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1. 发明授权

US09024272B2 Pattern measuring apparatus 有权
标题翻译：图案测量仪
公开(公告)号：US09024272B2
公开(公告)日：2015-05-05
申请号：US13518706
申请日：2010-12-01
申请人： Kei Sakai , Yafeng Zhang , Norio Hasegawa
发明人： Kei Sakai , Yafeng Zhang , Norio Hasegawa
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26 , H01J49/42 , G03F7/20 , G06T7/00
CPC分类号： G03F7/70466 , G01B2210/56 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J2237/2817
摘要： A pattern measuring apparatus which can identify a kind of gaps formed by a manufacturing process having a plurality of exposing steps such as SADP, particularly, which can suitably access a gap even if a sample has the gap that is not easily accessed is disclosed. A feature amount regarding one end side of a pattern having a plurality of patterns arranged therein and a plurality of kinds of feature amounts regarding the other end side of the pattern are extracted from a signal detected on the basis of scanning of a charged particle beam. With respect to proper kinds of feature amounts among the plurality of kinds of feature amounts, the feature amount on one side of the pattern and that on the other end side of the pattern are compared. On the basis of the comparison, the kinds of spaces among the patterns are determined.
摘要翻译：公开了一种图案测量装置，其可以识别由具有多个曝光步骤的制造工艺形成的间隙，例如SADP，特别是即使样品具有不容易接近的间隙也能适当地接近间隙。从基于扫描带电粒子束检测的信号中提取关于其中布置有多个图案的图案的一端侧的特征量和关于图案的另一端侧的多种特征量。对于多种特征量中的适当种类的特征量，比较图案的一侧的特征量和图案的另一端的特征量。在比较的基础上，确定了图案间的空间种类。

2. 发明申请

US20120267528A1 Pattern Measuring Apparatus and Computer Program 有权
标题翻译：图案测量仪器和计算机程序
公开(公告)号：US20120267528A1
公开(公告)日：2012-10-25
申请号：US13518706
申请日：2010-12-01
申请人： Kei Sakai , Yafeng Zhang , Norio Hasegawa
发明人： Kei Sakai , Yafeng Zhang , Norio Hasegawa
IPC分类号： H01J37/28
CPC分类号： G03F7/70466 , G01B2210/56 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J2237/2817
摘要： A pattern measuring apparatus which can identify a kind of gaps formed by a manufacturing process having a plurality of exposing steps such as SADP, particularly, which can suitably access a gap even if a sample has the gap that is not easily accessed is disclosed. A feature amount regarding one end side of a pattern having a plurality of patterns arranged therein and a plurality of kinds of feature amounts regarding the other end side of the pattern are extracted from a signal detected on the basis of scanning of a charged particle beam. With respect to proper kinds of feature amounts among the plurality of kinds of feature amounts, the feature amount on one side of the pattern and that on the other end side of the pattern are compared. On the basis of the comparison, the kinds of spaces among the patterns are determined.
摘要翻译：公开了一种图案测量装置，其可以识别由具有多个曝光步骤的制造工艺形成的间隙，例如SADP，特别是即使样品具有不容易接近的间隙也能适当地接近间隙。从基于扫描带电粒子束检测的信号中提取关于其中布置有多个图案的图案的一端侧的特征量和关于图案的另一端的多种特征量。对于多种特征量中的适当种类的特征量，比较图案的一侧的特征量和图案的另一端的特征量。在比较的基础上，确定了图案间的空间种类。

