专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08597479B2 Sputtering system 失效
标题翻译：溅射系统
公开(公告)号：US08597479B2
公开(公告)日：2013-12-03
申请号：US11815519
申请日：2005-02-08
申请人： Keitaro Harada , Masayoshi Yokoo , Norikazu Kainuma , Yoshinobu Takano , Isao Tanikawa
发明人： Keitaro Harada , Masayoshi Yokoo , Norikazu Kainuma , Yoshinobu Takano , Isao Tanikawa
IPC分类号： C23C14/00 , C23C14/32 , C25B9/00 , C25B11/00 , C25B13/00
CPC分类号： C23C14/35 , H01J37/3408 , H01J37/3455
摘要： A magnetron sputtering system generates a high density plasma on a target by applying magnetic fields intersecting an electric field by using a plurality of magnets that are rotatably supported. The respective magnets are revolved and rotated so that the time variation of regions where a magnetic field (line of magnetic force) generated by the each magnet is orthogonal to an electric field is prevented from becoming monotonous. Further, the respective magnets are arranged to make the distances between the center of rotation and the center of revolution of the respective magnets different from each other, so that the regions where the magnetic field (line of magnetic force) generated by the each magnet is orthogonal to the electric field are dispersed in the radial direction of a target.
摘要翻译：磁控溅射系统通过使用可旋转地支撑的多个磁体施加与电场相交的磁场，在目标上产生高密度等离子体。各磁体旋转旋转，防止由各磁体产生的磁场（磁力线）与电场正交的区域的时间变化变得单调。此外，各磁体被配置成使得各磁体的旋转中心和旋转中心之间的距离彼此不同，使得由每个磁体产生的磁场（磁力线）为的区域为与电场垂直的方向分散在靶的径向方向。

2. 发明申请

US20090026073A1 SPUTTERING SYSTEM 失效
标题翻译：喷射系统
公开(公告)号：US20090026073A1
公开(公告)日：2009-01-29
申请号：US11815519
申请日：2005-02-08
申请人： Keitaro Harada , Masayoshi Yokoo , Norikazu Kainuma , Yoshinobu Takano , Isao Tanikawa
发明人： Keitaro Harada , Masayoshi Yokoo , Norikazu Kainuma , Yoshinobu Takano , Isao Tanikawa
IPC分类号： C23C14/35
CPC分类号： C23C14/35 , H01J37/3408 , H01J37/3455
摘要： A plurality of magnets are rotatably supported and when a ratio between revolution angle and rotation angle per unit time is set to 1:R, R is set to a value which is not less than 1 and not more than 5, and is not a common divisor of 360, so that the time variation of regions where a magnetic field (line of magnetic force) generated by the each magnet is orthogonal to an electric field is prevented from becoming monotonous. Further, the respective magnets are arranged to make the distances between the center of rotation and the center of revolution of the respective magnets different from each other, so that the regions where the magnetic field (line of magnetic force) generated by the each magnet is orthogonal to the electric field are dispersed in the radial direction of a target.
摘要翻译：多个磁体被可旋转地支撑，当每单位时间的旋转角度和旋转角度之比设定为1时，R设定为不小于1且不大于5的值，并不常见 360°的除数，使得由每个磁体产生的磁场（磁力线）与电场正交的区域的时间变化被防止变得单调。此外，各磁体被配置成使得各磁体的旋转中心和旋转中心之间的距离彼此不同，使得由每个磁体产生的磁场（磁力线）为的区域为与电场垂直的方向分散在靶的径向方向。

