专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08730465B2 Polarized light defect detection in pupil images 有权
标题翻译：瞳孔图像中的偏振光缺陷检测
公开(公告)号：US08730465B2
公开(公告)日：2014-05-20
申请号：US12314995
申请日：2008-12-19
申请人： Kazumasa Endo , Daisaku Mochida , Toru Yoshikawa , Hiromasa Shibata , Akitoshi Kawai
发明人： Kazumasa Endo , Daisaku Mochida , Toru Yoshikawa , Hiromasa Shibata , Akitoshi Kawai
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/21 , G03F7/70625
摘要： A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.
摘要翻译：缺陷检查装置检查具有在表面上形成的图案的样品的缺陷。缺陷检查装置设置有放置在其上的样品并且线性地移动和转动的台架; 光源; 照明光学系统，其从光源中选择任意波长区域，并通过偏振器和物镜对样品表面进行外照射; 检测光学系统，其通过经由物镜的表面通过照射光学系统施加的反射光和通过偏振器满足交叉尼可可斯条件的分析仪获得瞳孔图像; 以及检测部，其通过将获得的瞳孔图像与先前存储的瞳孔图像进行比较来检测样本的缺陷。可以在短时间内判断要检查的基板上的图案的一致性。

2. 发明授权

US08599370B2 Polarized light defect detection in pupil images 有权
公开(公告)号：US08599370B2
公开(公告)日：2013-12-03
申请号：US12314995
申请日：2008-12-19
申请人： Kazumasa Endo , Daisaku Mochida , Toru Yoshikawa , Hiromasa Shibata , Akitoshi Kawai
发明人： Kazumasa Endo , Daisaku Mochida , Toru Yoshikawa , Hiromasa Shibata , Akitoshi Kawai
IPC分类号： G01N21/88
摘要： A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.

3. 发明申请

US20090147247A1 Defect detecting apparatus and defect detecting method 有权
标题翻译：缺陷检测装置和缺陷检测方法
公开(公告)号：US20090147247A1
公开(公告)日：2009-06-11
申请号：US12314995
申请日：2008-12-19
申请人： Kazumasa Endo , Daisaku Mochida , Toru Yoshikawa , Hiromasa Shibata , Akitoshi Kawai
发明人： Kazumasa Endo , Daisaku Mochida , Toru Yoshikawa , Hiromasa Shibata , Akitoshi Kawai
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/21 , G03F7/70625
摘要： A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.
摘要翻译：缺陷检查装置检查具有在表面上形成的图案的样品的缺陷。缺陷检查装置设置有放置在其上的样品并且线性地移动和转动的台架; 光源; 照明光学系统，其从光源中选择任意波长区域，并通过偏振器和物镜对样品表面进行外照射; 检测光学系统，其通过经由物镜的表面通过照射光学系统施加的反射光和通过偏振器满足交叉尼可可斯条件的分析仪获得瞳孔图像; 以及检测部，其通过将获得的瞳孔图像与先前存储的瞳孔图像进行比较来检测样本的缺陷。可以在短时间内判断要检查的基板上的图案的一致性。

4. 发明授权

US6097573A Magnetic information recorder/reproducer 失效
标题翻译：磁信息记录器/再现器
公开(公告)号：US6097573A
公开(公告)日：2000-08-01
申请号：US105250
申请日：1998-06-26
申请人： Toru Yoshikawa , Yoshiyuki Yamaji
发明人： Toru Yoshikawa , Yoshiyuki Yamaji
IPC分类号： G03B17/24 , G11B15/62 , G11B15/60
CPC分类号： G11B15/62 , G03B17/24 , G03B2217/244
摘要： A magnetic information recorder/reproducer can reduce the possibility of breakage of parts and thus lessen the need for maintenance. A resilient member for pressing a magnetic medium against a magnetic head has a resilient, hard guide layer provided on one side thereof facing the magnetic medium. The guide layer prevents the magnetic medium from coming into contact with the resilient member. The resilient member is thus less like to be broken or worn because it does not contact the magnetic medium.
摘要翻译：磁信息记录器/再现器可以减少部件损坏的可能性，从而减少对维护的需要。用于将磁介质压在磁头上的弹性构件具有设置在面向磁介质的一侧上的弹性的硬引导层。引导层防止磁性介质与弹性构件接触。因此，弹性构件因为不接触磁性介质而更不像破损或磨损。

