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1. 发明申请

US20050051910A1 CAPACITANCE TYPE DYNAMIC QUANTITY SENSOR DEVICE 失效
标题翻译：电容式动态数量传感器装置
公开(公告)号：US20050051910A1
公开(公告)日：2005-03-10
申请号：US10893880
申请日：2004-07-20
申请人： Keisuke Goto , Tameharu Ohta
发明人： Keisuke Goto , Tameharu Ohta
IPC分类号： G01P3/44 , G01C19/56 , G01P1/02 , G01P15/00 , G01P15/08 , G01P15/125 , G01P15/18 , H01L21/302 , H01L23/58 , H01L29/84 , H01L31/062
CPC分类号： G01C19/5719 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814
摘要： A capacitance type dynamic quantity sensor device includes a sensor chip having movable electrodes and sensor-chip side fixed electrodes disposed to confront the movable electrodes in a substrate surface horizontal direction X and a circuit chip disposed to confront the sensor chip. The movable electrodes are joined to the substrate through spring portions having degrees of freedom in the substrate surface horizontal direction X and the substrate surface vertical direction Z, so that the movable electrodes are displaceable in both the directions X and Z. A circuit-chip side fixed electrode is equipped at the site corresponding to the movable electrodes. The sensor chip and the circuit chip are electrically connected to each other through bump electrodes.
摘要翻译：一种电容式动态传感器装置，具备：具有可动电极的传感器芯片和设置成面对基板表面水平方向X上的可动电极的传感器芯片侧固定电极和设置为面对传感器芯片的电路芯片。可移动电极通过具有基板表面水平方向X和基板表面垂直方向Z上的自由度的弹簧部分接合到基板，使得可动电极可沿X方向和Z方向移位。电路芯片侧固定电极配备在与可动电极对应的位置。传感器芯片和电路芯片通过凸块电极彼此电连接。

2. 发明授权

US06935176B2 Capacitive dynamic quantity sensor device 失效
标题翻译：电容式动态传感器装置
公开(公告)号：US06935176B2
公开(公告)日：2005-08-30
申请号：US10834166
申请日：2004-04-29
申请人： Keisuke Goto , Tameharu Ohta
发明人： Keisuke Goto , Tameharu Ohta
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84 , H01G7/00
CPC分类号： G01P15/125 , G01P2015/0814
摘要： A sensor chip (100) includes comb-toothed movable electrodes (24) displaceable in a Y-direction, and comb-toothed stationary electrodes (30, 31, 40, 41) arranged to confront those movable electrodes (24), on one face side of a semiconductor substrate (10). The sensor chip (100) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes (24) and the stationary electrodes (30, 31, 41, 42). The stationary electrodes (30, 31, 41, 42) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes (24). The individual electrode pads (25a, 30a, 31a, 40a, 41a) and the circuit chip (200) are electrically connected by bump electrodes (300) so that one face of the substrate (10) confronts the circuit chip (200).
摘要翻译：传感器芯片（100）包括可沿Y方向移位的梳齿可动电极（24），以及梳齿固定电极（30,31,40,41），其布置成在一个面上与所述可动电极（24）相对一侧的半导体衬底（10）。传感器芯片（100）基于伴随着可动电极（24）和固定电极（30,31,41,42）之间的Y方向上的加速度施加的容量变化来检测加速度。固定电极（30,31,41,42）分别设置成在各个可动电极（24）中沿着Y方向取向的方向的一侧和另外侧彼此面对。单独的电极焊盘（25 a，30 a，31 a，40 a，41 a）和电路芯片（200）通过凸块电极（300）电连接，使得衬底（10）的一个面与电路芯片（200）。

