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1. 发明授权

US06762820B2 Exposure apparatus and device manufacturing method 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US06762820B2
公开(公告)日：2004-07-13
申请号：US09948796
申请日：2001-09-10
申请人： Kenji Udagawa , Tomoyuki Yoshida , Michinori Hashimoto , Fumio Karibe
发明人： Kenji Udagawa , Tomoyuki Yoshida , Michinori Hashimoto , Fumio Karibe
IPC分类号： G03B2752
CPC分类号： G03F7/708 , G03B27/42
摘要： A chemical filter, which removes chemical pollutants from gas and controls temperature fluctuation of the gas before and after passing through the filter to within a predetermined range, is arranged in a portion of a ventilation path extending from a machine chamber housing at least a portion of an air conditioning unit to a main body chamber housing an exposure apparatus main body. Accordingly, the atmosphere around the exposure apparatus main body arranged downstream of the chemical filter is kept chemically clean, and the temperature fluctuation of the gas, of which the temperature is set to a target temperature by the air conditioner, after passing through the chemical filter is limited. That is, occurrence of a problem such as an illumination reduction caused by tarnish of optical members and an increase of the temperature fluctuation amount of the gas supplied into the main body chamber can be effectively limited.
摘要翻译：一种化学过滤器，其从气体中除去化学污染物并且将通过过滤器之前和之后的气体的温度波动控制在预定范围内，设置在从容纳至少一部分空调单元到容纳曝光装置主体的主体室。因此，布置在化学过滤器下游的曝光装置主体周围的气氛保持化学清洁，并且在通过化学过滤器之后，通过空调将温度设定为目标温度的气体的温度波动有限也就是说，可以有效地限制诸如由光学构件的晦暗引起的照明减少和供应到主体室中的气体的温度波动量的增加的问题的发生。

2. 发明授权

US5830414A Air cleaning filter 失效
标题翻译：空气净化过滤器
公开(公告)号：US5830414A
公开(公告)日：1998-11-03
申请号：US682569
申请日：1996-07-29
申请人： Tsutomu Ishii , Seiichi Takizawa , Tetsuo Shimamura , Michinori Hashimoto , Shozo Ichimura , Fumio Karibe
发明人： Tsutomu Ishii , Seiichi Takizawa , Tetsuo Shimamura , Michinori Hashimoto , Shozo Ichimura , Fumio Karibe
IPC分类号： A61L9/16 , B01D53/02 , B01D53/38 , B01D53/81 , B01J20/20 , A62B7/08
CPC分类号： A61L9/16 , B01D53/38 , B01J20/20
摘要： An air cleaning filter having a carrier made of activated carbon fibers in the form of a web which supports at least one kind of chemical agent selected from the group consisting of (a) an alkali agent selected from a hydroxide or carbonate or an alkali metal, (b) an acidifying agent selected from acid aluminum phosphate or phosphoric acid, and (c) an oxidizing agent composed of two compounds, i.e. active manganese dioxide resulting from an alkali permanganate and an alkali iodate, or which supports combined chemicals of (a) the alkali agent and (c) the oxidizing agent, or combined chemicals of (b) the acidifying agent and (c) the oxidizing agent, wherein one or both surfaces of the web are covered with a nonwoven fabric to make an integrated filter.
摘要翻译： PCT No.PCT / JP94 / 02016 Sec。 371日期：1996年7月29日 102（e）日期1996年7月29日PCT 1994年11月30日PCT PCT。第WO96 / 16719号公报日期1996年6月6日，一种空气净化过滤器，其具有由纤维网形式的活性炭纤维制成的载体，所述载体支持至少一种选自以下的化学试剂：（a）选自氢氧化物或碳酸盐的碱剂或碱金属，（b）选自酸式磷酸铝或磷酸的酸化剂，和（c）由两种化合物组成的氧化剂，即由碱金属高锰酸盐和碱式碘酸盐得到的活性二氧化锰，或者其组合（a）碱剂和（c）氧化剂的化学品，或（b）酸化剂和（c）氧化剂的组合化学品，其中纤维网的一个或两个表面被无纺布覆盖以制成一个集成的过滤器。

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