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1. 发明申请

US20120262726A1 SHAPE MEASUREMENT DEVICE 有权
标题翻译：形状测量装置
公开(公告)号：US20120262726A1
公开(公告)日：2012-10-18
申请号：US13425504
申请日：2012-03-21
申请人： Kentaro Nemoto , Masaoki Yamagata , Tadashi Iwamoto , Nobuyoshi Machida
发明人： Kentaro Nemoto , Masaoki Yamagata , Tadashi Iwamoto , Nobuyoshi Machida
IPC分类号： G01B11/24
CPC分类号： G01B11/03 , G01B11/2518 , G06T7/521 , G06T2207/30164
摘要： Disclosed is a shape measurement device including: a light irradiation unit which irradiates linear light onto a work; an imaging element which images reflected light reflected by the work; and an image-forming lens which forms an image of the reflected light reflected by the work on an imaging plane of the imaging element, and a light irradiation plane of the light irradiation unit, a principal plane including a principal point of the image-forming lens, and the imaging plane of the imaging element satisfy a Scheimpflug principle. The shape measurement device further includes: an image obtaining region selection unit which divides the imaging plane of the imaging element into a plurality of regions, and selects, as an image obtaining region, a region for use in measurement from the plurality of regions in response to at least one of measurement accuracy and a size of a measurement range.
摘要翻译：公开了一种形状测量装置，包括：将线性光照射到工件上的光照射单元; 成像元件，其对由工件反射的反射光进行成像; 以及成像透镜，其形成由成像元件的成像面上的作物反射的反射光的图像和光照射单元的光照射面，包括成像主要点的主面透镜，并且成像元件的成像平面满足Scheimpflug原理。形状测量装置还包括：图像获取区域选择单元，其将成像元件的成像平面划分成多个区域，并从响应于多个区域中选择用于测量的区域作为图像获取区域至少一个测量精度和测量范围的大小。

2. 发明授权

US08553234B2 Shape measurement device 有权
标题翻译：形状测量装置
公开(公告)号：US08553234B2
公开(公告)日：2013-10-08
申请号：US13425504
申请日：2012-03-21
申请人： Kentaro Nemoto , Masaoki Yamagata , Tadashi Iwamoto , Nobuyoshi Machida
发明人： Kentaro Nemoto , Masaoki Yamagata , Tadashi Iwamoto , Nobuyoshi Machida
IPC分类号： G01B11/24
CPC分类号： G01B11/03 , G01B11/2518 , G06T7/521 , G06T2207/30164
摘要： Disclosed is a shape measurement device including: a light irradiation unit which irradiates linear light onto a work; an imaging element which images reflected light reflected by the work; and an image-forming lens which forms an image of the reflected light reflected by the work on an imaging plane of the imaging element, and a light irradiation plane of the light irradiation unit, a principal plane including a principal point of the image-forming lens, and the imaging plane of the imaging element satisfy a Scheimpflug principle. The shape measurement device further includes: an image obtaining region selection unit which divides the imaging plane of the imaging element into a plurality of regions, and selects, as an image obtaining region, a region for use in measurement from the plurality of regions in response to at least one of measurement accuracy and a size of a measurement range.
摘要翻译：公开了一种形状测量装置，包括：光线照射单元，其将线性光照射到工件上; 成像元件，其对由工件反射的反射光进行成像; 以及成像透镜，其形成由成像元件的成像面上的作物反射的反射光的图像和光照射单元的光照射面，包括成像主要点的主面透镜，并且成像元件的成像平面满足Scheimpflug原理。形状测量装置还包括：图像获取区域选择单元，其将成像元件的成像平面划分成多个区域，并从响应于多个区域中选择用于测量的区域作为图像获取区域至少一个测量精度和测量范围的大小。

3. 发明授权

US08139229B2 Calibrating jig, profile measuring device, and method of offset calculation 有权
标题翻译：校准夹具，型材测量装置和偏移计算方法
公开(公告)号：US08139229B2
公开(公告)日：2012-03-20
申请号：US12457782
申请日：2009-06-22
申请人： Masaoki Yamagata , Yasuhiro Takahama , Hiraku Ishiyama , Kentaro Nemoto
发明人： Masaoki Yamagata , Yasuhiro Takahama , Hiraku Ishiyama , Kentaro Nemoto
IPC分类号： G01B11/24
CPC分类号： G01B11/03 , G01B3/30 , G01B11/24 , G01B11/2433 , G01B21/042
摘要： A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.
摘要翻译：校准夹具包括参考球，以及反射板，其构造成在从其上侧照射参考球的情况下，从其下侧支撑参考球并镜反射光。

