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    • 1. 发明授权
    • Thin film transistor tester and corresponding test method
    • 薄膜晶体管测试仪及相应的测试方法
    • US07295030B2
    • 2007-11-13
    • US11163996
    • 2005-11-07
    • Kenichi ImuraDaiju NakanoYoshitami Sakaguchi
    • Kenichi ImuraDaiju NakanoYoshitami Sakaguchi
    • G01R31/26
    • G09G3/006
    • To test electrical characteristics of a Thin Film Transistor (TFT) with a source or drain terminal left open and exposed, using a non-contact current source and protecting the TFTs from adverse effects, such as contamination, destruction, and the like. A tester 100 is provided to test a TFT array substrate 14, the tester including ion flow supply devices 16 and 18 for supplying an ion flow onto the surface of a substrate 14. Thereon, an array 12 of TFTs is formed, each TFT being connected to an electrode having a source or a drain left open and exposed; a control circuit 24 for supplying an operating voltage to a gate electrode of the TFT to be tested in the array; and a measurement circuit 24 for measuring an operating current via the testing TFT source or drain that remain in a non open state.
    • 为了测试具有源极或漏极端子的薄膜晶体管(TFT)的电气特性,其开放并暴露,使用非接触电流源并保护TFT免受诸如污染,破坏等的不利影响。 提供测试器100以测试TFT阵列基板14,该测试仪包括用于将离子流提供到基板14的表面上的离子流供应装置16和18。 其中,形成TFT的阵列12,每个TFT连接到具有源极或漏极的电极的左侧敞开并暴露; 控制电路24,用于向阵列中要测试的TFT的栅电极提供工作电压; 以及测量电路24,用于测量保持在非打开状态的测试TFT源极或漏极的工作电流。
    • 2. 发明申请
    • THIN FILM TRANSISTOR TESTER AND CORRESPONDING TEST METHOD
    • 薄膜晶体管测试仪和相应的测试方法
    • US20060097745A1
    • 2006-05-11
    • US11163996
    • 2005-11-07
    • Kenichi ImuraDaiju NakanoYoshitami Sakaguchi
    • Kenichi ImuraDaiju NakanoYoshitami Sakaguchi
    • G01R31/00
    • G09G3/006
    • To test electrical characteristics of a Thin Film Transistor (TFT) with a source or drain terminal left open and exposed, using a non-contact current source and protecting the TFTs from adverse effects, such as contamination, destruction, and the like. A tester 100 is provided to test a TFT array substrate 14, the tester including ion flow supply devices 16 and 18 for supplying an ion flow onto the surface of a substrate 14. Thereon, an array 12 of TFTs is formed, each TFT being connected to an electrode having a source or a drain left open and exposed; a control circuit 24 for supplying an operating voltage to a gate electrode of the TFT to be tested in the array; and a measurement circuit 24 for measuring an operating current via the testing TFT source or drain that remain in a non open state.
    • 为了测试具有源极或漏极端子的薄膜晶体管(TFT)的电气特性,其开放并暴露,使用非接触电流源并保护TFT免受诸如污染,破坏等的不利影响。 提供测试器100以测试TFT阵列基板14,该测试仪包括用于将离子流提供到基板14的表面上的离子流供应装置16和18。 其中,形成TFT的阵列12,每个TFT连接到具有源极或漏极的电极的左侧敞开并暴露; 控制电路24,用于向阵列中要测试的TFT的栅电极提供工作电压; 以及测量电路24,用于测量保持在非打开状态的测试TFT源极或漏极的工作电流。