会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • Methods of forming a conductive contact through a dielectric
    • 通过电介质形成导电接触的方法
    • US20050208745A1
    • 2005-09-22
    • US10804702
    • 2004-03-19
    • Michael Hermes
    • Michael Hermes
    • B24B1/00B24B7/19B24B7/30H01L21/44H01L21/4763H01L21/768
    • H01L21/76804
    • A dielectric is formed over a node location on a semiconductor substrate. The dielectric comprises an insulative material over the node location, an insulative polish stop layer over the insulative material, and an insulator layer over the insulative polish stop layer. A contact opening is formed into the insulator layer, the insulative polish stop layer and the insulative material to proximate the node location. A conductive material is deposited over the insulator layer and to within the contact opening. The conductive material and the insulator layer are polished to at least a portion of the insulative polish stop layer. In one implementation and prior to depositing the conductive material, at least a portion of the contact opening is widened with an etching chemistry that is selective to widen it within the insulative material to a degree greater than any widening of the contact opening within the insulative polish stop layer.
    • 在半导体衬底上的节点位置上形成电介质。 电介质包括在节点位置上的绝缘材料,绝缘材料上方的绝缘抛光停止层以及绝缘抛光停止层上的绝缘体层。 接触开口形成为绝缘体层,绝缘抛光停止层和绝缘材料以接近节点位置。 导电材料沉积在绝缘体层上并且在接触开口内。 导电材料和绝缘体层被抛光到绝缘抛光止挡层的至少一部分上。 在一个实施方案中,并且在沉积导电材料之前,接触开口的至少一部分用蚀刻化学品加宽,该蚀刻化学品可选择性地将其在绝缘材料内扩大到比绝缘抛光剂内的接触开口的任何加宽度 停止层。
    • 8. 发明申请
    • Methods of forming a conductive contact through a dielectric
    • 通过电介质形成导电接触的方法
    • US20060030145A1
    • 2006-02-09
    • US11211853
    • 2005-08-24
    • Michael Hermes
    • Michael Hermes
    • H01L21/4763
    • H01L21/76804
    • A dielectric is formed over a node location on a semiconductor substrate. The dielectric comprises an insulative material over the node location, an insulative polish stop layer over the insulative material, and an insulator layer over the insulative polish stop layer. A contact opening is formed into the insulator layer, the insulative polish stop layer and the insulative material to proximate the node location. A conductive material is deposited over the insulator layer and to within the contact opening. The conductive material and the insulator layer are polished to at least a portion of the insulative polish stop layer. In one implementation and prior to depositing the conductive material, at least a portion of the contact opening is widened with an etching chemistry that is selective to widen it within the insulative material to a degree greater than any widening of the contact opening within the insulative polish stop layer.
    • 在半导体衬底上的节点位置上形成电介质。 电介质包括在节点位置上的绝缘材料,绝缘材料上方的绝缘抛光停止层以及绝缘抛光停止层上的绝缘体层。 接触开口形成为绝缘体层,绝缘抛光停止层和绝缘材料以接近节点位置。 导电材料沉积在绝缘体层上并且在接触开口内。 导电材料和绝缘体层被抛光到绝缘抛光止挡层的至少一部分上。 在一个实施方案中,并且在沉积导电材料之前,接触开口的至少一部分用蚀刻化学品加宽,该蚀刻化学品可选择性地将其在绝缘材料内扩大到比绝缘抛光剂内的接触开口的任何加宽度 停止层。
    • 9. 发明申请
    • Semiconductor constructions
    • 半导体结构
    • US20050095853A1
    • 2005-05-05
    • US10999769
    • 2004-11-29
    • Michael Hermes
    • Michael Hermes
    • H01L21/311H01L21/768H01L21/336H01L21/44
    • H01L21/76831H01L21/31116H01L21/76829H01L21/76897H01L27/10888H01L27/10891
    • The invention includes methods of forming openings extending through electrically insulative layers to electrically conductive materials. In an exemplary aspect, a substrate is provided which supports a stack and an electrical node. The stack comprises an electrically insulative cap over an electrically conductive material. An electrically insulative layer is formed over the stack and over the electrical node. A first etch is utilized to etch through the electrically insulative layer to the electrical node and to the electrically insulative cap. The first etch etches partially into the electrically insulative cap but does not etch entirely through the electrically insulative cap. A second etch is utilized after the first etch to etch entirely through the electrically insulative cap to the electrically conductive material of the stack.
    • 本发明包括形成通过电绝缘层延伸到导电材料的开口的方法。 在示例性方面,提供了支撑堆叠和电节点的衬底。 叠层包括导电材料上的电绝缘帽。 电绝缘层形成在堆叠上并在电节点上方。 利用第一蚀刻将电绝缘层蚀刻到电节点和电绝缘帽。 第一蚀刻部分地蚀刻到电绝缘帽中,但是不完全通过电绝缘帽蚀刻。 在第一次蚀刻之后利用第二次蚀刻,以完全通过电绝缘帽蚀刻到叠层的导电材料。