5. 发明申请

US20080205460A1 OPTICAL AMPLIFYING APPARATUS 有权
标题翻译：光学放大装置
公开(公告)号：US20080205460A1
公开(公告)日：2008-08-28
申请号：US12014514
申请日：2008-01-15
申请人： Takeo OKANIWA , Jie Wu , Nobuyuki Kagi , Toru Yoshikawa
发明人： Takeo OKANIWA , Jie Wu , Nobuyuki Kagi , Toru Yoshikawa
IPC分类号： H01S3/13
CPC分类号： H04B10/294 , H01S3/06754 , H01S3/09415 , H01S3/10015 , H01S3/10069 , H01S3/1301 , H01S3/1305 , H04B10/2931
摘要： The present invention provides an optical amplifying apparatus having: a CPU 11 for processing various signals; a plurality of circuits 17, 18 for controlling respective devices 4, 9 required for optical amplification; a first storing unit 14 for storing a program supplied from a user a gate array 12 for storing various parameters for controlling the devices 4, 9, the gate array being updated based on the program which is stored in the first storing unit 14 and sent via the CPU 11; a latch unit 13, provided between the gate array 12 and the circuits 17, 18, for interrupting a signal path from the gate array 12 to the circuits 17, 18 after receiving a starting signal of an update from the CPU 11 until the update being finished and for controlling the circuits 17, 18 based on the parameters stored in the gate array 12 before the signal path is interrupted; and a second storing unit 16 for, at least during the update, storing the various parameters which are stored in the gate array 12 before the update.
摘要翻译：本发明提供一种具有：用于处理各种信号的CPU 11的光放大装置; 用于控制光放大所需的各个装置4,9的多个电路17,18; 第一存储单元14，用于存储从用户提供的程序，用于存储用于控制设备4,9的各种参数的门阵列12，基于存储在第一存储单元14中的程序更新门阵列，并经由 CPU 11; 锁存单元13，设置在门阵列12和电路17,18之间，用于在接收到来自CPU 11的更新的起始信号直到更新为止之后中断从门阵列12到电路17,18的信号路径在信号路径被中断之前基于存储在门阵列12中的参数来完成并控制电路17,18; 以及第二存储单元16，用于至少在更新期间，存储在更新之前存储在门阵列12中的各种参数。

6. 发明申请

US20050072591A1 Sealing structure of terminal and sealing material therefor 审中-公开
标题翻译：端子密封结构及密封材料
公开(公告)号：US20050072591A1
公开(公告)日：2005-04-07
申请号：US10862062
申请日：2004-06-04
申请人： Tetsuo Hayase , Ichizo Sakamoto , Takeshi Nishida , Yuji Watanabe , Toru Yoshikawa
发明人： Tetsuo Hayase , Ichizo Sakamoto , Takeshi Nishida , Yuji Watanabe , Toru Yoshikawa
IPC分类号： C09K3/10 , H01H9/04 , H01H45/02 , H01H50/02 , H01H50/14 , C08L1/00
CPC分类号： H01H50/14 , H01H50/023 , H01H2050/025
摘要： The present invention intends to provide a sealing structure of a terminal that is low in a processing temperature for sealing, easy in sealing operation and high in the productivity. In the invention, the thermal expansion coefficient of a sealing material is made equivalent to or more than the linear expansion coefficient of a metallic sealing case block by adding inorganic filler to a liquid thermosetting polymer.
摘要翻译：本发明提供一种端子的密封结构，其密封处理温度低，密封操作容易，生产率高。在本发明中，通过向液态热固性聚合物中添加无机填料，使密封材料的热膨胀系数等于或大于金属密封壳体块的线膨胀系数。

7. 发明授权

US5979820A Film magazine 失效
标题翻译：电影杂志
公开(公告)号：US5979820A
公开(公告)日：1999-11-09
申请号：US122508
申请日：1998-07-24
申请人： Junji Yamada , Hiroshi Miyawaki , Toru Yoshikawa , Junichi Yamamoto
发明人： Junji Yamada , Hiroshi Miyawaki , Toru Yoshikawa , Junichi Yamamoto
IPC分类号： G03B27/58 , G03B27/62 , G03D15/10 , B65H18/14
CPC分类号： G03B27/588 , G03B27/6285 , G03D15/10
摘要： A film magazine includes a take-up mechanism for a take-up mechanism for taking up a film in the form of roll, with the film being releasable therefrom. The magazine further includes a support mechanism for supporting the film roll formed by the take-up mechanism in such a manner as to allow a rotational axis of the formed roll to be adjustable in position in accordance with variation in the outer diameter of the roll resulting from the take-up or unwinding operation of the film.
摘要翻译：薄膜盒包括用于卷取卷状的卷取机构的卷取机构，其中膜可从其中释放。该杂志还包括用于支撑由卷取机构形成的胶卷的支撑机构，使得可以根据辊的外径的变化使成型辊的旋转轴线在位置上调整，从而得到从电影的卷收或放卷操作。

