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1. 发明授权

US4928010A Observing a surface using a charged particle beam 失效
标题翻译：使用带电粒子束观察表面
公开(公告)号：US4928010A
公开(公告)日：1990-05-22
申请号：US233612
申请日：1988-07-25
申请人： Kenichi Saito , Kou Wada , Masahiro Yoshizawa
发明人： Kenichi Saito , Kou Wada , Masahiro Yoshizawa
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , H01J2237/281
摘要： An arrangement for observing a surface using a charged particle beam irradiated on the surface of a specimen and detecting secondary electrons emitted. An exciting device produces a strong magnetic field substantially perpendicular to the surface of the specimen. Secondary electrons are extracted from a bottom or side surface of a recess, such as a through hole formed in the surface of the specimen, by an interaction between the emitted secondary electrons and the strong magnetic field. A focusing lens is arranged so as to focus the charged particles at a point on the specimen, even in the presence of a strong field. Thus, a secondary electron image on the surface of the specimen can be sharply obtained to thereby observe a secondary electron image at the bottom surface or side surface of the through hole.
摘要翻译： PCT No.PCT / JP87 / 00880 Sec。 371日期：1988年7月25日 102（e）日期1988年7月25日PCT提交1987年11月13日PCT公布。出版物WO88 / 04104 日期：1988年6月2日。使用照射在试样表面上的带电粒子束观察表面的布置，检测发射的二次电子。激励装置产生大致垂直于样品表面的强磁场。二次电子通过发射的二次电子和强磁场之间的相互作用从凹陷的底部或侧表面提取，例如形成于样品表面的通孔。聚焦透镜被布置成即使在存在强场的情况下也可将带电粒子聚焦在样品上的某一点。因此，可以清楚地获得样品表面上的二次电子图像，从而在通孔的底表面或侧表面观察二次电子图像。

2. 发明授权

US5006795A Charged beam radiation apparatus 失效
标题翻译：带电束辐射装置
公开(公告)号：US5006795A
公开(公告)日：1991-04-09
申请号：US878015
申请日：1986-06-24
申请人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
发明人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
IPC分类号： G01Q70/02 , G01R31/305 , H01J37/26
CPC分类号： G01R31/305 , H01J37/268
摘要： A charged beam radiation apparatus includes an auxiliary charged beam emitting mechanism, a main charged beam emitting mechanism, a secondary electron detector, and a computer as a controller. The auxiliary charged beam emitting mechanism emits an auxiliary charged beam of a given acceleration voltage onto a predetermined portion of an electronic device to be measured. The main charged beam emitting mechanism emits a main charged beam of an acceleration voltage lower than that of the auxiliary charged beam onto the predetermined portion and the vicinity of the predetermined portion. The secondary electron detector detects secondary electrons generated from a portion irradiated by the main charged beam. The controller measures a change in a secondary electron signal from the secondary electron detector.
摘要翻译：带电波束辐射装置包括辅助充电光束发射机构，主充电光束发射机构，二次电子检测器和作为控制器的计算机。辅助充电光束发射机构将给定加速电压的辅助充电光束发射到要测量的电子设备的预定部分上。主充电光束发射机构将预定部分和预定部分附近的加电压低于辅助充电光束的主充电光束发射。二次电子检测器检测由主充电光束照射的部分产生的二次电子。控制器测量来自二次电子检测器的二次电子信号的变化。

3. 发明授权

US4980639A Method and apparatus for testing integrated electronic device 失效
标题翻译：集成电子设备测试方法和装置
公开(公告)号：US4980639A
公开(公告)日：1990-12-25
申请号：US166763
申请日：1988-03-03
申请人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
发明人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
IPC分类号： G01Q30/02 , G01Q30/04 , G01Q80/00 , G01Q90/00 , G01R31/305
CPC分类号： G01R31/305
摘要： A method and apparatus for testing an integrated electronic device wherein the integrated electronic device to be tested is placed on a sample table. A predetermined position of the integrated electronic device is irradiated with the primary charged beam. A substrate current flowing through a substrate of the integrated electronic device is measured upon radiation of the primary charged beam, and then a potential of the predetermined position irradiated with the primary charged beam is nondestructively measured in accordance with secondary electrons emitted from the predetermined position. A function of the integrated electronic device is evaluated in accordance with the substrate current and the predetermined position potential. The function to be evaluated include leakage characteristics and a capacitance.
摘要翻译：一种用于测试集成电子设备的方法和装置，其中将要测试的集成电子设备放置在样品台上。用主充电光束照射集成电子设备的预定位置。通过一次充电光束的辐射测量流过集成电子器件的衬底的衬底电流，然后根据从预定位置发射的二次电子非破坏性地测量用主充电光束照射的预定位置的电位。根据衬底电流和预定位置电位来评估集成电子器件的功能。要评估的功能包括泄漏特性和电容。