3. 发明授权

US08093853B2 Device-positioning pedestal and handler having the device-positioning pedestal 有权
标题翻译：设备定位基座和处理器具有设备定位基座
公开(公告)号：US08093853B2
公开(公告)日：2012-01-10
申请号：US11988347
申请日：2005-07-08
申请人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Norikazu Kainuma
发明人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Norikazu Kainuma
IPC分类号： G05B19/40 , B24B49/00
CPC分类号： G01R31/2893
摘要： A device-positioning pedestal capable of positioning devices of different sizes. The device-positioning pedestal comprises a plurality of guide members corresponding to the sides of the device and coming in contact with the sides of the device to position the device, at least one guide member includes a slide mechanism that supports the guide member so as to slide relative to the device-positioning pedestal member and a fixing mechanism that fixes the guide members at desired positions. The guide members are set to be adapted to the size of the device by the guide member-adjusting means separate from the device-positioning pedestal. The guide member-adjusting means adjust the position of the guide members based on the size of the device measured by device size-measuring means separate from the guide member-adjusting means or based on the data of data-recording means attached to the device-positioning pedestal.
摘要翻译：一种能够定位不同尺寸的装置的装置定位基座。装置定位基座包括对应于装置的侧面的多个引导构件并与装置的侧面接触以定位装置，至少一个引导构件包括支撑引导构件的滑动机构，以便相对于设备定位基座构件滑动;以及固定机构，其将引导构件固定在期望位置。引导构件通过与装置定位基座分离的引导构件调整装置设置成适合于装置的尺寸。引导构件调节装置基于由与引导构件调节装置分离的装置尺寸测量装置测量的装置的尺寸或者基于附接到装置尺寸的数据记录装置的数据来调整引导构件的位置，定位基座。

4. 发明申请

US20090206224A1 Device-Positioning Pedestal and Handler Having the Device-Positioning Pedestal 有权
标题翻译：设备定位基座和处理器具有设备定位基座
公开(公告)号：US20090206224A1
公开(公告)日：2009-08-20
申请号：US11988347
申请日：2005-07-08
申请人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Norikazu Kainuma
发明人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Norikazu Kainuma
IPC分类号： A47B95/00
CPC分类号： G01R31/2893
摘要： A device-positioning pedestal capable of positioning devices of different sizes. The device-positioning pedestal comprises a plurality of guide members corresponding to the sides of the device and coming in contact with the sides of the device to position the device, at least one guide member includes a slide mechanism that supports the guide member so as to slide relative to the device-positioning pedestal member and a fixing mechanism that fixes the guide members at desired positions. The guide members are set to be adapted to the size of the device by the guide member-adjusting means separate from the device-positioning pedestal. The guide member-adjusting means adjust the position of the guide members based on the size of the device measured by device size-measuring means separate from the guide member-adjusting means or based on the data of data-recording means attached to the device-positioning pedestal.
摘要翻译：一种能够定位不同尺寸的装置的装置定位基座。装置定位基座包括对应于装置的侧面并与装置的侧面接触的多个引导构件以定位装置，至少一个引导构件包括支撑引导构件的滑动机构，以便相对于设备定位基座构件滑动;以及固定机构，其将引导构件固定在期望位置。引导构件通过与装置定位基座分离的引导构件调整装置设置成适合于装置的尺寸。引导构件调整装置基于由与引导构件调节装置分离的装置尺寸测量装置测量的装置的尺寸或者基于附接到装置尺寸的数据记录装置的数据来调整引导构件的位置，定位基座。

5. 发明申请

US20130280855A1 METHOD FOR PRODUCING COMPOUND HAVING CHALCOPYRITE STRUCTURE 审中-公开
标题翻译：用于生产具有化学结构的化合物的方法
公开(公告)号：US20130280855A1
公开(公告)日：2013-10-24
申请号：US13997815
申请日：2010-12-28
申请人： Koji Moriya , Jiro Nagaoka , Yoshinobu Takano , Yuuki Sano , Keitaro Harada , Masayoshi Yokoo
发明人： Koji Moriya , Jiro Nagaoka , Yoshinobu Takano , Yuuki Sano , Keitaro Harada , Masayoshi Yokoo
IPC分类号： H01L31/0272 , H01L31/18
CPC分类号： H01L31/0272 , B82Y30/00 , C01B19/002 , C01P2004/64 , H01L21/02568 , H01L21/02601 , H01L21/02628 , H01L31/0322 , H01L31/18 , Y02E10/541 , Y02P70/521
摘要： To obtain high-quality chalcopyrite particles having a small particle size using a relatively inexpensive raw material in a simple and easy process in which complicated equipment (such as vacuum equipment) is not necessary. Provided is a method for producing a compound having a chalcopyrite structure represented by a compositional formula: ABC2, the method including: a step of dissolving a Group 11 element A, a Group 13 element B, and a Group 16 element C of the periodic table in a solvent to prepare a solution; and a step of contacting the solution with a reducing agent.
摘要翻译：为了在不需要复杂的设备（如真空设备）的简单且容易的过程中使用相对便宜的原料获得具有小粒径的优质黄铜矿颗粒。本发明提供一种由组成式ABC2表示的具有黄铜矿结构的化合物的制造方法，该方法包括：将元素周期表11族元素A，第13族元素B和第16族元素C溶解的工序在溶剂中制备溶液; 以及使溶液与还原剂接触的步骤。

