会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Method of forming patterns for semiconductor device
    • 形成半导体器件图案的方法
    • US08318603B2
    • 2012-11-27
    • US12653588
    • 2009-12-16
    • Young-Ho LeeJae-Hwang SimSang-Yong ParkKyung-Lyul Moon
    • Young-Ho LeeJae-Hwang SimSang-Yong ParkKyung-Lyul Moon
    • H01L21/311
    • H01L23/528H01L21/0337H01L21/0338H01L21/3086H01L21/3088H01L21/31144H01L21/76229H01L21/76816H01L21/76838H01L27/10814H01L27/10855H01L27/11519H01L27/11526H01L2924/0002H01L2924/00
    • Provided is a method of forming patterns for a semiconductor device in which fine patterns and large-width patterns are formed simultaneously and adjacent to each other. In the method, a first layer is formed on a substrate so as to cover a first region and a second region which are included in the substrate. Both a blocking pattern covering a portion of the first layer in the first region and a low-density large-width pattern covering a portion of the first layer in the second region are simultaneously formed. A plurality of sacrificial mask patterns are formed on the first layer and the blocking pattern in the first region. A plurality of spacers covering exposed sidewalls of the plurality of sacrificial mask patterns are formed. The plurality of sacrificial mask patterns are removed. The first layer in the first and second regions are simultaneously etched by using the plurality of spacers and the blocking pattern as etch masks in the first region and using the low-density large-width pattern as an etch mask in the second region.
    • 提供一种形成半导体器件的图案的方法,其中精细图案和大幅图案同时并且彼此相邻地形成。 在该方法中,在衬底上形成第一层以覆盖包括在衬底中的第一区域和第二区域。 同时形成覆盖第一区域中的第一层的一部分的阻挡图案和覆盖第二区域中的第一层的一部分的低密度大图案。 在第一层上形成多个牺牲掩模图案,并在第一区域中形成阻挡图案。 形成覆盖多个牺牲掩模图案的暴露侧壁的多个间隔物。 去除多个牺牲掩模图案。 通过使用多个间隔物和阻挡图案作为第一区域中的蚀刻掩模并且在第二区域中使用低密度大宽度图案作为蚀刻掩模,同时蚀刻第一和第二区域中的第一层。
    • 6. 发明授权
    • Methods of forming fine patterns in the fabrication of semiconductor devices
    • 在半导体器件的制造中形成精细图案的方法
    • US08057692B2
    • 2011-11-15
    • US12290420
    • 2008-10-30
    • Sang-Yong ParkJae-Hwang SimYoung-Ho LeeKyung-Lyul MoonJae-Kwan Park
    • Sang-Yong ParkJae-Hwang SimYoung-Ho LeeKyung-Lyul MoonJae-Kwan Park
    • B44C1/22C03C15/00C03C25/68C23F1/00
    • H01L23/528H01L21/0337H01L21/0338H01L21/32139H01L21/76838H01L21/823456H01L27/115H01L2924/0002H01L2924/00
    • In a method of forming a semiconductor device, a feature layer is provided on a substrate and a mask layer is provided on the feature layer. A portion of the mask layer is removed in a first region of the semiconductor device where fine features of the feature layer are to be located, the mask layer remaining in a second region of the semiconductor device where broad features of the feature layer are to be located. A mold mask pattern is provided on the feature layer in the first region and on the mask layer in the second region. A spacer layer is provided on the mold mask pattern in the first region and in the second region. An etching process is performed to etch the spacer layer so that spacers remain at sidewalls of pattern features of the mold mask pattern, and to etch the mask layer in the second region to provide mask layer patterns in the second region. The feature layer is etched using the mask layer patterns as an etch mask in the second region and using the spacers as an etch mask in the first region to provide a feature layer pattern having fine features in the first region and broad features in the second region.
    • 在形成半导体器件的方法中,在衬底上提供特征层,并且在特征层上设置掩模层。 掩模层的一部分在半导体器件的第一区域被去除,其中特征层的精细特征将被定位,掩模层保留在半导体器件的第二区域中,其中特征层的广泛特征将是 位于。 模具掩模图案设置在第一区域中的特征层和第二区域中的掩模层上。 间隔层设置在第一区域和第二区域中的模具掩模图案上。 执行蚀刻工艺以蚀刻间隔层,使得间隔物保留在模具掩模图案的图案特征的侧壁处,并且蚀刻第二区域中的掩模层以在第二区域中提供掩模层图案。 使用掩模层图案作为第二区域中的蚀刻掩模蚀刻特征层,并且在第一区域中使用间隔物作为蚀刻掩模来提供在第一区域中具有精细特征的特征层图案,并且在第二区域中具有广泛特征 。
    • 10. 发明申请
    • GLYCERIDE OIL COMPOSITION FROM FISH OIL AND PREPARATION METHOD THEREOF
    • 来自鱼油的甘油油组合物及其制备方法
    • US20100062107A1
    • 2010-03-11
    • US12440584
    • 2007-09-05
    • Dong-Hun YoonKwang-Hoon YoonGi-Wang HanMoon-Won LeeYoung-Ho LeeSang-Hyuk Park
    • Dong-Hun YoonKwang-Hoon YoonGi-Wang HanMoon-Won LeeYoung-Ho LeeSang-Hyuk Park
    • A23D9/02A23D9/00
    • C11C3/08A23D9/007
    • Provided are a glyceride oil composition derived from a fish oil and a preparation method thereof. The composition includes docosahexaenoic acid (DHA) and docosapentaenoic acid (DPA) with a content of 45 to 95% by weight and eicosapentaenoic acid (EPA) with a content of 0.001 to 13% by weight among constituent fatty acids, and a saturated fatty acid having 16 to 18 carbon atoms, which is bonded at 1- and 3-positions, with a content of 0.001 to 5% by weight among constituent fatty acids, in which a weight ratio of docosahexaenoic acid (DHA)/docosapentaenoic acid (DPA) is 0.5 to 8 and a weight ratio of docosahexaenoic acid (DHA)/eicosapentaenoic acid (EPA) is 3.5 to 15. The glyceride oil composition derived from fish oil has nutritional and physiological superiority due to containing a great amount of polyunsaturated fatty acids such as DHA and DPA in a form of glyceride, and can minimize disadvantages of EPA such as inhibition of ω-6 fatty acid metabolism by containing a low amount of EPA. The glyceride oil composition is excellent in digestion and absorption of polyunsaturated fatty acids into a human body by containing a low amount of saturated fatty acids at 1- and 3-positions and process characteristics such as an oxidation stability and water-dispersibility.
    • 提供衍生自鱼油的甘油酯油组合物及其制备方法。 组合物包含含量为45〜95重量%的二十二碳六烯酸(DHA)和二十二碳五烯酸(DPA),二十碳五烯酸(EPA)的组成脂肪酸含量为0.001〜13重量%,饱和脂肪酸 具有16至18个碳原子,其在1-和3-位上键合,其中组分脂肪酸的含量为0.001至5重量%,其中二十二碳六烯酸(DHA)/二十二碳五烯酸(DPA) 为0.5〜8,二十二碳六烯酸(DHA)/二十碳五烯酸(EPA)的重量比为3.5〜15。来自鱼油的甘油酯油组合物由于含有大量的多不饱和脂肪酸,例如 DHA和DPA以甘油酯的形式,并且可以最小化EPA的缺点,例如通过含有少量的EPA来抑制ω-6脂肪酸代谢。 甘油酯油组合物通过在1-和3-位含有少量的饱和脂肪酸以及诸如氧化稳定性和水分散性的工艺特性,将多不饱和脂肪酸消化吸收到人体中是优异的。