4. 发明申请

US20130083384A1 OPTICAL PROBE 有权
标题翻译：光学探头
公开(公告)号：US20130083384A1
公开(公告)日：2013-04-04
申请号：US13611775
申请日：2012-09-12
申请人： Masaoki Yamagata , Kentaro Nemoto
发明人： Masaoki Yamagata , Kentaro Nemoto
IPC分类号： G02B26/02 , G02B26/00
CPC分类号： G02B26/0841 , G01B11/24 , G02B19/0052 , G02B27/0911 , G02B27/0916 , G02B27/0977
摘要： An optical probe includes a laser light source that emits laser light, a collimator lens that converts the laser light into parallel light, a light shape changing section that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section that picks up an image of the object based on the laser light reflected from the object, and a controller that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.
摘要翻译：光探头包括发射激光的激光源，将激光转换为平行光的准直透镜，将平行光转换为线性激光的光形变化部，照射部，对所选择的物体进行照射线性激光的一部分，基于从物体反射的激光拾取物体的图像的图像拾取部分和控制线性激光的照射的控制器。线性激光由包括一个端部和另一个端部的多个部分组成; 并且所述照射部从所述一个端部到另一个端部顺序地照射所述物体与所述线性激光的部分。

5. 发明授权

US07701562B2 Method of measuring front and back surfaces of target object 有权
标题翻译：测量目标物体前后表面的方法
公开(公告)号：US07701562B2
公开(公告)日：2010-04-20
申请号：US12379177
申请日：2009-02-13
申请人： Kentaro Nemoto , Masaoki Yamagata
发明人： Kentaro Nemoto , Masaoki Yamagata
IPC分类号： G01B9/00
CPC分类号： G01B5/20 , G01B5/008 , G01B5/252 , G01M11/025
摘要： A method of measuring a front surface profile and a back surface profile of a target object includes: mounting the target object in such a posture that a first measuring surface (front surface) is measurable by a probe; first measuring a contour of the target object; measuring the first measuring surface of the target object; reversing the target object; second measuring the contour of the target object with the reversed posture of the target object being maintained; obtaining a measurement position of a second measuring surface by comparison of contour data obtained through the first and second measuring of the contour, the measurement position of the second measuring surface corresponding to a measurement position of the first measuring surface at which the measuring of the first measuring surface is conducted; and measuring a profile of the second measuring surface along the obtained measurement position of the second measuring surface.
摘要翻译：测量目标物体的前表面轮廓和后表面轮廓的方法包括：以使第一测量表面（前表面）可由探头测量的姿态安装目标物体; 首先测量目标对象的轮廓; 测量目标物体的第一测量表面; 反转目标物体; 第二次测量目标对象的轮廓，并保持目标对象的反向姿势; 通过比较通过第一和第二测量轮廓获得的轮廓数据，获得第二测量表面的测量位置，第二测量表面的测量位置对应于第一测量表面的测量位置测量表面进行; 以及沿所获得的所述第二测量表面的测量位置测量所述第二测量表面的轮廓。

6. 发明申请

US20120098963A1 IMAGE MEASURING APPARATUS 有权
标题翻译：图像测量装置
公开(公告)号：US20120098963A1
公开(公告)日：2012-04-26
申请号：US13277493
申请日：2011-10-20
申请人： Masaoki Yamagata , Kentaro Nemoto
发明人： Masaoki Yamagata , Kentaro Nemoto
IPC分类号： H04N7/18
CPC分类号： G01B11/25 , G01B11/03
摘要： An image measuring apparatus includes: a light source; an imaging device; and a controller configured to adjust a light emission amount of the light source based on a light reception amount of the imaging device, wherein: when a light reception amount of the light receiving element is more than a maximum value, the controller reduces a light amount of the light source in next light reception; when the light reception amount of the light receiving element is less than the maximum value, the controller increases the light amount of the light source in the next light reception; and when the light amount of the light source reaches the maximum light amount and the light reception amount is smaller than a minimum value, the controller makes the light amount of the light source in the next light reception a minimum light amount.
摘要翻译：一种图像测量装置，包括：光源; 成像装置; 以及控制器，其被配置为基于所述摄像装置的光接收量来调整所述光源的发光量，其中：当所述受光元件的光接收量大于最大值时，所述控制器减少光量的光源在下次光接收; 当光接收元件的光接收量小于最大值时，控制器在下次光接收中增加光源的光量; 并且当光源的光量达到最大光量并且光接收量小于最小值时，控制器使得光接收中的光源的光量处于最小光量。

