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    • 5. 发明申请
    • Method and apparatus for observing and inspecting defects
    • 观察和检查缺陷的方法和装置
    • US20060238760A1
    • 2006-10-26
    • US11475667
    • 2006-06-26
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • G01J4/00
    • G01N21/21G01N21/9501G01N21/956G01N21/95607G02B21/0016
    • A defect inspecting apparatus is disclosed that can detect finer defects with high resolution optical images of those defects, and which makes the difference in contrast greater between fine line patterns of a semiconductor device. The defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
    • 公开了能够利用这些缺陷的高分辨率光学图像检测更细的缺陷的缺陷检查装置,并且使得半导体器件的细线图案之间的对比度差异更大。 缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置,用于照亮安装在安装件上的图案样品,并检测由其获得的反射光的光学图像。 还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置,用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置,用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。
    • 6. 发明申请
    • Method and apparatus for reviewing defects
    • 检查缺陷的方法和装置
    • US20060210144A1
    • 2006-09-21
    • US11325552
    • 2006-01-05
    • Kazuo YamaguchiToshifumi HondaYuji TakagiMunenori Fukunishi
    • Kazuo YamaguchiToshifumi HondaYuji TakagiMunenori Fukunishi
    • G06K9/00
    • G06T7/0006G06T2207/10061G06T2207/30148
    • A reviewing apparatus, for enabling to conduct detailed review (ADR) and/or defect classification (ADC), effectively, through making alignment of defects detected in an upstream inspecting apparatus into the reviewing apparatus, with certainty and at high accuracy, and further within a short time-period, comprises a defect selecting portion 240 for selecting or picking up a plural number of alignment candidates from a large numbers defects, upon defect inspection information, which is detected within the inspecting apparatus, an electron microscope 21 (30) for obtaining a SEM image of the plural number of alignment candidates, through picking up an image on each of the plural number of alignment candidates, which are selected or picked up, narrowly, and a determining portion 243 for calculating out characteristic quantities relating to the plural number of alignment candidates, upon basis of the obtained SEM images thereof, and for determining on suitableness/unsuitableness for use in alignment relating to the plural number of alignment candidates, upon basis of the characteristic quantities calculated therewith.
    • 一种审查装置,能够有效地进行详细审查(ADR)和/或缺陷分类(ADC),通过将上游检测装置中检测到的缺陷与确定性和准确性进行对准,并进一步在 短时间段包括用于从大量缺陷中选择或拾取多个对准候选的缺陷选择部分240,在检查装置内检测到的缺陷检查信息时,具有电子显微镜21(30),用于 通过拾取选择或拾取的多个对准候选者中的每一个上的图像,以及用于计算与多个对准候选者相关的特征量的确定部分243,获得多个对准候选的SEM图像; 基于所获得的SEM图像和用于确定适合性/不适合性的对准候选数 基于由其计算的特征量,与多个对准候选对齐。
    • 7. 发明授权
    • Method and apparatus for observing and inspecting defects
    • 观察和检查缺陷的方法和装置
    • US06690469B1
    • 2004-02-10
    • US09397334
    • 1999-09-14
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • G01J400
    • G01N21/21G01N21/9501G01N21/956G01N21/95607G02B21/0016
    • A defect inspecting apparatus is disclosed that can detect finer defects with high resolution optical images of those defects, and which makes the difference in contrast greater between fine line patterns of a semiconductor device. The defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
    • 公开了能够利用这些缺陷的高分辨率光学图像检测更细的缺陷的缺陷检查装置,并且使得半导体器件的细线图案之间的对比度差异更大。 缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置,用于照亮安装在安装件上的图案样品,并检测由其获得的反射光的光学图像。 还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置,用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置,用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。
    • 10. 发明授权
    • Optical rotary encoder with indexing
    • 光学旋转编码器
    • US5130536A
    • 1992-07-14
    • US603402
    • 1990-10-26
    • Seiichi SatoKazuo YamaguchiYoshi KurosawaAtsushi UedaMasami Matsumura
    • Seiichi SatoKazuo YamaguchiYoshi KurosawaAtsushi UedaMasami Matsumura
    • G01D5/36G01D5/245G01D5/30H03M1/30
    • H03M1/308G01D5/2457
    • An optical rotary encoder having a rotatable pulse scale having a row of code pattern with specific light-permeable or-deflection slits each for outputting a reference position signal and other light-permeable or reflection slits each adapted to reduce the amount of light for outputting an angular signal, both of the optical signals being photoelectronically converted and the waveform of the resultant electric signals being shaped based on threshold voltages into electric pulse signals indicative of a reference angle of 0.degree. and the accumulated angle of rotation, in which the circumferential width of each specific reference slit is made narrower than that of other slit so that the pulse width for angular position indicating of the angular pulse signal is always equal and constant for ensuring more accurate detection of the angle of rotation.
    • 一种光学旋转编码器,其具有可旋转的脉冲刻度,其具有一排代码图案,具有特定的光透射或偏转狭缝,每个狭缝用于输出参考位置信号和其他透光或反射狭缝,每个适于减少用于输出 角度信号,两个光信号被光电转换,并且所得到的电信号的波形根据阈值电压被成形为表示参考角度0°的电脉冲信号和累积的旋转角度,其中圆周宽度 每个特定的参考狭缝比其他狭缝窄,使得指示角度脉冲信号的角位置的脉冲宽度总是相等和恒定的,以确保更准确地检测旋转角度。