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    • 5. 发明授权
    • Cantilever type probe, and scanning tunnel microscope and information
processing apparatus employing the same
    • 悬臂式探头,扫描隧道显微镜及其采用的信息处理装置
    • US5317152A
    • 1994-05-31
    • US871727
    • 1992-04-21
    • Osamu TakamatsuYutaka HiraiMasaru NakayamaTakayuki YagiYuji KasanukiYasuhiro Shimada
    • Osamu TakamatsuYutaka HiraiMasaru NakayamaTakayuki YagiYuji KasanukiYasuhiro Shimada
    • G01Q10/00G01N27/00G01N37/00G01Q60/10G01Q60/16G01Q80/00G11B9/00G11B9/14H01J37/26H01L41/22
    • G01Q60/16B82Y35/00G01Q20/04G11B9/1436B82Y10/00G01Q80/00Y10S977/837Y10S977/861Y10S977/872Y10S977/873Y10S977/875
    • A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on opposite sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on outer surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer protrude outward more than each end of the second and third electrode layers. A scanning tunneling microscope comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means for applying a pulse and bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.
    • 悬臂式探头包括悬臂形位移元件和位移元件具有第一电极层的尖端,第一压电材料膜和第二压电材料膜,所述第一压电材料膜和第二压电材料膜层压在第一电极层的相对侧上,并且第二 电极层和层压在压电材料膜的外表面上的第三电极层,并且该尖端与位于位移元件的表面的自由端的引导电极连接; 其特征在于,所述第一电极层的所述悬臂的两端的宽度方向上比所述第二电极层和所述第三电极层的端部向外突出。 扫描隧道显微镜包括悬臂型探针,用于移动探针的驱动装置,用于样本的台阶,以将样本接近并定位到尖端;以及电位施加装置,用于在尖端和样本之间施加偏置电压 。 信息处理装置还包括用于在尖端和记录介质之间施加脉冲和偏置电压的第二电位施加装置; 其中信息被写在记录介质上,并且通过在尖端和记录介质之间流动的电流来读出记录介质中的信息。