7. 发明授权

US08643718B2 Image measuring apparatus 有权
标题翻译：图像测量仪
公开(公告)号：US08643718B2
公开(公告)日：2014-02-04
申请号：US13277493
申请日：2011-10-20
申请人： Masaoki Yamagata , Kentaro Nemoto
发明人： Masaoki Yamagata , Kentaro Nemoto
IPC分类号： H04N7/18
CPC分类号： G01B11/25 , G01B11/03
摘要： An image measuring apparatus includes: a light source; an imaging device; and a controller configured to adjust a light emission amount of the light source based on a light reception amount of the imaging device, wherein: when a light reception amount of the light receiving element is more than a maximum value, the controller reduces a light amount of the light source in next light reception; when the light reception amount of the light receiving element is less than the maximum value, the controller increases the light amount of the light source in the next light reception; and when the light amount of the light source reaches the maximum light amount and the light reception amount is smaller than a minimum value, the controller makes the light amount of the light source in the next light reception a minimum light amount.
摘要翻译：一种图像测量装置，包括：光源; 成像装置; 以及控制器，被配置为基于所述摄像装置的光接收量来调整所述光源的发光量，其中：当所述受光元件的光接收量大于最大值时，所述控制器减少光量的光源在下次光接收; 当光接收元件的光接收量小于最大值时，控制器在下次光接收中增加光源的光量; 并且当光源的光量达到最大光量并且光接收量小于最小值时，控制器使得光接收中的光源的光量处于最小光量。

8. 发明授权

US08416426B2 Calibrating jig, profile measuring device, and method of offset calculation 有权
标题翻译：校准夹具，型材测量装置和偏移计算方法
公开(公告)号：US08416426B2
公开(公告)日：2013-04-09
申请号：US13369079
申请日：2012-02-08
申请人： Masaoki Yamagata , Yasuhiro Takahama , Hiraku Ishiyama , Kentaro Nemoto
发明人： Masaoki Yamagata , Yasuhiro Takahama , Hiraku Ishiyama , Kentaro Nemoto
IPC分类号： G01B11/24
CPC分类号： G01B11/03 , G01B3/30 , G01B11/24 , G01B11/2433 , G01B21/042
摘要： A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.
摘要翻译：校准夹具包括参考球，以及反射板，其构造成在从其上侧照射参考球的情况下，从其下侧支撑参考球并镜反射光。

9. 发明授权

US07869970B2 Probe straightness measuring method 有权
标题翻译：探头平直度测量方法
公开(公告)号：US07869970B2
公开(公告)日：2011-01-11
申请号：US12363887
申请日：2009-02-02
申请人： Kentaro Nemoto , Masaoki Yamagata
发明人： Kentaro Nemoto , Masaoki Yamagata
IPC分类号： G01C17/38 , G01C25/00
CPC分类号： G01B3/008 , G01B5/012 , G01B21/042
摘要： A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position of the measurement piece obtained in the measuring, a nominal position of the measurement piece obtained by a calculation and a slant angle of the measurement reference surface.
摘要翻译：探头平直度测量方法包括：将具有已知轮廓误差的测量基准表面的测量夹具放置在XY台的台表面上，使得测量基准表面在XY平台的移动方向上倾斜; 在控制驱动致动器的同时，每当XY台移动预定距离时，通过探头的位移检测器测量测量件的位移位置，使得探头的测量片以恒定的压力接触测量参考表面; 基于测量得到的测量件的测量位置，通过计算得到的测量件的标称位置和测量基准表面的倾斜角度来计算测量件移动机构的平直度误差。

10. 发明申请

US20090198472A1 PROBE STRAIGHTNESS MEASURING METHOD 有权
标题翻译：探索直观测量方法
公开(公告)号：US20090198472A1
公开(公告)日：2009-08-06
申请号：US12363887
申请日：2009-02-02
申请人： Kentaro Nemoto , Masaoki Yamagata
发明人： Kentaro Nemoto , Masaoki Yamagata
IPC分类号： G01B21/00 , G06F15/00
CPC分类号： G01B3/008 , G01B5/012 , G01B21/042
摘要： A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position of the measurement piece obtained in the measuring, a nominal position of the measurement piece obtained by a calculation and a slant angle of the measurement reference surface.
摘要翻译：探头平直度测量方法包括：将具有已知轮廓误差的测量基准表面的测量夹具放置在XY台的台表面上，使得测量基准表面在XY平台的移动方向上倾斜; 在控制驱动致动器的同时，每当XY台移动预定距离时，通过探头的位移检测器测量测量件的位移位置，使得探头的测量片以恒定的压力接触测量参考表面; 基于测量得到的测量件的测量位置，通过计算得到的测量件的标称位置和测量基准表面的倾斜角度来计算测量件移动机构的平直度误差。

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