3. 发明授权

US06876093B2 Capacitance type dynamic quantity sensor device 失效
标题翻译：电容式动态传感器装置
公开(公告)号：US06876093B2
公开(公告)日：2005-04-05
申请号：US10893880
申请日：2004-07-20
申请人： Keisuke Goto , Tameharu Ohta
发明人： Keisuke Goto , Tameharu Ohta
IPC分类号： G01P3/44 , G01C19/56 , G01P1/02 , G01P15/00 , G01P15/08 , G01P15/125 , G01P15/18 , H01L21/302 , H01L23/58 , H01L29/84 , H01L31/062
CPC分类号： G01C19/5719 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814
摘要： A capacitance type dynamic quantity sensor device includes a sensor chip having movable electrodes and sensor-chip side fixed electrodes disposed to confront the movable electrodes in a substrate surface horizontal direction X and a circuit chip disposed to confront the sensor chip. The movable electrodes are joined to the substrate through spring portions having degrees of freedom in the substrate surface horizontal direction X and the substrate surface vertical direction Z, so that the movable electrodes are displaceable in both the directions X and Z. A circuit-chip side fixed electrode is equipped at the site corresponding to the movable electrodes. The sensor chip and the circuit chip are electrically connected to each other through bump electrodes.
摘要翻译：一种电容式动态传感器装置，具备：具有可动电极的传感器芯片和设置成面对基板表面水平方向X上的可动电极的传感器芯片侧固定电极和设置为面对传感器芯片的电路芯片。可移动电极通过具有基板表面水平方向X和基板表面垂直方向Z上的自由度的弹簧部分接合到基板，使得可动电极可沿X方向和Z方向移位。电路芯片侧固定电极配备在与可动电极对应的位置。传感器芯片和电路芯片通过凸块电极彼此电连接。

4. 发明授权

US07263885B2 Physical quantity sensor having sensor chip and circuit chip 失效
标题翻译：具有传感器芯片和电路芯片的物理量传感器
公开(公告)号：US07263885B2
公开(公告)日：2007-09-04
申请号：US11052090
申请日：2005-02-08
申请人： Keisuke Goto
发明人： Keisuke Goto
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , B81B2201/0235 , B81B2203/0136 , B81B2207/012 , B81C1/00238 , B81C2203/0785 , B81C2203/0792 , G01P2015/0814
摘要： A physical quantity sensor includes: a circuit chip; and a sensor chip disposed on the circuit chip through an adhesive layer. The sensor chip includes: a support substrate; a movable electrode; and a pair of fixed electrodes facing the movable electrode with a detection distance therebetween. The movable electrode and the fixed electrodes are disposed on the substrate. The adhesive layer includes a non-adhesive region and a conductive member. The non-adhesive region is disposed on a region obtained by projecting the sensor chip to the circuit chip. The conductive member is disposed in the non-adhesive region for electrically connecting between the circuit chip and the substrate.
摘要翻译：物理量传感器包括：电路芯片; 以及通过粘合剂层设置在电路芯片上的传感器芯片。传感器芯片包括：支撑基板; 可动电极; 以及面对可动电极的一对固定电极，其间具有检测距离。可动电极和固定电极设置在基板上。粘合层包括非粘合区域和导电构件。非粘合区域设置在通过将传感器芯片投影到电路芯片而获得的区域上。导电构件设置在非粘合区域中，用于电连接电路芯片和基板。

5. 发明申请

US20060024920A1 Method for positioning dicing line of wafer 有权
标题翻译：晶圆切割线定位方法
公开(公告)号：US20060024920A1
公开(公告)日：2006-02-02
申请号：US11169579
申请日：2005-06-30
申请人： Keisuke Goto , Kenichi Yokoyama
发明人： Keisuke Goto , Kenichi Yokoyama
IPC分类号： H01L21/78 , H01L21/301 , H01L21/46
CPC分类号： H01L21/78 , B81C1/00888 , H01L21/6835 , H01L21/6836 , H01L23/544 , H01L2221/68327 , H01L2223/54453 , H01L2924/0002 , H01L2924/19041 , H01L2924/30105 , H01L2924/00
摘要： A method for positioning a dicing line includes the steps of: bonding an adhesive tape on a semiconductor layer of a wafer; detecting an image of the wafer by an imaging device on the basis of a light transmitted through the wafer; and determining the dicing line of the wafer on the basis of a position of an image of a marker, which is disposed on the semiconductor layer of the wafer. The image of the marker is obtained by image recognition from the detected image of the wafer.
摘要翻译：用于定影切割线的方法包括以下步骤：将粘合带粘合在晶片的半导体层上; 基于透过晶片的光，通过成像装置检测晶片的图像; 以及基于设置在晶片的半导体层上的标记的图像的位置来确定晶片的切割线。通过从晶片的检测图像的图像识别获得标记的图像。