4. 发明授权

US4851768A Characteristic test apparatus for electronic device and method for using the same 失效
标题翻译：电子装置用特征试验装置及其使用方法
公开(公告)号：US4851768A
公开(公告)日：1989-07-25
申请号：US212047
申请日：1988-06-24
申请人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
发明人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
IPC分类号： H01L21/66 , G01Q30/02 , G01Q30/04 , G01Q90/00 , G01R31/26 , G01R31/302 , G01R31/305 , G01R31/3183 , H01J37/28
CPC分类号： G01R31/305
摘要： In a characteristic test apparatus for an electronic device, a number of voltage supply beams are radiated onto predetermined irradiation positions of the electronic device placed on a sample table. In addition, a potential measuring beam is radiated onto a number of irradiation positions including the predetermined irradiation positions of the voltage supply beams. A secondary electron signal based on the potential measuring beam is detected to measure a potential. When the irradiation position of the potential measuring beam coincides with that of the voltage supply beam, the voltage supply beam is controlled to adjust a potential at the irradiation position to a set value by controlling, e.g., an acceleration power source for the voltage supply beam. When the irradiation position of the potential measuring beam is different from that of the voltage supply beam, a potential at this position is measured. Then, characteristics of the electronic device are calculated based on the obtained potentials at the respective irradiation positions.
摘要翻译：在用于电子设备的特征测试装置中，多个电压供应光束照射到放置在样品台上的电子设备的预定照射位置上。此外，将潜在的测量光束照射到包括电压供应光束的预定照射位置的多个照射位置。检测基于电位测量光束的二次电子信号来测量电位。当电位测量光束的照射位置与电压供应光束的照射位置一致时，电压供应光束被控制以通过控制例如电压源光束的加速度电源来将照射位置处的电位调整到设定值。当电位测量光束的照射位置与电压供应光束的照射位置不同时，测量该位置处的电位。然后，基于在各个照射位置处获得的电位来计算电子设备的特性。

5. 发明授权

US5097204A Method and apparatus for evaluating the capacitance of an integrated electronic device using an E beam 失效
标题翻译：用于评估使用E光束的集成电子设备的电容的方法和装置
公开(公告)号：US5097204A
公开(公告)日：1992-03-17
申请号：US592560
申请日：1990-10-03
申请人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
发明人： Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
IPC分类号： G01Q30/02 , G01Q30/04 , G01Q80/00 , G01Q90/00 , G01R31/305
CPC分类号： G01R31/305
摘要： A method and apparatus for testing an integrated electronic device wherein the integrated electronic device to be tested is placed on a sample table. A predetermined position of the integrated electronic device is irradiated with the primary charged beam. A substrate current flowing through a substrate of the integrated electronic device is measured upon radiation of the primary charged beam, and then a potential of the predetermined position irradiated with the primary charged beam is nondestructively measured in accordance with secondary electrons emitted from the predetermined position. A function of the integrated electronic device is evaluated in accordance with the substrate current and the predetermined position potential. The function to be evaluated includes leakage characteristics and a capacitance.

6. 发明授权

US5357830A Cable cutting apparatus with mechanism for preventing erroneous cable cutting 失效
标题翻译：电缆切割装置，具有防止电缆错误切割的机构
公开(公告)号：US5357830A
公开(公告)日：1994-10-25
申请号：US85984
申请日：1993-07-01
申请人： Tadashi Mori , Masao Sakata , Kou Wada , Toshihiko Odagiri
发明人： Tadashi Mori , Masao Sakata , Kou Wada , Toshihiko Odagiri
IPC分类号： H02G1/00 , B26B17/00
CPC分类号： H02G1/005 , Y10T83/04
摘要： A cable cutting apparatus incorporating a mechanism for preventing the erroneous cutting of the cables in use, which is both inexpensive and simple. This cable cutting apparatus includes a cutting mechanism having cutting blades for cutting a cable; a core potential recognition unit for recognizing a potential of the cutting blades brought into contact with a core of the cable as one of a potential for a cable in use and a potential for a cable out of use; and a locking mechanism for locking cutting movements of the cutting blades of the cutting mechanism whenever the core potential recognition unit recognizes the potential of the cutting blades in contact with the core of the cable as the potential for a cable in use.
摘要翻译：一种电缆切割装置，其包括用于防止使用中的电缆的错误切割的机构，其既便宜又简单。该电缆切割装置包括具有用于切割电缆的切割刀片的切割机构; 用于识别与电缆的芯接触的切割刀片的电位的核心电位识别单元，作为使用中的电缆的可能性和电缆的使用潜力之一; 以及用于锁定切割机构的切割刀片的切割运动的锁定机构，每当核心电位识别单元识别与电缆的芯部接触的切割刀片的电位作为使用中的电缆的可能性时。

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