会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明授权
    • Solid-state imaging device and fabrication method thereof
    • 固态成像装置及其制造方法
    • US08362527B2
    • 2013-01-29
    • US12808757
    • 2008-12-08
    • Osamu MatsushimaKenichi Miyazaki
    • Osamu MatsushimaKenichi Miyazaki
    • H01L27/146H01L31/0232
    • H01L27/14632H01L27/1463H01L27/14643H01L27/14687H01L31/022466H01L31/022483H01L31/0322Y02E10/541Y02P70/521
    • Provision of a solid-state imaging device of a planarized structure with reduced dark currents, allowing for high sensitivities over a wide wavelength band ranging from visible wavelengths to near-infrared wavelengths, and a fabrication method of the same.There are steps of having circuitry (30) formed on a substrate (10), forming a lower electrode layer (25) on the circuitry (30), patterning the lower electrode layer (25) to separate pixel-wise into a set of segments, forming a compound-semiconductor thin film of chalcopyrite structure (24) over a whole area of element regions, applying a resist layer (27) on the compound-semiconductor thin film (24) to pixel-wise pattern in accordance with the lower electrode layer (25) as a base separated into the set of segments, applying an ion doping over a whole area of element regions, forming element separating regions (34) in the compound-semiconductor thin film (24), removing the resist layer (27) for exposure of surfaces of a set of compound-semiconductor thin films (24) pixel-wise separated by the element separating regions (34), and forming a transparent electrode layer (26) in a planarizing manner over a whole area of element regions.
    • 提供具有减小的暗电流的平坦化结构的固态成像装置,其允许在从可见波长到近红外波长的宽波长带上的高灵敏度及其制造方法。 具有形成在基板(10)上的电路(30)的步骤,在电路(30)上形成下电极层(25),图案化下电极层(25),将其逐像分割成一组段 在元件区域的整个区域上形成黄铜矿结构(24)的化合物半导体薄膜,将化合物半导体薄膜(24)上的抗蚀剂层(27)根据下部电极施加到像素图案 层(25)作为分隔成该组段的基底,在元件区域的整个区域上施加离子掺杂,在化合物半导体薄膜(24)中形成元件分离区域(34),去除抗蚀剂层(27) ),用于曝光由元件分离区域(34)以像素方式隔开的一组化合物半导体薄膜(24)的表面,并且在元件区域的整个区域上以平坦化方式形成透明电极层(26) 。