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    • 10. 发明申请
    • TUNABLE CAPACITOR
    • TUNABLE电容器
    • US20090108320A1
    • 2009-04-30
    • US11923864
    • 2007-10-25
    • Corey K. BarrowsJoseph A. IadanzaEdward J. NowakDouglas W. StoutMark S. Styduhar
    • Corey K. BarrowsJoseph A. IadanzaEdward J. NowakDouglas W. StoutMark S. Styduhar
    • H01L29/94
    • H01L29/94
    • Disclosed are embodiments of a design structure transistor that operates as a capacitor and an associated method of tuning capacitance within such a capacitor. The embodiments of the capacitor comprise a field effect transistor with front and back gates above and below a semiconductor layer, respectively. The capacitance value exhibited by the capacitor can be selectively varied between two different values by changing the voltage condition in a source/drain region of the transistor, e.g., using a switch or resistor between the source/drain region and a voltage supply. Alternatively, the capacitance value exhibited by the capacitor can be selectively varied between multiple different values by changing voltage conditions in one or more of multiple channel regions that are flanked by multiple source/drain regions within the transistor. The capacitor will exhibit different capacitance values depending upon the conductivity in each of the channel regions.
    • 公开了作为电容器操作的设计结构晶体管的实施例以及在这种电容器内调谐电容的相关方法。 电容器的实施例包括分别在半导体层上方和下方具有前栅极和后栅极的场效应晶体管。 通过改变晶体管的源极/漏极区域中的电压条件,例如使用源极/漏极区域和电压源之间的开关或电阻器,可以通过改变晶体管的源极/ 或者,可以通过改变在晶体管内侧面有多个源极/漏极区域的多个沟道区域中的一个或多个中的电压条件来选择性地在多个不同值之间变化由电容器呈现的电容值。 根据每个通道区域中的电导率,电容器将呈现不同的电容值。