3. 发明授权

US09799903B2 Electrocatalyst for solid polymer fuel cell 有权
公开(公告)号：US09799903B2
公开(公告)日：2017-10-24
申请号：US13880393
申请日：2011-10-21
申请人： Hiroshi Iden , Atsushi Ohma , Kei Sakai , Kazuyuki Satou , Yoshitaka Ono , Hiroyuki Tanaka , Ken Akizuki
发明人： Hiroshi Iden , Atsushi Ohma , Kei Sakai , Kazuyuki Satou , Yoshitaka Ono , Hiroyuki Tanaka , Ken Akizuki
IPC分类号： H01M4/90 , H01M8/1004 , H01M4/92 , H01M8/1007
CPC分类号： H01M8/1004 , H01M4/9041 , H01M4/9058 , H01M4/9083 , H01M4/92 , H01M4/926 , H01M8/1007
摘要： Provided is an electrocatalyst for solid polymer fuel cells capable of increasing the active surface area for reactions in a catalyst component, increasing the utilization efficiency of the catalyst, and reducing the amount of expensive precious metal catalyst used. Also provided are a membrane electrode assembly that uses this electrocatalyst and a solid polymer fuel cell. An electrocatalyst for a solid polymer fuel cell is provided with a catalyst and solid proton conducting material. A liquid conductive material retention part that retains a liquid proton conducting material that connects the catalyst and solid proton conducting material is provided between the same. The surface area of the catalyst exposed within the liquid conductive material retention part is larger than the surface area of the catalyst in contact with the solid proton conducting material.

4. 发明授权

US08478078B2 Pattern-searching condition determining method, and pattern-searching condition setting device 有权
标题翻译：模式搜索条件确定方法和模式搜索条件设置装置
公开(公告)号：US08478078B2
公开(公告)日：2013-07-02
申请号：US13122731
申请日：2009-10-02
申请人： Kei Sakai , Fumihiro Sasajima
发明人： Kei Sakai , Fumihiro Sasajima
IPC分类号： G06K9/32
CPC分类号： H01J37/222 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J37/28 , H01J2237/2817 , H01J2237/2826
摘要： Provided is a method for determining the magnification of a pattern searching template of a scanning electron microscope. The determining method comprises: acquiring a first image initially at a first magnification; then acquiring a second image which contains a pattern image displayed on the first image at a second magnification lower than the first magnification; making the size of the first image coincident with the size of a third image which cut out a portion of the second image; thereafter determining the correlation value between the first image and the third image; and setting the second magnification as the magnification of a pattern searching template, in the case where the correlation value is equal to or higher than a predetermined value. As a result, a condition for acquiring a search area can be properly set, when pattern recognition is performed by means of the template.
摘要翻译：提供了一种用于确定扫描电子显微镜的图案搜索模板的放大率的方法。所述确定方法包括：以第一放大率开始获取第一图像; 然后以低于第一倍率的第二倍率获取包含显示在第一图像上的图案图像的第二图像; 使第一图像的大小与切出第二图像的一部分的第三图像的大小一致; 然后确定第一图像和第三图像之间的相关值; 并且在相关值等于或高于预定值的情况下，将第二放大倍率设置为模式搜索模板的放大率。结果，当通过模板执行模式识别时，可以适当地设置用于获取搜索区域的条件。

5. 发明授权

US07650222B2 Method and device for integrative control of gas engine 有权
标题翻译：燃气发动机综合控制方法与装置
公开(公告)号：US07650222B2
公开(公告)日：2010-01-19
申请号：US12230449
申请日：2008-08-28
申请人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
发明人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
IPC分类号： B60T7/12 , F02D31/00
CPC分类号： F02D31/007 , F02D41/0007 , F02D41/0025 , F02D41/18 , F02D2041/0022 , F02D2041/1409 , F02D2041/1419 , F02D2200/0406 , F02D2200/0414 , F02D2250/32
摘要： An integrative control method and device for controlling gas engines is proposed which is improved load responsivity of the engine in transient operation. The control method comprises a speed control process for controlling engine rotation speed by controlling the fuel gas flow control valve based on deviation of actual engine rotation speed from a target command value of rotation speed, and an air fuel ratio control process for controlling air fuel ratio of fuel-air mixture by controlling throttle valve opening based on deviation of the actual mixture flow rate from the command value of mixture flow rate, whereby at least either fuel gas flow correction or fuel-air mixture flow correction is performed when time-series variation of input signals relating to performance change of the gas engine exceeds a reference range determined beforehand, the fuel gas flow correction being performed by correcting control variables of the fuel gas flow control valve in the speed control process, and the mixture flow correction being performed by correcting opening of the throttle valve in the air fuel ratio control process.
摘要翻译：提出了一种用于控制燃气发动机的综合控制方法和装置，其在瞬时操作中改善了发动机的负载响应性。该控制方法包括：通过基于实际发动机转速与目标转速值的偏差控制燃料气体流量控制阀来控制发动机转速的速度控制处理以及用于控制空燃比的空燃比控制处理通过根据实际混合流量与混合流量的指令值的偏差来控制节气门开度，从而当时间序列变化时执行至少一种燃料气体流量校正或燃料 - 空气混合物流量校正与气体发动机的性能变化相关的输入信号超过预先确定的参考范围，通过在速度控制过程中校正燃料气体流量控制阀的控制变量来执行燃料气体流量校正，并且混合流量校正由在空燃比控制处理中校正节流阀的打开。

