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1. 发明授权

US6008477A Heat treatment apparatus 失效
标题翻译：热处理设备
公开(公告)号：US6008477A
公开(公告)日：1999-12-28
申请号：US23769
申请日：1998-02-13
申请人： Ken Nakao , Makoto Kobayashi , Hisaei Osanai
发明人： Ken Nakao , Makoto Kobayashi , Hisaei Osanai
IPC分类号： H05B3/06 , H01L21/00 , H01L21/205 , H01L21/22 , H01L21/31 , H05B3/46 , H05B3/64 , H05B3/66 , F27B5/14
CPC分类号： H01L21/67109 , H05B3/64 , H05B3/66
摘要： A helical heating wire is disposed so as to surround a reaction tube, and is held by a heat insulating structure. Support members are arranged at predetermined pitches on the inner circumference of the heat insulating structure to support the heating wire on the inner circumference of the heat insulating structure so as to enable the heating wire to make thermal expansion and thermal contraction. Fixing means are attached to one loop out of every suitable number of loops of the helical heating wire to fix the heating wire to the heat insulating structure.
摘要翻译：螺旋形加热线设置成围绕反应管，并且由隔热结构保持。支撑构件以隔热结构的内圆周上的预定间距布置，以将热丝支撑在绝热结构的内周上，以使得加热丝能够进行热膨胀和热收缩。固定装置连接到螺旋形加热丝的每个合适数量的环的一个环上，以将加热丝固定到隔热结构。

2. 发明授权

US6043468A Carbon heater 失效
标题翻译：碳加热器
公开(公告)号：US6043468A
公开(公告)日：2000-03-28
申请号：US126847
申请日：1998-07-31
申请人： Eiichi Toya , Masahiko Ichishima , Tomio Konn , Tomohiro Nagata , Shigeru Yamamura , Norihiko Saito , Kouji Teraoka , Takeshi Inaba , Hiroyuki Honma , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
发明人： Eiichi Toya , Masahiko Ichishima , Tomio Konn , Tomohiro Nagata , Shigeru Yamamura , Norihiko Saito , Kouji Teraoka , Takeshi Inaba , Hiroyuki Honma , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
IPC分类号： C30B15/14 , C30B35/00 , H05B3/44
CPC分类号： C30B35/00 , C30B15/14 , H05B2203/003
摘要： A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.
摘要翻译：一种碳加热器，包括加热器构件（11,111,121,161,212,222,315,325,354,411,515,612），其中多个碳纤维束具有多个碳纤维，捆扎的直径为5〜15μm被编织成纵向细长形状，例如线状或带状，杂质含量在灰分中小于10ppm。

3. 发明授权

US06407371B1 Heater 有权
公开(公告)号：US06407371B1
公开(公告)日：2002-06-18
申请号：US09451868
申请日：1999-12-01
申请人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Shigeru Yamamura , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
发明人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Shigeru Yamamura , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
IPC分类号： H05B310
CPC分类号： H05B3/0047 , H01L2924/0002 , H01L2924/00
摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

4. 发明授权

US06515264B2 Heater 有权
公开(公告)号：US06515264B2
公开(公告)日：2003-02-04
申请号：US10170539
申请日：2002-06-14
申请人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Shigeru Yamamura , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
发明人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Shigeru Yamamura , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
IPC分类号： H05B310
CPC分类号： H05B3/0047 , H01L2924/0002 , H01L2924/00
摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

5. 发明授权

US06204488B1 Sealing terminal 失效
标题翻译：密封端子
公开(公告)号：US06204488B1
公开(公告)日：2001-03-20
申请号：US09450755
申请日：1999-11-30
申请人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Sunao Seko , Hideyuki Yokoyama , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
发明人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Sunao Seko , Hideyuki Yokoyama , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
IPC分类号： H05B300
CPC分类号： F27D99/0073 , F27D2099/0008 , H01L21/67098
摘要： A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.
摘要翻译：密封端子包括连接到加热元件的内部连接线和通过其供电的外部连接线。石英玻璃体在其外表面中包括多个凹槽，以将内部和外部连接线保持在适当位置。导电箔用于连接容纳在石英玻璃管中的内部和外部线，使得线的端部突出到其相应的端部之外。一个插头设置在管的下端以封闭它。防止火花发生，而结构简单，易于组装的低电阻密封端子。

