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    • 3. 发明申请
    • Semiconductor Wafer Re-Use in an Exfoliation Process Using Heat Treatment
    • 半导体晶片在使用热处理的剥离工艺中再利用
    • US20090061593A1
    • 2009-03-05
    • US12170797
    • 2008-07-10
    • Kishor Purushottam GadkareeMark Andrew Stocker
    • Kishor Purushottam GadkareeMark Andrew Stocker
    • H01L21/30B32B17/06
    • H01L21/76254
    • Methods and apparatus for re-using a semiconductor donor wafer in a semiconductor-on-insulator (SOI) fabrication process provide for: (a) subjecting a first implantation surface of a donor semiconductor wafer to an ion implantation process to create a first exfoliation layer of the donor semiconductor wafer; (b) bonding the first implantation surface of the first exfoliation layer to a first insulator substrate; (c) separating the first exfoliation layer from the donor semiconductor wafer, thereby exposing a first cleaved surface of the donor semiconductor wafer, the first cleaved surface having a first damage thickness; and (d) subjecting the first cleaved surface of the donor semiconductor wafer to one or more elevated temperatures over time to reduce the first damage thickness to a sufficient level to produce a second implantation surface.
    • 在半导体绝缘体(SOI)制造工艺中重新使用半导体施主晶片的方法和装置提供:(a)使施主半导体晶片的第一注入表面经受离子注入工艺以产生第一剥离层 的供体半导体晶片; (b)将第一剥离层的第一注入表面接合到第一绝缘体基板; (c)将第一剥离层与施主半导体晶片分离,从而暴露施主半导体晶片的第一切割表面,第一裂解表面具有第一损伤厚度; 和(d)使供体半导体晶片的第一切割表面经历一个或多个升高的​​温度随时间而将第一损伤厚度减小到足够的水平以产生第二注入表面。