6. 发明授权

US09260780B2 Process for forming thin film and system for forming thin film 有权
标题翻译：用于形成薄膜的方法和用于形成薄膜的系统
公开(公告)号：US09260780B2
公开(公告)日：2016-02-16
申请号：US10594153
申请日：2004-03-26
申请人： Masanobu Kusunoki , Keitaro Harada , Masayoshi Yokoo , Yoshinobu Takano
发明人： Masanobu Kusunoki , Keitaro Harada , Masayoshi Yokoo , Yoshinobu Takano
IPC分类号： C23C14/54 , C23C14/22 , C23C14/34 , C23C14/50 , H01J37/34
CPC分类号： C23C14/541 , C23C14/225 , C23C14/34 , C23C14/3464 , C23C14/505 , H01J37/3402 , H01J37/3447
摘要： This is a thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, wherein the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.
摘要翻译：这是一种薄膜形成装置，其配备有由薄膜材料构成的靶，用于从靶产生颗粒状薄膜材料的阴极，用于支撑其上形成微粒薄膜材料的基底的支撑构件沉积，用于加热基板的加热器和用于将颗粒状薄膜材料引入到沉积有薄膜材料的基板的表面上的引导件，其中支撑部件支撑基板以暴露第一主表面和在基板的背面（第二主面）上，将靶设置在基板的第一主面的延伸部中，用于制造粒状薄膜材料的位置，导向件设置在第一主面上，第二主体基板的表面。

7. 发明申请

US20080076269A1 Process for Forming Thin Film and System for Forming Thin Film 有权
标题翻译：薄膜形成工艺及薄膜成型体系
公开(公告)号：US20080076269A1
公开(公告)日：2008-03-27
申请号：US10594153
申请日：2004-03-26
申请人： Masanobu Kusunoki , Keitaro Harada , Masayoshi Yokoo , Yoshinobu Takano
发明人： Masanobu Kusunoki , Keitaro Harada , Masayoshi Yokoo , Yoshinobu Takano
IPC分类号： H01L21/00
CPC分类号： C23C14/541 , C23C14/225 , C23C14/34 , C23C14/3464 , C23C14/505 , H01J37/3402 , H01J37/3447
摘要： This is a thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, wherein the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.
摘要翻译：这是一种薄膜形成装置，其配备有由薄膜材料构成的靶，用于从靶产生颗粒状薄膜材料的阴极，用于支撑其上形成微粒薄膜材料的基底的支撑构件沉积，用于加热基板的加热器和用于将颗粒状薄膜材料引入到沉积有薄膜材料的基板的表面上的引导件，其中支撑部件支撑基板以暴露第一主表面和在基板的背面（第二主面）上，将靶设置在基板的第一主面的延伸部中，用于制造粒状薄膜材料的位置，导向件设置在第一主面上，第二主体基板的表面。

8. 发明申请

US20110049286A1 WIRE BOBBIN HOLDER OF BOBBIN CASSETTE IN WIRING APPARATUS 失效
标题翻译： BOBBIN CASSETTE的线束BOBBIN持有人在布线设备
公开(公告)号：US20110049286A1
公开(公告)日：2011-03-03
申请号：US12680130
申请日：2007-09-25
申请人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Akio Murakami
发明人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Akio Murakami
IPC分类号： H01L31/18 , B65H59/04
CPC分类号： B65H59/04 , B65H59/043 , B65H59/387 , H01L31/022425 , Y02E10/50
摘要： When current collecting wires are laid in parallel with each other on a solar cell on which a photosensitive film is formed, a wire tension adjusting mechanism is provided which includes a bobbin holder shaft pivotally held on the side of a frame in a bobbin cassette in a wiring apparatus and a wire bobbin is detachably fixed on the bobbin holder shaft. The wire tension adjusting mechanism further includes a pre-load means for adjusting the torque of the bobbin holder shaft and the tension of each current collecting wire to be drawn out from the wire bobbin held by the bobbin shaft is adjusted.
摘要翻译：当集电线在形成有感光膜的太阳能电池上彼此平行放置时，提供了一种线张力调节机构，其包括在筒管盒中的框架侧枢转地保持的筒管架轴接线装置和线架可拆卸地固定在筒管架轴上。线张力调节机构还包括用于调节筒管架轴的扭矩的预加载装置，并且调节从由筒管轴保持的线筒引出的每个集流线的张力。