6. 发明授权

US08134100B2 Heat processing furnace and method of manufacturing the same 有权
标题翻译：热加工炉及其制造方法
公开(公告)号：US08134100B2
公开(公告)日：2012-03-13
申请号：US12155095
申请日：2008-05-29
申请人： Makoto Kobayashi , Ken Nakao
发明人： Makoto Kobayashi , Ken Nakao
IPC分类号： F27D11/00 , F27D7/06
CPC分类号： H01L21/67109 , F27B17/0025 , Y10T29/49083
摘要： A heat processing furnace comprises: a processing vessel for receiving an object to be processed by a heat process; a cylindrical heat insulation member surrounding the processing vessel; a helical heating resistor arranged along an inner peripheral surface of the heat insulation member; a support member for supporting the heating resistor. The support member includes a base part positioned on an inside of the heating resistor, and a plurality of support pieces extending radially outward from the base part through spaces between adjacent portions of the heating resistor so as to support the heating resistor, the support member being formed to have a comb-like shape. An upper surface part of each of the support pieces is formed to have a curved shape in order to reduce a frictional resistance generated when the heating resistor is moved upon a thermal expansion and a thermal shrinkage thereof.
摘要翻译：热处理炉包括：用于通过热处理接收待加工物体的处理容器; 围绕处理容器的圆柱形隔热构件; 螺旋形加热电阻器，沿着所述隔热部件的内周面布置; 用于支撑加热电阻器的支撑构件。所述支撑构件包括位于所述加热电阻器的内侧的基座部分和从所述基座部分通过所述加热电阻器的相邻部分之间的空间径向向外延伸的多个支撑件，以支撑所述加热电阻器，所述支撑构件为形成为具有梳状形状。每个支撑片的上表面部分形成为具有弯曲形状，以便减少当热电阻器在热膨胀和热收缩时移动时产生的摩擦阻力。

7. 发明授权

US07888622B2 Heat-processing furnace and manufacturing method thereof 有权
标题翻译：热处理炉及其制造方法
公开(公告)号：US07888622B2
公开(公告)日：2011-02-15
申请号：US11902333
申请日：2007-09-20
申请人： Ken Nakao , Kenichi Yamaga , Makoto Kobayashi
发明人： Ken Nakao , Kenichi Yamaga , Makoto Kobayashi
IPC分类号： F27D11/00 , H05B3/00
CPC分类号： F27B17/0025 , H01L21/67103 , H05B3/08 , Y10T29/49083
摘要： A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member. The fixing plates are attached to the heating resistor by the same attachment structure as the attachment structure of the terminal plates to the heating resistor.
摘要翻译：一种热处理炉包括：用于容纳待加工物体的热处理容器，用于对被处理物体进行热加热; 围绕所述处理容器的圆柱形绝热构件; 螺旋加热电阻器，沿着所述绝热构件的内周面设置; 以及轴向设置在绝热构件的内周面上的支撑构件，用于以预定间距支撑加热电阻器。多个端子板以适当的间隔设置在加热电阻器的外侧，并且附接到加热电阻器，端子板径向通过隔热构件延伸到外部。多个固定板以适当的间隔设置在加热电阻器的外部，并附着在加热电阻器上，固定板固定在绝热构件中。固定板通过与端子板与加热电阻器的连接结构相同的附接结构附接到加热电阻器。

8. 发明申请

US20090194521A1 Thermal processing furnace 有权
标题翻译：热处理炉
公开(公告)号：US20090194521A1
公开(公告)日：2009-08-06
申请号：US12320433
申请日：2009-01-26
申请人： Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
发明人： Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
IPC分类号： H05B3/06
CPC分类号： H01L21/67109 , F27B17/0025 , F27D11/02 , F27D99/0006 , H05B3/08
摘要： A thermal processing furnace comprises: a tubular heat insulation member 4 surrounding a processing vessel 3 for receiving and thermally processing an object to be processed w; a heating resistor 5 helically arranged on an inner circumferential surface of the heat insulation member 4; and a support member 13 disposed on the inner circumferential surface of the heat insulation member 4, the support member 13 supporting the heating resistor 5 such that the heating resistor 5 can be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention member 15 disposed on the heating resistor 5 to be in contact with one side surface of the support member 13 so as to prevent a downward movement of the heating resistor 5.
摘要翻译：热处理炉包括：围绕处理容器3的管状隔热构件4，用于接收和热处理待加工物体w; 螺旋形地布置在隔热构件4的内周面上的加热电阻器5; 以及设置在绝热构件4的内周面上的支撑构件13，支撑构件13，其支撑加热电阻器5，使得加热电阻器5可以热膨胀和热收缩。热处理炉还包括：移动防止部件15，设置在加热电阻器5上以与支撑部件13的一个侧表面接触，以防止加热电阻器5的向下移动。

