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    • 3. 发明申请
    • WIRING SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
    • 接线基板及其制造方法
    • US20110147924A1
    • 2011-06-23
    • US12967322
    • 2010-12-14
    • Kentaro KANEKOKotaro KODANI
    • Kentaro KANEKOKotaro KODANI
    • H01L23/52H01L21/441
    • H01L23/49827H01L23/49816H01L23/49822H01L23/49866H01L2924/0002H01L2924/00
    • A wiring substrate includes an insulating layer, a wiring layer buried in the insulating layer, and a connection pad connected to the wiring layer via a via conductor provided in the insulating layer and in which at least a part is buried in an outer surface side of the insulating layer, wherein the connection pad includes a first metal layer (a first copper layer) arranged on the outer surface side, an intermediate metal layer (a nickel layer) arranged on a surface of an inner layer side of the first metal layer, and a second metal layer (a second copper layer) arranged on a surface of an inner layer side of the intermediate metal layer, and a hardness of the intermediate metal layer is higher than a hardness of the first metal layer and the second metal layer.
    • 布线基板包括绝缘层,埋在绝缘层中的布线层,以及连接焊盘,该连接焊盘经由设置在绝缘层中的通路导体连接到布线层,并且至少一部分埋设在绝缘层的外表面侧 所述绝缘层,其中所述连接焊盘包括布置在所述外表面侧上的第一金属层(第一铜层),布置在所述第一金属层的内层侧的表面上的中间金属层(镍层) 以及布置在中间金属层的内层侧的表面上的第二金属层(第二铜层),并且中间金属层的硬度高于第一金属层和第二金属层的硬度。