坐标位置中的每个坐标位置处的焦点位置创建用于焦点调整的标准; 根据标准和焦点位置之间的偏差设置焦点探测范围; 以及基于所设置的焦点探测范围确定用于观察对象的缺陷检测的自动焦点调整范围。

4. 发明申请

US20080128617A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20080128617A1
公开(公告)日：2008-06-05
申请号：US11984319
申请日：2007-11-15
申请人： Kohei Yamaguchi , Kenji Obara
发明人： Kohei Yamaguchi , Kenji Obara
IPC分类号： G01N23/22
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J37/265 , H01J2237/216 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495
摘要： A technique executes autofocus adjustment stably even when a plurality of patterns or foreign matter capable of being imaged only by a specific detector are included independently. Such an image as a concavo-convex image having a weak contrast can be picked up. The technique can automatically focus such an image even when it is difficult to find a focus position in the image. A scanning electron microscope includes a plurality of detectors for detecting secondary signals from a specimen when irradiated with an electron beam, and a calculation unit for combining the signals obtained from the detectors. At least two of the detectors are provided to be symmetric with respect to the electron beam. The focus of the electron beam is adjusted based on the signals of the detectors or on a signal corresponding to a combination of the signals.
摘要翻译：即使独立地包括仅能够由特定检测器成像的多个图案或异物也能够稳定地执行自动聚焦调整。可以拾取这样的具有弱对比度的凹凸图像的图像。即使在图像中难以找到焦点位置，该技术也可以自动对焦这样的图像。扫描电子显微镜包括多个用于在用电子束照射时检测来自样本的次级信号的检测器，以及用于组合从检测器获得的信号的计算单元。至少两个检测器被提供为相对于电子束对称。基于检测器的信号或对应于信号的组合的信号来调整电子束的焦点。

5. 发明申请

US20060243905A1 Imaging method 有权
公开(公告)号：US20060243905A1
公开(公告)日：2006-11-02
申请号：US11411154
申请日：2006-04-26
申请人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
发明人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
IPC分类号： G01N23/00
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.

6. 发明授权

US07881558B2 Scanning microscope 有权
标题翻译：扫描显微镜
公开(公告)号：US07881558B2
公开(公告)日：2011-02-01
申请号：US12420263
申请日：2009-04-08
申请人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
发明人： Kohei Yamaguchi , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/36
CPC分类号： G01N23/2251
摘要： A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area.
摘要翻译：在移动视野的同时允许获取目标区域中的图像而不降低诸如图像的失焦的方法。在移动视野之前，在目标区域之前和之后获取多张图像。接下来，将这些图像分组成各自包括几个图像的组，并且创建基于每个组的集成图像。此外，计算出通过比较集成图像计算的图像位移量与拍摄的图像数量之间的关系表达式。此外，从该关系表达式计算所获取的多张图像之间的图像位移量。最后，这些图像被这些位移量的量校正，然后被整合。该过程允许重新配置目标区域中的图像。

7. 发明申请

US20100213371A1 SCANNING ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20100213371A1
公开(公告)日：2010-08-26
申请号：US12770244
申请日：2010-04-29
申请人： Kohei Yamaguchi , Kenji Obara
发明人： Kohei Yamaguchi , Kenji Obara
IPC分类号： H01J37/28 , G01N23/22
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J37/265 , H01J2237/216 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495
摘要： A technique executes autofocus adjustment stably even when a plurality of patterns or foreign matter capable of being imaged only by a specific detector are included independently. Such an image as a concavo-convex image having a weak contrast can be picked up. The technique can automatically focus such an image even when it is difficult to find a focus position in the image. A scanning electron microscope includes a plurality of detectors for detecting secondary signals from a specimen when irradiated with an electron beam, and a calculation unit for combining the signals obtained from the detectors. At least two of the detectors are provided to be symmetric with respect to the electron beam. The focus of the electron beam is adjusted based on the signals of the detectors or on a signal corresponding to a combination of the signals.
摘要翻译：即使独立地包括仅能够由特定检测器成像的多个图案或异物也能够稳定地执行自动聚焦调整。可以拾取这样的具有弱对比度的凹凸图像的图像。即使在图像中难以找到焦点位置，该技术也可以自动对焦这样的图像。扫描电子显微镜包括多个用于在用电子束照射时检测来自样本的次级信号的检测器，以及用于组合从检测器获得的信号的计算单元。至少两个检测器被提供为相对于电子束对称。基于检测器的信号或对应于信号的组合的信号来调整电子束的焦点。

8. 发明授权

US07638767B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US07638767B2
公开(公告)日：2009-12-29
申请号：US11655167
申请日：2007-01-19
申请人： Kohei Yamaguchi , Kenji Obara
发明人： Kohei Yamaguchi , Kenji Obara
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , G02B21/365 , H01J37/222 , H01J37/244 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495
摘要： There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.
摘要翻译：提供了可以清楚地检测样品中的微观不均匀性的电子显微镜。根据扫描电子显微镜，当来自一对背散射电子检测器的亮度信号由L和R给出时，当来自散射电子检测器的亮度信号由S给出时，L的调整值Lc和调整值Rc 的R是通过使用L，R和S的初级均匀表达式来计算的。

9. 发明申请

US20080270044A1 Defect Review Apparatus and Method of Reviewing Defects 有权
标题翻译：缺陷评估装置及缺陷检查方法
公开(公告)号：US20080270044A1
公开(公告)日：2008-10-30
申请号：US12108068
申请日：2008-04-23
申请人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
发明人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
IPC分类号： G01B11/03 , G06F19/00
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2817 , H01J2237/2826
摘要： The present invention aims to provide a defect review apparatus capable of suppressing a reduction in throughput with a minimized deviation-amount measurement, and capable of optimizing an FOV of a monitoring image. To this end, the review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated. Thereby, the reduction in throughput is suppressed to the minimum level, and furthermore a FOV necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount.
摘要翻译：本发明的目的在于提供一种缺陷检查装置，其能够以最小化的偏差量测量来抑制吞吐量的降低，并能够优化监视图像的FOV。为此，用于通过将样本移动到预先计算的坐标来检查样本的检查装置包括：测量预先计算的坐标与样本的实际位置的坐标之间的偏差量的函数; 优化坐标校正表达式以最小化所测量的偏差量的函数; 以及确定偏差量已经收敛的函数。当偏差量收敛时，终止坐标校正表达式优化的测量。由此，将吞吐量的降低抑制到最小水平，并且根据计算出的偏差量的收敛值来设定样本在视野范围内所需的FOV。

10. 发明授权

US08108172B2 Defect review apparatus and method of reviewing defects 有权
标题翻译：缺陷检查设备和检查缺陷的方法
公开(公告)号：US08108172B2
公开(公告)日：2012-01-31
申请号：US12953170
申请日：2010-11-23
申请人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
发明人： Takehiro Hirai , Kenji Obara , Kohei Yamaguchi
IPC分类号： G01C17/38 , G01N21/86
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2817 , H01J2237/2826
摘要： A review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, and a field of view necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount.
摘要翻译：用于通过将样本移动到预先计算的坐标来检查样本的检查装置包括：测量预先计算的坐标和样本的实际位置的坐标之间的偏差量的函数; 优化坐标校正表达式以最小化所测量的偏差量的函数; 以及确定偏差量已经收敛的函数。当偏差量已经收敛时，终止坐标校正表达式优化的测量，并且根据计算的偏差量的收敛值来设定样本在视场内所必需的视场。

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