9. 发明授权

US06742981B2 IC handler 失效
标题翻译： IC处理程序
公开(公告)号：US06742981B2
公开(公告)日：2004-06-01
申请号：US10204256
申请日：2002-08-19
申请人： Keitaro Harada , Masayoshi Yokoo , Shigeo Onuma , Satoshi Ueno
发明人： Keitaro Harada , Masayoshi Yokoo , Shigeo Onuma , Satoshi Ueno
IPC分类号： B65H100
CPC分类号： G01R31/01 , G01R31/2887 , H01L21/687
摘要： A disk (6) is horizontally rotated a half-turn by a motor (7) in a rotational direction and, then, is rotated a half-turn in an opposite rotational direction. Two servomotors (8, 9) are symmetrically disposed, on an upper surface of the disk (6), with respect to a rotating shaft of the disk (6). Driving shafts (22, 23), driven by the two servomotors (8, 9), downwardly extend through the disk (6), and move hanging members (K, M), respectively, in upward-and-downward directions. Two hanging members (K, M) are provided, at their lower ends, with clampers (32), respectively. The clampers (32) are each provided, at their bottom surfaces, with a suction pad (35), and are provided, at their upper surfaces, with pneumatic cylinders (28, 29). The pressure of the compressed air supplied to the pneumatic cylinder is adjusted by a pressure regulating device (38).
摘要翻译：盘（6）通过马达（7）沿旋转方向水平旋转半圈，然后沿相反的旋转方向旋转半圈。两个伺服电动机（8,9）相对于盘（6）的旋转轴对称地设置在盘（6）的上表面上。由两个伺服电动机（8,9）驱动的驱动轴（22,23）向下延伸穿过盘（6），并且分别沿上下方向移动悬挂构件（K，M）。两个悬挂构件（K，M）分别在其下端设置有夹具（32）。夹紧器（32）在其底表面处分别设置有吸盘（35），并且在其上表面处设置有气动缸（28,29）。通过压力调节装置（38）调节供给气缸的压缩空气的压力。

10. 发明授权

US08662437B2 Wire bobbin holder of bobbin cassette in wiring apparatus 失效
标题翻译：接线装置中筒管的线筒架
公开(公告)号：US08662437B2
公开(公告)日：2014-03-04
申请号：US12680130
申请日：2007-09-25
申请人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Akio Murakami
发明人： Keitaro Harada , Masayoshi Yokoo , Koichi Yoshida , Akio Murakami
IPC分类号： B65H59/04
CPC分类号： B65H59/04 , B65H59/043 , B65H59/387 , H01L31/022425 , Y02E10/50
摘要： When current collecting wires are laid in parallel with each other on a solar cell on which a photosensitive film is formed, a wire tension adjusting mechanism is provided which includes a bobbin holder shaft pivotally held on the side of a frame in a bobbin cassette in a wiring apparatus and a wire bobbin is detachably fixed on the bobbin holder shaft. The wire tension adjusting mechanism further includes a pre-load means for adjusting the torque of the bobbin holder shaft and the tension of each current collecting wire to be drawn out from the wire bobbin held by the bobbin shaft is adjusted.
摘要翻译：当集电线在形成有感光膜的太阳能电池上彼此平行放置时，提供了一种线张力调节机构，其包括在筒管盒中的框架侧枢转地保持的筒管架轴接线装置和线架可拆卸地固定在筒管架轴上。线张力调节机构还包括用于调节筒管架轴的扭矩的预加载装置，并且调节从由筒管轴保持的线筒引出的每个集流线的张力。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式