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1. 发明授权

US06653205B2 Composite member separating method, thin film manufacturing method, and composite member separating apparatus 失效
标题翻译：复合构件分离方法，薄膜制造方法和复合构件分离装置
公开(公告)号：US06653205B2
公开(公告)日：2003-11-25
申请号：US09730560
申请日：2000-12-07
申请人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
IPC分类号： H01L2146
CPC分类号： H01L21/67092 , H01L21/76259 , Y10T156/1972
摘要： This invention relates to a composite member separating method in which a first member (1) having a separation layer (4) and a transfer layer (5) on the separation layer (4) is bonded to a second member (2) is separated at a position different from the bonding interface between the first member (1) and the second member (2), the method comprising the steps of, applying a force asymmetric with respect to the interface to the end portion of the composite member to form a crack (7A) that runs from the surface of the first member (1) to the separation layer (4) through the transfer layer (5), and then, growing the crack is grown along the separation layer (4) to completely separate the composite member.
摘要翻译：本发明涉及一种复合构件分离方法，其中在分离层（4）上具有分离层（4）和转印层（5）的第一构件（1）与第二构件（2）结合在一起，分离在与第一构件（1）和第二构件（2）之间的接合界面不同的位置，该方法包括以下步骤：将相对于界面的不对称力施加到复合构件的端部以形成裂纹（7A），其通过所述转印层（5）从所述第一构件（1）的表面延伸到所述分离层（4），然后沿着所述分离层（4）生长所述裂纹以使所述复合构件完全分离。

2. 发明授权

US06971432B2 Sample processing system 失效
标题翻译：样品处理系统
公开(公告)号：US06971432B2
公开(公告)日：2005-12-06
申请号：US10639460
申请日：2003-08-13
申请人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
IPC分类号： B32B1/00 , H01L21/00 , H01L21/677 , H01L21/687 , B32B35/00
CPC分类号： H01L21/67745 , H01L21/67092 , H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67276 , H01L21/68707 , Y10S156/93 , Y10S156/941 , Y10S438/908 , Y10T29/49819 , Y10T156/11 , Y10T156/1105 , Y10T156/19 , Y10T156/1906
摘要： This invention is to provide a processing system suitable for manufacturing an SOI substrate. A processing system includes a scalar robot for conveying a bonded substrate stack held by a robot hand, and a centering apparatus, separating apparatus, inverting apparatus, and cleaning/drying apparatus disposed at substantially equidistant positions from a driving shaft of the scalar robot. When the robot hand is pivoted about the driving shaft in the horizontal plane and moved close to or away from the driving shaft, a bonded substrate stack or separated substrate is conveyed among the processing apparatuses.
摘要翻译：本发明提供一种适于制造SOI衬底的处理系统。处理系统包括用于传送由机器人手保持的键合衬底叠层的标量机器人，以及设置在与标量机器人的驱动轴基本等距的位置的定心装置，分离装置，翻转装置和清洁/干燥装置。当机器人手在水平面中围绕驱动轴枢转并且靠近或远离驱动轴移动时，在处理装置之间传送键合衬底叠层或分离的衬底。

3. 发明申请

US20050045274A1 Sample separating apparatus and method, and substrate manufacturing method 失效
标题翻译：样品分离装置和方法，以及基板制造方法
公开(公告)号：US20050045274A1
公开(公告)日：2005-03-03
申请号：US10963483
申请日：2004-10-12
申请人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
IPC分类号： G01N1/00 , H01L21/00 , B32B1/00
CPC分类号： H01L21/67092 , Y10T29/49821 , Y10T83/364 , Y10T156/1137 , Y10T156/1939
摘要： This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the substrate holding portions (270, 280) and rotated. A jet is ejected from a nozzle (260) and injected into the porous layer of the bonded substrate stack (50), thereby separating the bonded substrate stack (50) into two substrates at the porous layer. Another separating apparatus (5000) has a pair of substrate holding portions (270, 280), a nozzle (260) of rejecting a fluid to the porous layer of a bonded substrate stack (50), and an abrupt operation prevention mechanism (4000) for preventing the lower substrate holding portion (280) from abruptly moving downward but allowing it to moderately move when separating the bonded substrate stack (50).
摘要翻译：本发明提供以高产率分离具有多孔层的键合衬底叠层的技术。分离装置（100）具有一对基板保持部（270,280）。键合衬底叠层（50）从上侧和下侧夹持并由衬底保持部分（270,280）水平保持并旋转。喷嘴从喷嘴（260）喷射并注入到键合衬底叠层（50）的多孔层中，从而在多孔层处将键合衬底叠层（50）分离成两个衬底。另一分离装置（5000）具有一对基板保持部（270,280），将粘合基板叠层（50）的多孔层排出流体的喷嘴（260）以及突然动作防止机构（4000）用于防止下基板保持部分（280）突然向下移动但允许其在分离键合衬底叠片（50）时适度地移动。

4. 发明授权

US06672358B2 Sample processing system 失效
公开(公告)号：US06672358B2
公开(公告)日：2004-01-06
申请号：US10153608
申请日：2002-05-24
申请人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi
IPC分类号： B32B3500
CPC分类号： H01L21/67745 , H01L21/67092 , H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67276 , H01L21/68707 , Y10S156/93 , Y10S156/941 , Y10S438/908 , Y10T29/49819 , Y10T156/11 , Y10T156/1105 , Y10T156/19 , Y10T156/1906
摘要： This invention is to provide a processing system suitable for manufacturing an SOI substrate. A processing system includes a scalar robot for conveying a bonded substrate stack held by a robot hand, and a centering apparatus, separating apparatus, inverting apparatus, and cleaning/drying apparatus disposed at substantially equidistant positions from a driving shaft of the scalar robot. When the robot hand is pivoted about the driving shaft in the horizontal plane and moved close to or away from the driving shaft, a bonded substrate stack or separated substrate is conveyed among the processing apparatuses.