9. 发明申请

US20080296282A1 Heat processing furnace and method of manufacturing the same 有权
标题翻译：热加工炉及其制造方法
公开(公告)号：US20080296282A1
公开(公告)日：2008-12-04
申请号：US12155095
申请日：2008-05-29
申请人： Makoto Kobayashi , Ken Nakao
发明人： Makoto Kobayashi , Ken Nakao
IPC分类号： F27D11/00 , H05B3/02
CPC分类号： H01L21/67109 , F27B17/0025 , Y10T29/49083
摘要： The object of the present invention is to reduce a frictional resistance which is generated between a support member and a heating resistor when the heating resistor is thermally expanded and thermally shrunk, whereby generation of a permanent deformation of the heating resistor caused by a residual stress thereof can be restrained, to thereby improve the durability. A heat processing furnace comprises: a processing vessel 3 capable of accommodating an object to be processed w and subjecting the object to be processed w to a heat process; a cylindrical heat insulation member 4 surrounding the processing vessel 3; a helical heating resistor 5 arranged along an inner peripheral surface of the heat insulation member 4; a support member 13 disposed on the inner peripheral surface of the heat insulation member 4 in parallel with an axial direction thereof, for supporting the heating resistor 5 at predetermined pitches along the axial direction; and a plurality of terminal plates 14 axially arranged on an outside of the heating resistor 5 at suitable intervals therebetween, the terminal plates 14 radially passing through the heat insulation member 4 so as to be extended outside. The support member 13 includes a base part 17 positioned on an inside of the heating resistor 5, and a plurality of support pieces 18 extending radially outward from the base part through spaces between adjacent portions of the heating resistor 5 so as to support the heating resistor 5, the support member 13 being formed to have a comb-like shape. An upper surface part of each of the support pieces 18 is formed to have a curved shape in order to reduce a frictional resistance generated when the heating resistor 5 is moved upon a thermal expansion and a thermal shrinkage thereof.
摘要翻译：本发明的目的是减少当加热电阻器热膨胀和热收缩时在支撑构件和加热电阻器之间产生的摩擦阻力，由此产生由其残余应力引起的加热电阻器的永久变形可以抑制，从而提高耐久性。热处理炉包括：处理容器3，其能够容纳被处理物体w并对被加工物W进行加热处理; 围绕处理容器3的圆柱形隔热构件4; 沿着绝热构件4的内周面布置的螺旋形加热电阻器5; 支撑构件13，其设置在绝热构件4的与其轴向平行的内周面上，用于沿着轴向以预定的间距支撑加热电阻器5; 以及在它们之间以合适的间隔轴向地布置在加热电阻器5的外侧上的多个端子板14，端子板14径向地穿过绝热构件4以便向外延伸。支撑构件13包括位于加热电阻器5的内部的基部17和从基部通过加热电阻器5的相邻部分之间的空间径向向外延伸的多个支撑件18，以支撑加热电阻器如图5所示，支撑构件13形成为具有梳状形状。每个支撑件18的上表面部分形成为具有弯曲形状，以便减少当热电阻器5在热膨胀和其热收缩时移动时产生的摩擦阻力。

10. 发明申请

US20080073334A1 Heat-processing furnace and manufacuring method thereof 有权
标题翻译：热处理炉及其制造方法
公开(公告)号：US20080073334A1
公开(公告)日：2008-03-27
申请号：US11902333
申请日：2007-09-20
申请人： Ken Nakao , Kenichi Yamaga , Makoto Kobayashi
发明人： Ken Nakao , Kenichi Yamaga , Makoto Kobayashi
IPC分类号： F27D11/02 , H05B3/06
CPC分类号： F27B17/0025 , H01L21/67103 , H05B3/08 , Y10T29/49083
摘要： A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member. The fixing plates are attached to the heating resistor by the same attachment structure as the attachment structure of the terminal plates to the heating resistor.
摘要翻译：一种热处理炉包括：用于容纳待加工物体的热处理容器，用于对被处理物体进行热加热; 围绕所述处理容器的圆柱形绝热构件; 螺旋加热电阻器，沿着所述绝热构件的内周面设置; 以及轴向设置在绝热构件的内周面上的支撑构件，用于以预定间距支撑加热电阻器。多个端子板以适当的间隔设置在加热电阻器的外侧，并且附接到加热电阻器，端子板径向通过隔热构件延伸到外部。多个固定板以适当的间隔设置在加热电阻器的外部，并附着在加热电阻器上，固定板固定在绝热构件中。固定板通过与端子板与加热电阻器的连接结构相同的附接结构附接到加热电阻器。

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