8. 发明授权

US5856863A Method and apparatus for feeding film cartridges 失效
标题翻译：摄影胶片盒的方法和装置
公开(公告)号：US5856863A
公开(公告)日：1999-01-05
申请号：US877570
申请日：1997-06-17
申请人： Kouji Seki , Toru Yoshikawa
发明人： Kouji Seki , Toru Yoshikawa
IPC分类号： G03B27/32 , G03B27/62 , G03D15/00 , G03B27/52
CPC分类号： G03D15/005 , G03B27/6285
摘要： New type film cartridges are fed to a photoprint collecting station where photoprints are discharged from a photoprinting processor to improve work efficiency. The new type film cartridges are supplied into the photoprinting processor. After printing films therein, the cartridges are retrieved from the processor and fed to the print collecting station by a carrier connected to a discharge end of the processor. The film cartridges are collated at the print collecting station with the developed prints.
摘要翻译：新型胶片暗盒被馈送到照相打印收集站，其中从照相打印处理器排出照相印记，以提高工作效率。新型胶片盒被提供到照相打印处理器中。在其中印刷胶片之后，将盒从处理器中取回，并通过连接到处理器的放电端的载体馈送到打印收集站。胶卷盒在打印收集站处与已打印的打印件整理。

9. 发明授权

US4705266A Sheet convey device 失效
标题翻译：薄片输送装置
公开(公告)号：US4705266A
公开(公告)日：1987-11-10
申请号：US930790
申请日：1986-11-12
申请人： Tsutomu Sasage , Minoru Matsumoto , Toru Yoshikawa
发明人： Tsutomu Sasage , Minoru Matsumoto , Toru Yoshikawa
IPC分类号： B65H5/06 , B65H5/36 , B65H29/00 , B65H29/42 , G06K13/063 , B65H51/06
CPC分类号： B65H29/42 , B65H29/00 , G06K13/063 , B65H2301/321
摘要： A sheet convey device includes a plurality of feed rollers for conveying a sheet in a standing state, and guide plates for guiding the sheet to be conveyed. The device has helical rings, wound on two ends of the feed rollers in different winding directions, for guiding the sheet toward the central portions of the feed rollers.
摘要翻译：片材输送装置包括多个用于在竖立状态下输送片材的进给辊和用于引导被输送片材的引导板。该装置具有螺旋环，在不同卷绕方向上缠绕在进给辊的两端，用于将片材引导到进给辊的中心部分。

10. 发明申请

US20100245811A1 Inspecting apparatus and inspecting method 审中-公开
标题翻译：检查仪器和检查方法
公开(公告)号：US20100245811A1
公开(公告)日：2010-09-30
申请号：US12801339
申请日：2010-06-03
申请人： Toru Yoshikawa
发明人： Toru Yoshikawa
IPC分类号： G01N21/00
CPC分类号： G01B11/24 , G01N21/9501 , G01N21/95623
摘要： An inspecting apparatus (1) obtains a pixel from among pixels of a DMD element (31) for guiding light from a wafer (W) to detecting elements (36a, 36b, 36c), based on luminance information on Fourier image obtained by detection by a two-dimensional imaging element (33) when the inspecting apparatus is set to guide all the light from the wafer (W) to the two-dimensional imaging element (33) by having all the pixels (micro mirrors) of the DMD element (31) in the on-state. Then, the inspecting device brings the obtained pixel of the DMD element (31) into the off-state, reflects a part of the light from the wafer (W) by the pixel in the off-state and guides the light to the detecting elements (36a, 36b, 36c).
摘要翻译：检查装置（1）从DMD元件（31）的像素中获取用于将来自晶片（W）的光引导到检测元件（36a，36b，36c）的像素，基于通过检测获得的付里叶图像的亮度信息当检查装置被设置为通过具有DMD元件的所有像素（微镜）将来自晶片（W）的所有光引导到二维成像元件（33）时的二维成像元件（33） 31）在开状态。然后，检查装置将获得的DMD元件（31）的像素进入截止状态，将处于断开状态的像素的来自晶片（W）的一部分光反射，并将光引导到检测元件（36a，36b，36c）。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式