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    • 4. 发明授权
    • TFT array substrate and the fabrication method thereof
    • TFT阵列基板及其制造方法
    • US08507301B2
    • 2013-08-13
    • US12591657
    • 2009-11-25
    • Young Seok ChoiHong Woo YuKi Sul ChoJae Ow LeeBo Kyoung Jung
    • Young Seok ChoiHong Woo YuKi Sul ChoJae Ow LeeBo Kyoung Jung
    • H01L21/00
    • H01L27/12H01L27/1248H01L27/1288H01L29/458
    • A TFT array substrate includes: a gate electrode connected to a gate line; a source electrode connected to a data line crossing the gate line to define a pixel region; a drain electrode which is opposite to the source electrode with a channel in between; a semiconductor layer defining the channel between the source electrode and the drain electrode; a pixel electrode in the pixel region and connected to the drain electrode; a channel passivation layer on the channel of the semiconductor layer; a gate pad extending from the gate line, where a semiconductor pattern and a transparent conductive pattern are formed; a data pad connected to the data line, where the transparent conductive pattern is formed; and a gate insulating layer formed under the semiconductor layer, the gate line and the gate pad, and the data line and the data pad.
    • TFT阵列基板包括:连接到栅极线的栅电极; 源极连接到与栅极线交叉以限定像素区域的数据线; 漏电极,其与源电极相对,沟道位于其间; 限定所述源电极和所述漏电极之间的沟道的半导体层; 像素区域中的像素电极并连接到漏电极; 在半导体层的沟道上的沟道钝化层; 从栅极线延伸的栅极焊盘,其中形成半导体图案和透明导电图案; 连接到数据线的数据焊盘,其中形成透明导电图案; 以及形成在半导体层下方的栅极绝缘层,栅极线和栅极焊盘,以及数据线和数据焊盘。