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    • 9. 发明授权
    • Effusion cell and method for use in molecular beam deposition
    • 用于分子束沉积的流出池和方法
    • US07402779B2
    • 2008-07-22
    • US10890046
    • 2004-07-13
    • Loren N. PfeifferKenneth William West
    • Loren N. PfeifferKenneth William West
    • H05B3/04F27B14/14C23C16/00C23C14/00
    • C23C14/243C23C14/26C30B23/066C30B35/00
    • An MBE effusion cell is configured to produce an inverted temperature gradient; that is, the top surface of the melt is not cooler than the bottom surface of the melt. In one embodiment, the MBE effusion cell comprises a crucible having tip, central and base regions. First filaments are located laterally adjacent the tip region; second filaments are located laterally adjacent the central region; and third filaments are located laterally adjacent all three of the regions. The radial density of the number of the heater filaments is lower adjacent the base region than adjacent the tip or central regions. In another embodiment, further tailoring of the inverted temperature gradient is obtained by reducing the amount of insulation at the base of the crucible. In another embodiment, at least one heater filament extends substantially along the longitudinal axis of the crucible and is located adjacent its lateral wall. Dielectric annular spacers are located around the lateral wall and are distributed along the longitudinal axis. The spacers having a multiplicity of holes through which the filaments pass. The filaments and spacers are located within a gas-blocking enclosure.
    • MBE积液单元被配置为产生反向温度梯度; 也就是说,熔体的顶部表面不比熔体的底部表面更冷。 在一个实施例中,MBE渗出池包括具有尖端,中心和底部区域的坩埚。 第一丝沿侧向邻近尖端区域定位; 第二丝沿横向邻近中心区定位; 并且第三细丝位于横向邻近所有三个区域。 加热器丝的数量的径向密度相邻于基部区域比邻近尖端或中心区域低。 在另一个实施例中,通过减少在坩埚底部的绝缘量来获得反向温度梯度的进一步裁剪。 在另一个实施例中,至少一个加热丝基本上沿着坩埚的纵向轴线延伸并且位于其侧壁附近。 电介质环形间隔物位于侧壁周围并沿着纵向轴线分布。 间隔物具有许多细丝通过的孔。 细丝和间隔物位于阻气罩内。