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    • 6. 发明授权
    • Electronic component and method for manufacturing the same
    • 电子元件及其制造方法
    • US07170215B2
    • 2007-01-30
    • US10865125
    • 2004-06-10
    • Akihiko NambaKeiji OnishiKatsu Takeda
    • Akihiko NambaKeiji OnishiKatsu Takeda
    • H01L41/08
    • H03H9/564B41J2002/14266H03H3/04H03H9/173H03H9/174H03H9/175H03H2003/0435H03H2003/0478Y10T29/42Y10T29/49005Y10T29/49128Y10T29/4913Y10T29/49135
    • An electronic component includes a substrate; a piezoelectric material layer supported directly or indirectly by the substrate; a first electrode arranged on a surface of the piezoelectric material layer on an opposite side of the substrate; and a second electrode arranged on a surface of the piezoelectric material layer on the substrate side. The piezoelectric material layer is sandwiched between the first electrode and the second electrode. The first electrode has a smaller surface area than the piezoelectric material layer. A portion where the piezoelectric material layer is exposed from the first electrode includes a portion that is thinner than a thickness of the piezoelectric material layer between the first electrode and the second electrode. Thus, it is possible to configure a resonator with a higher frequency than its ordinary resonance, and it is easy to achieve an adjustment of the resonance frequency of the resonator, as well as improving the yield of the component and enabling the configuration of an electronic component that includes a plurality of resonators of different frequencies.
    • 电子部件包括基板; 由衬底直接或间接支撑的压电材料层; 布置在所述压电材料层的与所述基板相反的一侧的表面上的第一电极; 以及设置在基板侧的压电体层的表面上的第二电极。 压电材料层夹在第一电极和第二电极之间。 第一电极具有比压电材料层更小的表面积。 压电材料层从第一电极露出的部分包括比第一电极和第二电极之间的压电材料层的厚度薄的部分。 因此,可以构成具有比其普通谐振更高的频率的谐振器,并且容易实现谐振器的谐振频率的调节,以及提高元件的产量并且能够构造电子 该组件包括多个不同频率的谐振器。
    • 7. 发明授权
    • Method for manufacturing an electronic component
    • 电子部件的制造方法
    • US07370396B2
    • 2008-05-13
    • US11564142
    • 2006-11-28
    • Akihiko NambaKeiji OnishiKatsu Takeda
    • Akihiko NambaKeiji OnishiKatsu Takeda
    • H01L41/22H01L41/00
    • H03H9/564B41J2002/14266H03H3/04H03H9/173H03H9/174H03H9/175H03H2003/0435H03H2003/0478Y10T29/42Y10T29/49005Y10T29/49128Y10T29/4913Y10T29/49135
    • An electronic component includes a substrate; a piezoelectric material layer supported directly or indirectly by the substrate; a first electrode arranged on a surface of the piezoelectric material layer on an opposite side of the substrate; and a second electrode arranged on a surface of the piezoelectric material layer on the substrate side. The piezoelectric material layer is sandwiched between the first electrode and the second electrode. The first electrode has a smaller surface area than the piezoelectric material layer. A portion where the piezoelectric material layer is exposed from the first electrode includes a portion that is thinner than a thickness of the piezoelectric material layer between the first electrode and the second electrode. Thus, it is possible to configure a resonator with a higher frequency than its ordinary resonance, and it is easy to achieve an adjustment of the resonance frequency of the resonator, as well as improving the yield of the component and enabling the configuration of an electronic component that includes a plurality of resonators of different frequencies.
    • 电子部件包括基板; 由衬底直接或间接支撑的压电材料层; 布置在所述压电材料层的与所述基板相反的一侧的表面上的第一电极; 以及设置在基板侧的压电体层的表面上的第二电极。 压电材料层夹在第一电极和第二电极之间。 第一电极具有比压电材料层更小的表面积。 压电材料层从第一电极露出的部分包括比第一电极和第二电极之间的压电材料层的厚度薄的部分。 因此,可以构成具有比其普通谐振更高的频率的谐振器,并且容易实现谐振器的谐振频率的调节,以及提高元件的产量并且能够构造电子 分量,其包括多个不同频率的谐振器。
    • 10. 发明申请
    • ELECTRONIC COMPONENT AND METHOD FOR MANUFACTURING THE SAME
    • 电子元件及其制造方法
    • US20070090731A1
    • 2007-04-26
    • US11564142
    • 2006-11-28
    • Akihiko NAMBAKeiji OnishiKatsu Takeda
    • Akihiko NAMBAKeiji OnishiKatsu Takeda
    • B44C1/22H01L41/00
    • H03H9/564B41J2002/14266H03H3/04H03H9/173H03H9/174H03H9/175H03H2003/0435H03H2003/0478Y10T29/42Y10T29/49005Y10T29/49128Y10T29/4913Y10T29/49135
    • An electronic component includes a substrate; a piezoelectric material layer supported directly or indirectly by the substrate; a first electrode arranged on a surface of the piezoelectric material layer on an opposite side of the substrate; and a second electrode arranged on a surface of the piezoelectric material layer on the substrate side. The piezoelectric material layer is sandwiched between the first electrode and the second electrode. The first electrode has a smaller surface area than the piezoelectric material layer. A portion where the piezoelectric material layer is exposed from the first electrode includes a portion that is thinner than a thickness of the piezoelectric material layer between the first electrode and the second electrode. Thus, it is possible to configure a resonator with a higher frequency than its ordinary resonance, and it is easy to achieve an adjustment of the resonance frequency of the resonator, as well as improving the yield of the component and enabling the configuration of an electronic component that includes a plurality of resonators of different frequencies.
    • 电子部件包括基板; 由衬底直接或间接支撑的压电材料层; 布置在所述压电材料层的与所述基板相反的一侧的表面上的第一电极; 以及设置在基板侧的压电体层的表面上的第二电极。 压电材料层夹在第一电极和第二电极之间。 第一电极具有比压电材料层更小的表面积。 压电材料层从第一电极露出的部分包括比第一电极和第二电极之间的压电材料层的厚度薄的部分。 因此,可以构成具有比其普通谐振更高的频率的谐振器,并且容易实现谐振器的谐振频率的调节,以及提高元件的产量并且能够构造电子 该组件包括多个不同频率的谐振器。