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    • 1. 发明授权
    • Piezoelectric/electrostrictive device and method for manufacturing the same
    • 压电/电致伸缩器件及其制造方法
    • US07126261B2
    • 2006-10-24
    • US11007963
    • 2004-12-09
    • Kazuyoshi ShibataKoji IkedaMasashi Watanabe
    • Kazuyoshi ShibataKoji IkedaMasashi Watanabe
    • H01L41/083H01L41/047
    • H01L41/43H01L41/083H01L41/094H01L41/0946H01L41/27H01L41/338Y10T29/42Y10T29/435
    • A piezoelectric/electrostrictive device 10 includes a stationary portion 11; a thin-plate portion 12 supported by the stationary portion; and a piezoelectric/electrostrictive element 14 including a plurality of electrodes and a plurality of piezoelectric/electrostrictive layers arranged alternatingly In layers. The piezoelectric/electrostrictive device 10 is manufactured by the steps of forming a piezoelectric/electrostrictive laminate by alternatingly laminating laminar electrodes and piezoelectric/electrostrictive layers on a plane of a thin-plate member adapted to form the thin-plate portion 12, and cutting the thin-plate member and the piezoelectric/electrostrictive laminate. The cutting step is performed by advancing a wire member (wire saw) reciprocating in a direction parallel to the direction of lamination of the piezoelectric/electrostrictive laminate while holding the wire member substantially parallel to the direction of lamination. Thus, since the laminar electrodes are cut while being extended within corresponding layer planes, the degree of covering the end surfaces of the piezoelectric/electrostrictive layers decreases.
    • 压电/电致伸缩装置10包括固定部分11; 由固定部分支撑的薄板部分12; 以及包括多个电极的压电/电致伸缩元件14和交替地层叠布置的多个压电/电致伸缩层。 压电/电致伸缩装置10通过以下步骤制造:通过在适于形成薄板部分12的薄板构件的平面上交替层叠层状电极和压电/电致伸缩层来形成压电/电致伸缩层压体, 薄板构件和压电/电致伸缩层压板。 切割步骤通过使保持线材大致平行于层叠方向的线材在与压电/电致伸缩层叠体的层叠方向平行的方向上往复移动的线材(线锯)来进行。 因此,由于层叠电极在相应的层平面内被延伸而被切割,所以覆盖压电/电致伸缩层的端面的程度减小。
    • 2. 发明申请
    • Piezoelectric/electrostrictive device and method for manufacturing the same
    • 压电/电致伸缩器件及其制造方法
    • US20050179344A1
    • 2005-08-18
    • US11007963
    • 2004-12-09
    • Kazuyoshi ShibataKoji IkedaMasashi Watanabe
    • Kazuyoshi ShibataKoji IkedaMasashi Watanabe
    • H01L41/083H01L41/09H01L41/187H01L41/22H01L41/273H01L41/338
    • H01L41/43H01L41/083H01L41/094H01L41/0946H01L41/27H01L41/338Y10T29/42Y10T29/435
    • A piezoelectric/electrostrictive device 10 includes a stationary portion 11; a thin-plate portion 12 supported by the stationary portion; and a piezoelectric/electrostrictive element 14 including a plurality of electrodes and a plurality of piezoelectric/electrostrictive layers arranged alternatingly In layers. The piezoelectric/electrostrictive device 10 is manufactured by the steps of forming a piezoelectric/electrostrictive laminate by alternatingly laminating laminar electrodes and piezoelectric/electrostrictive layers on a plane of a thin-plate member adapted to form the thin-plate portion 12, and cutting the thin-plate member and the piezoelectric/electrostrictive laminate. The cutting step is performed by advancing a wire member (wire saw) reciprocating in a direction parallel to the direction of lamination of the piezoelectric/electrostrictive laminate while holding the wire member substantially parallel to the direction of lamination. Thus, since the laminar electrodes are cut while being extended within corresponding layer planes, the degree of covering the end surfaces of the piezoelectric/electrostrictive layers decreases.
    • 压电/电致伸缩装置10包括固定部分11; 由固定部分支撑的薄板部分12; 以及包括多个电极的压电/电致伸缩元件14和交替地层叠布置的多个压电/电致伸缩层。 压电/电致伸缩装置10通过以下步骤制造:通过在适于形成薄板部分12的薄板构件的平面上交替层叠层状电极和压电/电致伸缩层来形成压电/电致伸缩层压体, 薄板构件和压电/电致伸缩层压板。 切割步骤通过使保持线材大致平行于层叠方向的线材在与压电/电致伸缩层叠体的层叠方向平行的方向上往复移动的线材(线锯)来进行。 因此,由于层叠电极在相应的层平面内被延伸而被切割,所以覆盖压电/电致伸缩层的端面的程度减小。
    • 8. 发明授权
    • Method of manufacturing a ceramic stack
    • 制造陶瓷叠层的方法
    • US07062825B2
    • 2006-06-20
    • US10862596
    • 2004-06-07
    • Fumitake TakahashiKoji IkedaKazuyoshi Shibata
    • Fumitake TakahashiKoji IkedaKazuyoshi Shibata
    • H04R17/00C03B29/00H01L41/04
    • H01L41/0831H01L41/0472H01L41/0946H01L41/314Y10T29/42Y10T29/49005Y10T29/49798Y10T156/1043Y10T156/1044Y10T428/252
    • A method of producing a ceramic stack is provided, including the steps of providing at least a first ceramic green sheet to be formed into a long ceramic plate and having a principal surface, providing at least a second ceramic green sheet to be formed into a short ceramic plate and having a length that is less than a length of the principal surface of the first ceramic green sheet, and laminating the second ceramic green sheet to the principal surface of the first ceramic green sheet to form a ceramic green sheet laminate having a lamination border defined between at least a side surface of the second ceramic green sheet and the principal surface of the first ceramic green sheet. The method also includes the steps of forming a member having a curved surface at the lamination border by applying a paste to the lamination border such that the curved surface includes at least one inflection point when viewed in cross-section, and sintering the laminate into an integral unit to form the ceramic stack.