6. 发明申请

US20050178203A1 Physical quantity sensor having sensor chip and circuit chip 失效
标题翻译：具有传感器芯片和电路芯片的物理量传感器
公开(公告)号：US20050178203A1
公开(公告)日：2005-08-18
申请号：US11052090
申请日：2005-02-08
申请人： Keisuke Goto
发明人： Keisuke Goto
IPC分类号： G01P15/125 , B81B5/00 , B81B7/00 , G01C19/56 , G01D5/241 , G01P15/00 , G01P15/08 , H01L29/84
CPC分类号： G01P15/125 , B81B2201/0235 , B81B2203/0136 , B81B2207/012 , B81C1/00238 , B81C2203/0785 , B81C2203/0792 , G01P2015/0814
摘要： A physical quantity sensor includes: a circuit chip; and a sensor chip disposed on the circuit chip through an adhesive layer. The sensor chip includes: a support substrate; a movable electrode; and a pair of fixed electrodes facing the movable electrode with a detection distance therebetween. The movable electrode and the fixed electrodes are disposed on the substrate. The adhesive layer includes a non-adhesive region and a conductive member. The non-adhesive region is disposed on a region obtained by projecting the sensor chip to the circuit chip. The conductive member is disposed in the non-adhesive region for electrically connecting between the circuit chip and the substrate.
摘要翻译：物理量传感器包括：电路芯片; 以及通过粘合剂层设置在电路芯片上的传感器芯片。传感器芯片包括：支撑基板; 可动电极; 以及面对可动电极的一对固定电极，其间具有检测距离。可动电极和固定电极设置在基板上。粘合层包括非粘合区域和导电构件。非粘合区域设置在通过将传感器芯片投影到电路芯片而获得的区域上。导电构件设置在非粘合区域中，用于电连接电路芯片和基板。

7. 发明申请

US20050059239A1 Foreign material removing method for capacitance type dynamic quantity sensor 失效
标题翻译：电容式动态传感器异物去除方法
公开(公告)号：US20050059239A1
公开(公告)日：2005-03-17
申请号：US10916469
申请日：2004-08-12
申请人： Keisuke Goto
发明人： Keisuke Goto
IPC分类号： G01P21/00 , B81B5/00 , G01C19/56 , G01P15/08 , G01P15/125 , G01P21/02 , H01L21/44 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： In a capacitance type acceleration sensor comprising a movable portion which is equipped with movable electrodes, a poise portion and spring portions formed on a semiconductor substrate and is displaced under application of acceleration, and fixed portions each of which is equipped with fixed electrodes having detection faces confronting the detection faces of the movable electrodes, the movable portion is forcedly displaced by applying a predetermined driving voltage between the movable portion and each of the fixed portions, whereby foreign material hidden in a hollow portion between the movable portion and the semiconductor substrate below the movable portion is exposed and removed by a suction unit.
摘要翻译：在一种电容型加速度传感器中，该传感器包括可移动部分，其具有可移动电极，形成在半导体衬底上的定位部分和弹簧部分，并且在施加加速度的情况下移位，并且每个固定部分装备有具有检测面的固定电极面对可动电极的检测面时，通过在可动部与固定部之间施加规定的驱动电压，可动部被强制位移，从而隐藏在活动部与半导体基板之间的中空部分的异物可动部分通过抽吸单元被暴露和移除。

8. 发明授权

US06836165B2 DLL circuit and method of generating timing signals 失效
标题翻译： DLL电路和产生定时信号的方法
公开(公告)号：US06836165B2
公开(公告)日：2004-12-28
申请号：US09826179
申请日：2001-04-04
申请人： Keisuke Goto , Sachiko Edo
发明人： Keisuke Goto , Sachiko Edo
IPC分类号： G06F104
CPC分类号： G11C7/222 , G06F1/04 , G11C7/22 , H03L7/0812
摘要： A DLL circuit includes a delay circuit, a phase comparing circuit and a delay control circuit. The delay circuit is connected to first and second nodes, and delays an original clock signal supplied to the first node based on a delay control signal and generates first to n-th (n is an integer more than 1) internal clock signals. The first internal clock signal is outputted from the second node. Also, the internal clock signals other than the first internal clock signal are outputted from the delay circuit without passing through the second node, and lead the first internal clock signal in phase. The phase comparing circuit compares the original clock signal supplied from the first node and the first internal clock signal supplied from the second node, and outputs a phase difference of the original clock signal and the first internal clock signal. The delay control circuit outputs the delay control signal to the delay circuit based on the phase difference outputted from the phase comparing circuit.
摘要翻译： DLL电路包括延迟电路，相位比较电路和延迟控制电路。延迟电路连接到第一和第二节点，并且基于延迟控制信号延迟提供给第一节点的原始时钟信号，并且产生第一至第n（n是大于1的整数）内部时钟信号。第一内部时钟信号从第二节点输出。此外，除了第一内部时钟信号之外的内部时钟信号从延迟电路输出而不通过第二节点，并且同步地引导第一内部时钟信号。相位比较电路比较从第一节点提供的原始时钟信号和从第二节点提供的第一内部时钟信号，并输出原始时钟信号和第一内部时钟信号的相位差。延迟控制电路基于从相位比较电路输出的相位差将延迟控制信号输出到延迟电路。

