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    • 5. 发明授权
    • Controller for RF power generator with reduced cable length sensitivity
    • 射频功率发生器控制器,电缆长度灵敏度降低
    • US06417732B1
    • 2002-07-09
    • US09827723
    • 2001-04-06
    • Aaron T. RadomskiKevin P. Nasman
    • Aaron T. RadomskiKevin P. Nasman
    • H03F2100
    • H03F3/21H03F1/345H03F1/52H03F3/189
    • A radio frequency (RF) power generator system includes a power generator that generates a RF power signal that is output to a load. The RF generator generates a forward power feedback signal and a reverse power feedback signal. A controller receives the forward power feedback signal and the reverse power feedback signal. The controller generates a setpoint signal that is output to the power generator. A setpoint modifier receives the forward feedback signal, the reverse feedback signal and an external setpoint signal. The setpoint modifier calculates a forward power limit based on the forward and reverse power feedback signals. The setpoint modifier and outputs a modified setpoint signal to the controller based on one of the forward power limit and the external setpoint signal. The setpoint modifier and the controller can be integrated.
    • 射频(RF)发电机系统包括产生输出到负载的RF功率信号的发电机。 RF发生器产生正向功率反馈信号和反向功率反馈信号。 控制器接收正向功率反馈信号和反向功率反馈信号。 控制器产生输出到发电机的设定值信号。 设定值修正器接收正向反馈信号,反向反馈信号和外部设定点信号。 设定值修正器根据正向和反向功率反馈信号计算正向功率限制。 设定值修正器,并根据正向功率限制和外部设定点信号之一向控制器输出修改的设定值信号。 设定值调节器和控制器可以集成。
    • 6. 发明授权
    • Process detection system for plasma process
    • 等离子体工艺过程检测系统
    • US5971591A
    • 1999-10-26
    • US954387
    • 1997-10-20
    • Daniel F. VonaKevin S. GerrishKevin P. Nasman
    • Daniel F. VonaKevin S. GerrishKevin P. Nasman
    • H01J37/32B07C17/00G06F7/00G06F17/00G07F7/00
    • H01J37/32935H01J37/32963H01J37/3299
    • Plasma process control arrangement controls a plasma generator that provides electrical power to a plasma chamber for an RF or DC plasma process. A sensor system detects operating parameters of the electrical power, including voltage and current levels. A process detection system (pds) controller has inputs coupled to the sensor system to receive the operating parameters, a programmable memory unit for storing a control program to compute an output control signal based on the operating parameters, and a control output coupled to a control input of the plasma generator. An external computer device, includes a monitor, an icon copying device for example, a mouse suitable for drag-and-drop operation, and a memory storing a suitable code-building program for generating a user-selected control program according to user-determined process requirements. Respective graphical icons are presented on the monitor and are selected and connected by use of the icon copying device to represent logic processing of the operational parameters, and the external computer device creates the corresponding user-selected control program. The user-selected control program is downloaded from the external computer device to the programmable memory of the pds controller, e.g., using standard connectors and cables.
    • 等离子体过程控制装置控制等离子体发生器,其为等离子体室提供用于RF或DC等离子体工艺的电力。 传感器系统检测电力的运行参数,包括电压和电流水平。 过程检测系统(pds)控制器具有耦合到传感器系统以接收操作参数的输入;可编程存储器单元,用于存储基于操作参数来计算输出控制信号的控制程序;以及耦合到控制器的控制输出 输入等离子体发生器。 外部计算机设备包括监视器,图标复制设备,例如适用于拖放操作的鼠标,以及存储存储用于根据用户确定的用于生成用户选择的控制程序的合适的代码构建程序的存储器 工艺要求。 相应的图形图标呈现在监视器上,并且通过使用图标复制设备来选择和连接以表示操作参数的逻辑处理,并且外部计算机设备创建相应的用户选择的控制程序。 用户选择的控制程序从外部计算机设备下载到pds控制器的可编程存储器,例如使用标准连接器和电缆。