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1. 发明授权

US06835415B2 Compliant layer chucking surface 有权
标题翻译：符合层夹紧面
公开(公告)号：US06835415B2
公开(公告)日：2004-12-28
申请号：US10338266
申请日：2003-01-07
申请人： Kenneth L. Blaedel , Paul A. Spence , Samuel L. Thompson
发明人： Kenneth L. Blaedel , Paul A. Spence , Samuel L. Thompson
IPC分类号： C23C1600
CPC分类号： H01L21/02
摘要： A method and apparatus are described wherein a thin layer of complaint material is deposited on the surface of a chuck to mitigate the deformation that an entrapped particle might cause in the part, such as a mask or a wafer, that is clamped to the chuck. The harder particle will embed into the softer layer as the clamping pressure is applied. The material composing the thin layer could be a metal or a polymer for vacuum or electrostatic chucks. It may be deposited in various patterns to affect an interrupted surface, such as that of a “pin” chuck, thereby reducing the probability of entrapping a particle.
摘要翻译：描述了一种方法和装置，其中在卡盘的表面上沉积薄层的投诉材料，以减轻被卡住的颗粒在被夹紧到卡盘的部分（例如掩模或晶片）中可能引起的变形。当施加夹紧压力时，较硬的颗粒将嵌入较软的层中。构成薄层的材料可以是用于真空或静电卡盘的金属或聚合物。它可以以各种图案沉积以影响诸如“针”卡盘的中断表面，从而降低捕获颗粒的可能性。

2. 发明授权

US06408526B1 Ultra-precision positioning assembly 失效
标题翻译：超精密定位组件
公开(公告)号：US06408526B1
公开(公告)日：2002-06-25
申请号：US09289761
申请日：1999-04-12
申请人： Richard C. Montesanti , Stanley F. Locke , Samuel L. Thompson
发明人： Richard C. Montesanti , Stanley F. Locke , Samuel L. Thompson
IPC分类号： B23Q318
CPC分类号： B23Q1/34 , B23Q1/48 , B23Q3/18 , B23Q17/2495
摘要： An apparatus and method is disclosed for ultra-precision positioning. A slide base provides a foundational support. A slide plate moves with respect to the slide base along a first geometric axis. Either a ball-screw or a piezoelectric actuator working separate or in conjunction displaces the slide plate with respect to the slide base along the first geometric axis. A linking device directs a primary force vector into a center-line of the ball-screw. The linking device consists of a first link which directs a first portion of the primary force vector to an apex point, located along the center-line of the ball-screw, and a second link for directing a second portion of the primary force vector to the apex point. A set of rails, oriented substantially parallel to the center-line of the ball-screw, direct movement of the slide plate with respect to the slide base along the first geometric axis and are positioned such that the apex point falls within a geometric plane formed by the rails. The slide base, the slide plate, the ball-screw, and the linking device together form a slide assembly. Multiple slide assemblies can be distributed about a platform. In such a configuration, the platform may be raised and lowered, or tipped and tilted by jointly or independently displacing the slide plates.
摘要翻译：公开了一种用于超精密定位的装置和方法。幻灯片基座提供基础支持。滑板相对于滑动基座沿着第一几何轴线移动。工作分离或联合的滚珠丝杠或压电致动器沿着第一几何轴线相对于滑动基座移动滑板。连接装置将主力矢量引导到滚珠丝杠的中心线。连接装置包括将主力矢量的第一部分引导到沿着滚珠丝杠的中心线定位的顶点的第一连杆和用于将主力矢量的第二部分引导到顶点。基本上平行于滚珠丝杠的中心线定向的一组导轨，使滑板相对于第一几何轴线相对于滑动基座直接运动，并且定位成使得顶点落入形成的几何平面内通过轨道。滑动基座，滑板，滚珠丝杠和连接装置一起形成滑动组件。可以围绕平台分发多个滑动组件。在这种构造中，平台可以通过联合地或独立地移动滑板来升高和降低，或倾斜和倾斜。

3. 发明授权

US06839970B2 Method and system for ultra-precision positioning 失效
标题翻译：超精密定位方法与系统
公开(公告)号：US06839970B2
公开(公告)日：2005-01-11
申请号：US10150560
申请日：2002-05-17
申请人： Richard C. Montesanti , Stanley F. Locke , Samuel L. Thompson
发明人： Richard C. Montesanti , Stanley F. Locke , Samuel L. Thompson
IPC分类号： B23Q1/34 , B23Q1/48 , B23Q3/18 , B23Q1/26
CPC分类号： B23Q1/34 , B23Q1/48 , B23Q3/18 , B23Q17/2495
摘要： An apparatus and method is disclosed for ultra-precision positioning. A slide base provides a foundational support. A slide plate moves with respect to the slide base along a first geometric axis. Either a ball-screw or a piezoelectric actuator working separate or in conjunction displaces the slide plate with respect to the slide base along the first geometric axis. A linking device directs a primary force vector into a center-line of the ball-screw. The linking device consists of a first link which directs a first portion of the primary force vector to an apex point, located along the center-line of the ball-screw, and a second link for directing a second portion of the primary force vector to the apex point. A set of rails, oriented substantially parallel to the center-line of the ball-screw, direct movement of the slide plate with respect to the slide base along the first geometric axis and are positioned such that the apex point falls within a geometric plane formed by the rails. The slide base, the slide plate, the ball-screw, and the linking device together form a slide assembly. Multiple slide assemblies can be distributed about a platform. In such a configuration, the platform may be raised and lowered, or tipped and tilted by jointly or independently displacing the slide plates.
摘要翻译：公开了一种用于超精密定位的装置和方法。幻灯片基座提供基础支持。滑板相对于滑动基座沿着第一几何轴线移动。工作分离或联合的滚珠丝杠或压电致动器沿着第一几何轴线相对于滑动基座移动滑板。连接装置将主力矢量引导到滚珠丝杠的中心线。连接装置包括将主力矢量的第一部分引导到沿着滚珠丝杠的中心线定位的顶点的第一连杆和用于将主力矢量的第二部分引导到顶点。基本上平行于滚珠丝杠的中心线定向的一组导轨，使滑板相对于第一几何轴线相对于滑动基座直接运动，并且定位成使得顶点落入形成的几何平面内通过轨道。滑动基座，滑板，滚珠丝杠和连接装置一起形成滑动组件。可以围绕平台分发多个滑动组件。在这种构造中，平台可以通过联合地或独立地移动滑板来升高和降低，或倾斜和倾斜。

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