9. 发明授权

US4618989A Method and system for detecting elliptical objects 失效
标题翻译：用于检测椭圆物体的方法和系统
公开(公告)号：US4618989A
公开(公告)日：1986-10-21
申请号：US572535
申请日：1984-01-19
申请人： Hideo Tsukune , Keisuke Goto
发明人： Hideo Tsukune , Keisuke Goto
IPC分类号： G01B11/24 , G01B11/00 , G06K9/46 , G06T7/60 , H04N7/18
CPC分类号： G06K9/4633
摘要： In order to define the contour of an ellipse, it is necessary to determine five unknown parameters in the general equation representative of centered conics. When directly applying Hough transformation method to the above equation, since a five-dimensional space is required, it is practically impossible to detect an ellipse because a long processing time and a great amount of memory capacity are inevitably required. To overcome these problems, the geometric properties of an ellipse are determined separately on three parameter sub-spaces obtained on the basis of edge vector field: two-dimensional center histogram and two-dimensional (H, B) histogram, one-dimensional C histogram. A peak value on the center histogram represents a group of ellipse having the same center locations; a peak value on the (H, B) histogram represents a group of concentric ellipse having the same eccentricity and axis slope; a peak value on the C histogram defines a single ellipse. By sequentially selecting these peaks in the three sub-spaces, it is possible to define geometric properties of an ellipse under practical processing conditions. In order to define a plurality of ellipses efficiently, several novel methods have been adopted: separation of the rotation directions of edge vector field, recovery of edge vectors having no mate edge vectors; adoption of least mean square method, etc., in particular.
摘要翻译：为了定义椭圆的轮廓，有必要在代表中心圆锥曲线的一般方程中确定五个未知参数。当直接应用霍夫变换方法到上述方程时，由于需要五维空间，所以实际上不可能检测椭圆，因为不可避免地需要长的处理时间和大量的存储容量。为了克服这些问题，椭圆的几何特性分别在基于边缘矢量场获得的三个参数子空间上确定：二维中心直方图和二维（H，B）直方图，一维C直方图。中心直方图上的峰值表示具有相同中心位置的一组椭圆; （H，B）直方图上的峰值表示具有相同偏心度和轴斜率的同心椭圆组; C直方图上的峰值定义了单个椭圆。通过在三个子空间中依次选择这些峰，可以在实际处理条件下定义椭圆的几何特性。为了有效地定义多个椭圆，已经采用了几种新颖的方法：边缘矢量场的旋转方向的分离，没有配合边缘向量的边缘向量的恢复; 采用最小均方法等。

10. 发明授权

US09776209B2 Transparent electrically conductive substrate and manufacturing method thereof 有权
公开(公告)号：US09776209B2
公开(公告)日：2017-10-03
申请号：US14378716
申请日：2012-02-16
申请人： Takashi Mishima , Keisuke Goto , Florian Pschenitzka , Jonathan Westwater
发明人： Takashi Mishima , Keisuke Goto , Florian Pschenitzka , Jonathan Westwater
IPC分类号： B05D3/04 , B05D1/26 , H01L31/0224 , C09D5/02 , B22F7/04 , H01B1/02 , F26B21/00 , B82Y30/00 , H01L51/44 , B22F1/00 , B05D3/02 , B05D7/04 , B22F3/22
CPC分类号： B05D3/042 , B05D1/26 , B05D1/265 , B05D3/0272 , B05D3/0413 , B05D7/04 , B05D2252/02 , B05D2601/28 , B22F1/0025 , B22F3/22 , B22F7/04 , B82Y30/00 , C09D5/02 , F26B21/004 , F26B2210/00 , H01B1/02 , H01L31/022466 , H01L51/442 , Y10T428/249924
摘要： Method of manufacturing a transparent electrically conductive substrate having an application process whereby a wet layer is formed by applying onto a substrate film a coating liquid comprising metallic nanowires dispersed in a solvent, and a drying process whereby the solvent contained in the abovementioned wet layer is removed by drying, characterised in that the abovementioned drying process includes a process whereby the orientation of the abovementioned metallic nanowires is altered by introducing a forced draft facing towards the substrate from a direction that is different from the longitudinal direction of the substrate film.

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