5. 发明授权

US06605518B1 Method of separating composite member and process for producing thin film 失效
标题翻译：分离复合材料的方法和制备薄膜的方法
公开(公告)号：US06605518B1
公开(公告)日：2003-08-12
申请号：US09558657
申请日：2000-04-26
申请人： Kazuaki Ohmi , Katsumi Nakagawa , Nobuhiko Sato , Kiyofumi Sakaguchi , Kazutaka Yanagita , Takao Yonehara
发明人： Kazuaki Ohmi , Katsumi Nakagawa , Nobuhiko Sato , Kiyofumi Sakaguchi , Kazutaka Yanagita , Takao Yonehara
IPC分类号： H01L2146
CPC分类号： H01L21/76259 , Y10S438/96
摘要： To cause a crack at a fixed position in a separation layer, a method of separating a composite member includes the steps of forming a separation layer inside a composite member, forming inside the separation layer a stress riser layer in which an in-plane stress has concentratedly been produced to an extent that does not cause separation by the in-plane stress, and enlarging the in-plane stress to cause a crack in the stress riser layer, thereby separating the composite member.
摘要翻译：为了在分离层中的固定位置产生裂纹，分离复合构件的方法包括在复合构件内部形成分离层的步骤，在分离层的内部形成面内应力的应力提升层集中制造到不会由于面内应力而产生分离，扩大面内应力，引起应力提升层的裂纹，从而分离复合部件。

6. 发明授权

US06597039B2 Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof 有权
标题翻译：复合构件，其分离方法和半导体衬底的制备方法
公开(公告)号：US06597039B2
公开(公告)日：2003-07-22
申请号：US10020807
申请日：2001-12-18
申请人： Kazuaki Ohmi , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Ohmi , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： H01L2701
CPC分类号： H01L21/76254 , H01L21/76251 , H01L21/76259
摘要： A composite member containing a separation area inside. A mechanical strength of the separation area is non-uniform along a surface of the composite member or along a bonded face. A mechanical strength of a peripheral portion of the separation area is locally low.
摘要翻译：包含内部分离区域的复合构件。分离区域的机械强度沿着复合构件的表面或接合面不均匀。分离区域的周边部分的机械强度局部低。

7. 发明授权

US06475323B1 Method and apparatus for separating composite member using fluid 有权
公开(公告)号：US06475323B1
公开(公告)日：2002-11-05
申请号：US09721816
申请日：2000-11-24
申请人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , H01L21/6838 , Y10T29/49821 , Y10T83/364 , Y10T156/1137 , Y10T156/1374 , Y10T156/1922 , Y10T156/1933 , Y10T156/1939
摘要： To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.

8. 发明授权

US06382292B1 Method and apparatus for separating composite member using fluid 失效
标题翻译：使用流体分离复合构件的方法和装置
公开(公告)号：US06382292B1
公开(公告)日：2002-05-07
申请号：US09047327
申请日：1998-03-25
申请人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , H01L21/6838 , Y10T29/49821 , Y10T83/364 , Y10T156/1137 , Y10T156/1374 , Y10T156/1922 , Y10T156/1933 , Y10T156/1939
摘要： To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.
摘要翻译：为了分离由多个结合构件组成的复合构件而不破坏或损坏复合构件，从喷嘴将流体喷射到复合构件上，以在与结合位置不同的位置处将其分离成多个构件。

9. 发明授权

US06979629B2 Method and apparatus for processing composite member 失效
标题翻译：复合材料加工方法及装置
公开(公告)号：US06979629B2
公开(公告)日：2005-12-27
申请号：US10678146
申请日：2003-10-06
申请人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi , Hirokazu Kurisu
发明人： Kazutaka Yanagita , Kazuaki Ohmi , Kiyofumi Sakaguchi , Hirokazu Kurisu
IPC分类号： H01L21/306 , H01L21/00 , H01L21/02 , H01L21/336 , H01L21/762 , H01L21/84 , H01L27/12 , H01L29/786 , H01L21/30 , H01L21/46
CPC分类号： H01L21/67092 , H01L21/76259 , Y10S438/977
摘要： A detection apparatus for detecting a feature portion of a composite member having a structure in which a first member having a separation layer inside is brought into tight contact with a second member. The composite member has, as the feature portion, a portion at which a peripheral edge of the first member projects outside a peripheral edge of the second member. The apparatus includes a shift detection section which detects a shift between the peripheral edge of the first member and the peripheral edge of the second member along an outer periphery of the composite member and a determination section which determines the feature portion on the basis of a detection result by the shift detection section.
摘要翻译：一种用于检测复合构件的特征部分的检测装置，其具有其中具有内部具有分离层的第一构件与第二构件紧密接触的结构。复合构件具有作为特征部分的第一构件的周缘突出到第二构件的周边边缘的部分。该装置包括：移动检测部，其沿着复合部件的外周检测第一部件的周缘与第二部件的周缘之间的移动;判定部，其基于检测来决定特征部由移位检测部分产生。

10. 发明授权

US06746559B2 Method and apparatus for separating composite member using fluid 有权
公开(公告)号：US06746559B2
公开(公告)日：2004-06-08
申请号：US10202022
申请日：2002-07-25
申请人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , H01L21/6838 , Y10T29/49821 , Y10T83/364 , Y10T156/1137 , Y10T156/1374 , Y10T156/1922 , Y10T156/1933 , Y10T156/1939
摘要： To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.

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