6. 发明申请

US20140199609A1 Electrocatalyst for Solid Polymer Fuel Cell 有权
标题翻译：固体聚合物燃料电池的电催化剂
公开(公告)号：US20140199609A1
公开(公告)日：2014-07-17
申请号：US13880393
申请日：2011-10-21
申请人： Hiroshi Iden , Atsushi Ohma , Kei Sakai , Kazuyuki Satou , Yoshitaka Ono , Hiroyuki Tanaka , Ken Akizuki
发明人： Hiroshi Iden , Atsushi Ohma , Kei Sakai , Kazuyuki Satou , Yoshitaka Ono , Hiroyuki Tanaka , Ken Akizuki
IPC分类号： H01M4/90 , H01M8/10 , H01M4/92
CPC分类号： H01M8/1004 , H01M4/9041 , H01M4/9058 , H01M4/9083 , H01M4/92 , H01M4/926 , H01M8/1007
摘要： Provided is an electrocatalyst for solid polymer fuel cells capable of increasing the active surface area for reactions in a catalyst component, increasing the utilization efficiency of the catalyst, and reducing the amount of expensive precious metal catalyst used. Also provided are a membrane electrode assembly that uses this electrocatalyst and a solid polymer fuel cell. An electrocatalyst for a solid polymer fuel cell is provided with a catalyst and solid proton conducting material. A liquid conductive material retention part that retains a liquid proton conducting material that connects the catalyst and solid proton conducting material is provided between the same. The surface area of the catalyst exposed within the liquid conductive material retention part is larger than the surface area of the catalyst in contact with the solid proton conducting material.
摘要翻译：提供一种能够提高催化剂成分中的反应的活性表面积的固体高分子型燃料电池用电极催化剂，提高催化剂的利用效率，减少昂贵的贵金属催化剂的使用量。还提供了使用该电催化剂和固体聚合物燃料电池的膜电极组件。用于固体聚合物燃料电池的电极催化剂具有催化剂和固体质子传导材料。在其之间设置有保持连接催化剂和固体质子导电材料的液体质子传导材料的液体导电材料保持部。暴露在液体导电材料保持部分内的催化剂的表面积大于与固体质子传导材料接触的催化剂的表面积。

