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    • 4. 发明申请
    • Test Apparatus
    • 测试仪器
    • US20090072138A1
    • 2009-03-19
    • US12173038
    • 2008-07-15
    • Katsunori HIRANOTadanobu TobaMasahiro OhashiMasashi Wada
    • Katsunori HIRANOTadanobu TobaMasahiro OhashiMasashi Wada
    • G01N23/00
    • G01N23/2251H01J2237/221H01J2237/2817
    • A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.
    • 用于产生用电子扫描显微镜的电子束执行扫描的二维坐标的扫描控制单元设置有用于变换水平(X)方向和垂直(V)方向上的坐标的第一和第二变换单元。 用任意方向的电子束扫描样品中要测试的区域。 作为第一变换单元和第二变换单元,使用能够在水平(X)方向和垂直(Y)方向中的每一个中高速运转的小容量变换表(LUT)。 通过使用存储与多种扫描类型相对应的坐标变换数据的大容量变换表(LUT),实现具有多种功能,能够执行高速扫描控制的具有多种扫描类型的测试装置。
    • 5. 发明申请
    • Test Apparatus
    • 测试仪器
    • US20110180708A1
    • 2011-07-28
    • US13081875
    • 2011-04-07
    • Katsunori HiranoTadanobu TobaMasahiro OhashiMasashi Wada
    • Katsunori HiranoTadanobu TobaMasahiro OhashiMasashi Wada
    • H01J37/28
    • G01N23/2251H01J2237/221H01J2237/2817
    • A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.
    • 用于产生用电子扫描显微镜的电子束执行扫描的二维坐标的扫描控制单元设置有用于变换水平(X)方向和垂直(V)方向上的坐标的第一和第二变换单元。 用任意方向的电子束扫描样品中要测试的区域。 作为第一变换单元和第二变换单元,使用能够在水平(X)方向和垂直(Y)方向中的每一个中高速运转的小容量变换表(LUT)。 通过使用存储与多种扫描类型相对应的坐标变换数据的大容量变换表(LUT),实现具有多种功能,能够执行高速扫描控制的具有多种扫描类型的测试装置。
    • 6. 发明授权
    • Test apparatus
    • 测试仪器
    • US08304726B2
    • 2012-11-06
    • US13081875
    • 2011-04-07
    • Katsunori HiranoTadanobu TobaMasahiro OhashiMasashi Wada
    • Katsunori HiranoTadanobu TobaMasahiro OhashiMasashi Wada
    • H01J37/304
    • G01N23/2251H01J2237/221H01J2237/2817
    • A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.
    • 用于产生用电子扫描显微镜的电子束执行扫描的二维坐标的扫描控制单元设置有用于变换水平(X)方向和垂直(V)方向上的坐标的第一和第二变换单元。 用任意方向的电子束扫描样品中要测试的区域。 作为第一变换单元和第二变换单元,使用能够在水平(X)方向和垂直(Y)方向中的每一个中高速运转的小容量变换表(LUT)。 通过使用存储与多种扫描类型相对应的坐标变换数据的大容量变换表(LUT),实现具有多种功能,能够执行高速扫描控制的具有多种扫描类型的测试装置。
    • 7. 发明申请
    • SEMICONDUCTOR WAFER TESTING APPARATUS
    • 半导体测试仪器
    • US20110279143A1
    • 2011-11-17
    • US13133970
    • 2009-09-18
    • Tadanobu TobaKatsunori HiranoNorio SatoMasahiro Ohashi
    • Tadanobu TobaKatsunori HiranoNorio SatoMasahiro Ohashi
    • G01R31/26
    • G01B15/00G01R31/307H01L22/12
    • Disclosed is a semiconductor wafer testing apparatus that resolves the following problems which arise when semiconductor wafers become larger: (1) complexity of stage acceleration/deceleration control; (2) throughput reduction; and (3) increased vibration of the stage support platform during the stage inversion operation (deterioration in resolution). In the semiconductor wafer testing apparatus for resolving these problems, a wafer is rotated, an electro beam is irradiated onto the rotating wafer from a scanning electron microscope, and secondary electrons emitted from the wafer are detected. The detected secondary electrons are A/D converted by an image processing unit, realigned by an image data realignment unit, and then image-processed for display. As a result, image information of all dies of a wafer can be acquired without a large amount of movement of the stage in the X and the Y directions.
    • 公开了一种半导体晶片测试装置,其解决了当半导体晶片变大时出现的以下问题:(1)阶段加速/减速控制的复杂性; (2)吞吐量减少; 和(3)在舞台反转操作期间舞台支撑平台的振动增加(分辨率降低)。 在用于解决这些问题的半导体晶片测试装置中,旋转晶片,电子束从扫描电子显微镜照射到旋转晶片上,并且检测从晶片发射的二次电子。 所检测的二次电子被图像处理单元进行A / D转换,由图像数据重新对准单元重新对准,然后进行图像处理以进行显示。 结果,可以获得晶片的所有管芯的图像信息,而不需要在X和Y方向上的台的大量移动。
    • 8. 发明授权
    • Test apparatus
    • 测试仪器
    • US07952072B2
    • 2011-05-31
    • US12173038
    • 2008-07-15
    • Katsunori HiranoTadanobu TobaMasahiro OhashiMasashi Wada
    • Katsunori HiranoTadanobu TobaMasahiro OhashiMasashi Wada
    • H01J37/304
    • G01N23/2251H01J2237/221H01J2237/2817
    • A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.
    • 用于产生用电子扫描显微镜的电子束执行扫描的二维坐标的扫描控制单元设置有用于变换水平(X)方向和垂直(V)方向上的坐标的第一和第二变换单元。 用任意方向的电子束扫描样品中要测试的区域。 作为第一变换单元和第二变换单元,使用能够在水平(X)方向和垂直(Y)方向中的每一个中高速运转的小容量变换表(LUT)。 通过使用存储与多种扫描类型相对应的坐标变换数据的大容量变换表(LUT),实现具有多种功能,能够进行高速扫描控制的具有多种扫描类型的测试装置。