    • 提供一种生产陶瓷堆叠的方法,包括以下步骤:提供至少第一陶瓷生片,以形成长陶瓷板并具有主表面,至少提供形成短片的第二陶瓷生片 陶瓷板,其长度小于第一陶瓷生片的主表面的长度,并且将第二陶瓷生片层压到第一陶瓷生片的主表面,以形成具有层压的陶瓷生片叠层 边界限定在第二陶瓷生片的至少一个侧表面和第一陶瓷生片的主表面之间。 该方法还包括以下步骤:通过将糊料施加到层压边界来形成在层压边界处具有弯曲表面的构件,使得弯曲表面在横截面中观察时包括至少一个拐点,并将层压体烧结成 整体单元形成陶瓷叠层。
    • 9. 发明申请
    • Piezoelectric/electrostrictive device
    • 压电/电致伸缩器件
    • US20060061240A1
    • 2006-03-23
    • US11266434
    • 2005-11-03
    • Koji IkedaKazuyoshi ShibataTomoki ItoFumitake Takahashi
    • Koji IkedaKazuyoshi ShibataTomoki ItoFumitake Takahashi
    • H01L41/08
    • H01L41/43H01L41/094H01L41/314H01L41/338Y10T29/42Y10T29/43Y10T29/49005Y10T29/49126Y10T29/49128
    • A piezoelectric/electrostrictive device includes a pair of thin plates confronting each other, a fixing member supporting the thin plates thereon, and movable portions disposed on end portions of the pair of thin plates. Protrusions are formed on principal surfaces of first ceramic green sheets according to at least a single thick film forming process. The protrusions will subsequently serve as the movable portions, and the first ceramic green sheets will subsequently serve as the thin plates. The first ceramic green sheets and a second ceramic green sheet which will subsequently serve as the fixing member are stacked into a ceramic green laminated body. The ceramic green laminated body is baked into an integral ceramic laminated body. Piezoelectric/electrostrictive elements are formed on the ceramic laminated body. After the piezoelectric/electrostrictive elements are baked, unnecessary-portions are removed from the piezoelectric/electrostrictive elements to fabricate the piezoelectric/electrostrictive device.
    • 压电/电致伸缩器件包括彼此面对的一对薄板,支撑薄板的固定部件和设置在该对薄板的端部上的可动部。 根据至少一个厚膜形成方法,在第一陶瓷生片的主表面上形成突起。 这些突起随后将用作可动部分,并且第一陶瓷生片将随后用作薄板。 第一陶瓷生片和随后用作定影构件的第二陶瓷生片堆叠成陶瓷绿色层压体。 陶瓷绿色层压体被烘烤成一体的陶瓷层压体。 在陶瓷层叠体上形成压电/电致伸缩元件。 在压电/电致伸缩元件被烘烤之后,不必要的部分从压电/电致伸缩元件去除以制造压电/电致伸缩器件。
    • 10. 发明申请
    • Piezoelectric/electrostrictive device
    • 压电/电致伸缩器件
    • US20060061238A1
    • 2006-03-23
    • US11206252
    • 2005-08-17
    • Koji IkedaKazuyoshi Shibata
    • Koji IkedaKazuyoshi Shibata
    • H01L41/08
    • G11B5/5552H01L41/0946
    • A piezoelectric/electrostrictive device that includes a base 11 having a pair of right and left movable parts 11a, 11b and a fixing part 11c disposed at one end thereof as well as piezoelectric/electrostrictive elements 12a, 12b disposed on the sides of the movable parts 11a, 11b of the base 11 is fabricated to have a construction with fewer components. The piezoelectric/electrostrictive device having a construction with fewer components is provided by adopting a base 11 having an integral structure formed by bending an original plate stamped into a shape that delineates a plane development of the base, as the base of the piezoelectric/electrostrictive device. In addition, in this piezoelectric/electrostrictive device, piezoelectric/electrostrictive elements are arranged on inner sides of a pair of left and right movable parts. Accordingly, destruction of the piezoelectric/electrostrictive element can hardly occur and high reliability of the piezoelectric/electrostrictive device is achieved.
    • 一种压电/电致伸缩器件,其包括具有一对左右可动部分11a,11b和设置在其一端的固定部分11c的基座11以及设置在其上的压电/电致伸缩元件12a, 基部11的可动部11a,11b的侧面被制造成具有较少部件的结构。 具有较少部件结构的压电/电致伸缩器件通过采用具有整体结构的基座11,该基座11通过弯曲形成为形成基底的平面显影的形状的原版而形成,作为压电/电致伸缩器件 。 此外,在该压电/电致伸缩器件中,压电/电致伸缩元件设置在一对左右可动部的内侧。 因此,难以发生压电/电致伸缩元件的破坏,实现了压电/电致伸缩器件的高可靠性。