7. 发明授权

US07654247B2 Method and device for controlling starting of gas engine 有权
标题翻译：燃气发动机起动控制方法及装置
公开(公告)号：US07654247B2
公开(公告)日：2010-02-02
申请号：US12230439
申请日：2008-08-28
申请人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
发明人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
IPC分类号： F02D9/08 , F02D41/14
CPC分类号： F02D41/0007 , F02B37/00 , F02B2275/14 , F02D19/022 , F02D19/024 , F02D19/027 , F02D31/002 , F02D41/0027 , F02D41/06 , F02M21/0236 , F02M21/0275 , F02M21/0284 , F02M21/047 , F02N2300/102 , Y02T10/144 , Y02T10/32
摘要： A gas engine has a starting operation mode in which fuel gas flow is controlled based on actual mixture flow rate and adequate excess air ratio prescribed for each of detected values of operating conditions of the engine and then mixture flow is controlled so that engine rotation speed approaches a target rotation speed, and a normal operation mode in which fuel gas flow is controlled so that engine rotation speed approaches the target rotation speed and then mixture flow rate is controlled so that air fuel ratio of the mixture coincides with an adequate value prescribed for each of detected values of operating conditions of the gas engine with the fuel gas flow flowing at the commanded fuel gas flow rate, and a switchover rotation speed is predetermined so that operation mode is switched from starting mode to normal mode when engine speed reaches the switchover rotation speed.
摘要翻译：燃气发动机具有启动操作模式，其中基于实际的混合流量和针对发动机的操作条件的每个检测值规定的足够的过量空气比控制燃料气体流量，然后控制混合流量以使发动机转速接近目标转速和正常运转模式，其中燃料气体流量被控制使得发动机转速接近目标转速，然后控制混合流量，使得混合物的空燃比与每一个规定的适当值一致预定燃料发动机的操作条件的检测值，其中燃料气体流以指令的燃料气体流量流动，并且切换转速被确定，使得当发动机转速达到切换旋转时，操作模式从起动模式切换到正常模式速度。

8. 发明申请

US20090076709A1 Method and device for integrative control of gas engine 有权
标题翻译：燃气发动机综合控制方法与装置
公开(公告)号：US20090076709A1
公开(公告)日：2009-03-19
申请号：US12230450
申请日：2008-08-28
申请人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
发明人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
IPC分类号： F02D41/00
CPC分类号： F02D41/0027 , F02B37/00 , F02B2275/14 , F02D19/022 , F02D19/023 , F02D19/027 , F02D31/007 , F02D41/1446 , F02M21/0236 , F02M21/0275 , F02M21/0284 , F02M21/047 , Y02T10/16 , Y02T10/32
摘要： An integrative control method and device for controlling gas engines is proposed which load responsivity of the engine is improved while maintaining air fuel ratio control and stable control is performed when fuel gas of different calorific value is used. The control method comprises a speed control process for controlling engine rotation speed by controlling the fuel gas flow control valve based on deviation of actual engine rotation speed from a target command value of rotation speed, and an air fuel ratio control process for controlling air fuel ratio of fuel-air mixture by controlling throttle valve opening based on deviation of the actual mixture flow rate from the command value of mixture flow rate, whereby correction of theoretical air fuel ratio in accordance with exhaust temperature is performed in the air fuel ratio control process, the correction being done to correct the theoretical air fuel ratio used to calculate the command value of fuel-air mixture flow rate in accordance with exhaust temperature based on deviation of actual exhaust temperature from target exhaust temperature prescribed for various engine rotation speeds and load factors.
摘要翻译：提出了一种用于控制燃气发动机的综合控制方法和装置，同时在保持空燃比控制的同时提高发动机的负载响应性，并且在使用不同热值的燃料气体时进行稳定的控制。该控制方法包括：通过基于实际发动机转速与目标转速值的偏差控制燃料气体流量控制阀来控制发动机转速的速度控制处理以及用于控制空燃比的空燃比控制处理通过根据实际混合流量与混合流量的指令值的偏差来控制节气门开度，由此在空燃比控制处理中进行与排气温度的理论空燃比的校正，根据实际排气温度与针对各种发动机转速和负载因素规定的目标排气温度的偏差，根据排气温度来校正用于计算燃料 - 空气混合物流量的指令值的理论空燃比。

