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1. 发明授权

US06370306B1 Optical waveguide probe and its manufacturing method 有权
标题翻译：光波导探针及其制造方法
公开(公告)号：US06370306B1
公开(公告)日：2002-04-09
申请号：US09367407
申请日：1999-11-09
申请人： Kazuo Sato , Mitsuhiro Shikita , Kenji Kato , Masataka Shinogi , Kunio Nakajima , Norio Chiba , Susumu Ichihara , Takashi Niwa , Yasayuki Mitsuoka , Nobuyuki Kasama
发明人： Kazuo Sato , Mitsuhiro Shikita , Kenji Kato , Masataka Shinogi , Kunio Nakajima , Norio Chiba , Susumu Ichihara , Takashi Niwa , Yasayuki Mitsuoka , Nobuyuki Kasama
IPC分类号： G02B602
CPC分类号： G02B6/132 , G01B11/30 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B6/241 , G02B6/262 , Y10S977/862
摘要： The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process. This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.
摘要翻译：本发明的目的是获得一种形成为钩形的光波导探针，以通过使用硅工艺的制造来照亮和检测光。该光波导探针形成为钩形，并由光波导1形成在探针针5上并由电介质构成的基板2和支撑该光波导1的基板2.该光波导1形成在基板2的上方。光波导1由芯8构成，折射率比核心8。

2. 发明授权

US07557933B2 Measuring probe, sample surface measuring apparatus and sample surface measuring method 有权
标题翻译：测量探头，样品表面测量仪和样品表面测量方法
公开(公告)号：US07557933B2
公开(公告)日：2009-07-07
申请号：US12279331
申请日：2007-02-14
申请人： Kenji Fukuzawa , Mitsuhiro Shikita , Satoshi Terada
发明人： Kenji Fukuzawa , Mitsuhiro Shikita , Satoshi Terada
IPC分类号： G01B11/30
CPC分类号： G01Q60/38 , G01Q20/02 , G01Q60/26
摘要： A measurement probe 1 for measuring a surface of sample S comprises a base section 10, a head section 30 having a probe tip 31, and a support structure section 15 which supports the head section 30 with the base section 10 along a support axis substantially orthogonal to the vertical axis in the direction of protrusion of the probe tip 31. The support structure section 15 includes two spring structure sections of a first spring structure section 20 deformable in the direction of the vertical axis; and a second spring structure section 25 deformable in the direction of the lateral axis, and a reflection surface 32 which is formed with a reflection pattern varying the reflectance within the surface is provided at the side opposite to the probe tip 31 of the head section 30. By using this structure, there are obtained the measurement probe, the sample surface measuring apparatus, and the sample surface measuring method, which can improve the accuracy of measurement of the sample surface without using a special measuring system.
摘要翻译：用于测量样品S的表面的测量探针1包括基部10，具有探针尖端31的头部30和支撑结构部15，其支撑头部30与基部10沿着支撑轴线基本正交相对于探针尖端31的突出方向的垂直轴。支撑结构部15包括可沿垂直轴线的方向变形的第一弹簧结构部分20的两个弹簧结构部分。以及沿横轴的方向可变形的第二弹簧结构部分25，并且在与头部30的探针头部31相对的一侧设置反射面32，该反射面32形成有改变表面内的反射率的反射图案通过使用这种结构，可以获得测量探针，样品表面测量装置和样品表面测量方法，其可以在不使用特殊测量系统的情况下提高样品表面的测量精度。

3. 发明申请

US20090027690A1 MEASURING PROBE, SAMPLE SURFACE MEASURING APPARATUS AND SAMPLE SURFACE MEASURING METHOD 有权
标题翻译：测量探针，样品表面测量装置和样品表面测量方法
公开(公告)号：US20090027690A1
公开(公告)日：2009-01-29
申请号：US12279331
申请日：2007-02-14
申请人： Kenji Fukuzawa , Mitsuhiro Shikita , Satoshi Terada
发明人： Kenji Fukuzawa , Mitsuhiro Shikita , Satoshi Terada
IPC分类号： G01B11/30
CPC分类号： G01Q60/38 , G01Q20/02 , G01Q60/26
摘要： A measurement probe 1 for measuring a surface of sample S comprises a base section 10, a head section 30 having a probe tip 31, and a support structure section 15 which supports the head section 30 with the base section 10 along a support axis substantially orthogonal to the vertical axis in the direction of protrusion of the probe tip 31. The support structure section 15 includes two spring structure sections of a first spring structure section 20 deformable in the direction of the vertical axis; and a second spring structure section 25 deformable in the direction of the lateral axis, and a reflection surface 32 which is formed with a reflection pattern varying the reflectance within the surface is provided at the side opposite to the probe tip 31 of the head section 30. By using this structure, there are obtained the measurement probe, the sample surface measuring apparatus, and the sample surface measuring method, which can improve the accuracy of measurement of the sample surface without using a special measuring system.
摘要翻译：用于测量样品S的表面的测量探针1包括基部10，具有探针尖端31的头部30和支撑结构部15，其支撑头部30与基部10沿着支撑轴线基本正交相对于探针尖端31的突出方向的垂直轴。支撑结构部15包括可沿垂直轴线的方向变形的第一弹簧结构部分20的两个弹簧结构部分。以及沿横轴的方向可变形的第二弹簧结构部分25，并且在与头部30的探针头部31相对的一侧设置反射面32，该反射面32形成有改变表面内的反射率的反射图案通过使用这种结构，可以获得测量探针，样品表面测量装置和样品表面测量方法，其可以在不使用特殊测量系统的情况下提高样品表面的测量精度。

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