9. 发明申请

US20090071438A1 Method and device for controlling starting of gas engine 有权
标题翻译：燃气发动机起动控制方法及装置
公开(公告)号：US20090071438A1
公开(公告)日：2009-03-19
申请号：US12230439
申请日：2008-08-28
申请人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
发明人： Masataka Shiraishi , Yoshitaka Kakuhama , Kei Sakai , Yosuke Kitamura
IPC分类号： F02D9/08 , F02D41/14
CPC分类号： F02D41/0007 , F02B37/00 , F02B2275/14 , F02D19/022 , F02D19/024 , F02D19/027 , F02D31/002 , F02D41/0027 , F02D41/06 , F02M21/0236 , F02M21/0275 , F02M21/0284 , F02M21/047 , F02N2300/102 , Y02T10/144 , Y02T10/32
摘要： A method and device for controlling starting of a gas engine is proposed which is superior in starting performance and improved in load responsivity while maintaining air fuel ratio control.There are provided a starting operation mode in which fuel gas flow is controlled by the fuel gas flow control valve based on actual mixture flow rate and adequate excess air ratio prescribed for each of detected values of operating conditions of the engine and then mixture flow is controlled by the throttle valve so that engine rotation speed approaches a target rotation speed, and a normal operation mode in which fuel gas flow is controlled by the fuel gas flow control valve so that engine rotation speed approaches the target rotation speed and then mixture flow rate is controlled by the throttle valve so that air fuel ratio of the mixture coincides with an adequate value prescribed for each of detected values of operating conditions of the gas engine with the fuel gas flow flowing at the commanded fuel gas flow rate, and a switchover rotation speed is predetermined so that operation mode is switched from starting mode to normal mode when engine speed reaches the switchover rotation speed.
摘要翻译：提出了一种用于控制燃气发动机启动的方法和装置，其在启动性能方面优异，并且在保持空燃比控制的同时提高了负载响应性。提供了一种启动操作模式，其中燃料气体流量由燃料气体流量控制阀基于实际混合流量和针对发动机的操作条件的每个检测值规定的足够的过量空气比来控制，然后控制混合流量通过节流阀使发动机转速接近目标转速，以及通过燃料气体流量控制阀控制燃料气体流量使得发动机转速接近目标转速，然后混合流量为由所述节流阀控制，使得所述混合物的空燃比与以所述燃料气体流量流动的所述燃料气体流量的所述燃气发动机的操作条件的每个检测值规定的适当值一致，以及切换转速是预定的，当发动机速度达到切换旋转时，操作模式从起动模式切换到正常模式速度。

10. 发明申请

US20110194778A1 PATTERN-SEARCHING CONDITION DETERMINING METHOD, AND PATTERN-SEARCHING CONDITION SETTING DEVICE 有权
标题翻译：图案搜索条件确定方法和图案搜索条件设置装置
公开(公告)号：US20110194778A1
公开(公告)日：2011-08-11
申请号：US13122731
申请日：2009-10-02
申请人： Kei Sakai , Fumihiro Sasajima
发明人： Kei Sakai , Fumihiro Sasajima
IPC分类号： G06K9/62
CPC分类号： H01J37/222 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J37/28 , H01J2237/2817 , H01J2237/2826
摘要： Provided is a method for determining the magnification of a pattern searching template of a scanning electron microscope. The determining method comprises: acquiring a first image initially at a first magnification; then acquiring a second image which contains a pattern image displayed on the first image at a second magnification lower than the first magnification; making the size of the first image coincident with the size of a third image which cut out a portion of the second image; thereafter determining the correlation value between the first image and the third image; and setting the second magnification as the magnification of a pattern searching template, in the case where the correlation value is equal to or higher than a predetermined value. As a result, a condition for acquiring a search area can be properly set, when pattern recognition is performed by means of the template.
摘要翻译：提供了一种用于确定扫描电子显微镜的图案搜索模板的放大率的方法。所述确定方法包括：以第一放大率开始获取第一图像; 然后以低于第一倍率的第二倍率获取包含显示在第一图像上的图案图像的第二图像; 使第一图像的大小与切出第二图像的一部分的第三图像的大小一致; 然后确定第一图像和第三图像之间的相关值; 并且在相关值等于或高于预定值的情况下，将第二放大倍率设置为模式搜索模板的放大率。结果，当通过模板执行模式识别时，可以适当地设置用于获取搜索区域的条件。

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