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    • 4. 发明授权
    • Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method
    • 处理对象输送装置,半导体制造装置及处理对象处理方法
    • US06190104B1
    • 2001-02-20
    • US09326673
    • 1999-06-07
    • Kazuhito IkedaShinichiro WatahikiHisashi YoshidaYukinori Aburatani
    • Kazuhito IkedaShinichiro WatahikiHisashi YoshidaYukinori Aburatani
    • B65G4907
    • H01L21/67742H01L21/67757Y10S414/139
    • A method and apparatus for conveying a treatment object whereby a drive unit for driving a treatment object conveyor robot is deployed inside a vacuum chamber. The robot comprises a conveyor arm and a drive unit. The conveyor arm is accommodated outside an airtight vessel and the drive unit is accommodated inside the airtight vessel to avoid damage to the drive unit. In order to raise and lower the robot inside the chamber, an elevator mechanism, deployed outside the chamber, advances and retracts a shaft that is inserted in an airtight manner into the chamber. The airtight structure is secured by O rings provided where a bellows surrounds the shaft and connects to the chamber and the elevator mechanism. The shaft, inserted inside the chamber, is linked to the airtight vessel that accommodates the drive unit of the robot. The airtight vessel communicates to the outside via a hollow portion in the shaft and the interior thereof is always kept at atmospheric pressure.
    • 一种用于输送处理物体的方法和装置,由此用于驱动处理物体输送机器人的驱动单元部署在真空室内。 机器人包括传送臂和驱动单元。 输送臂被容纳在密封容器的外部,并且驱动单元容纳在密封容器的内部,以避免损坏驱动单元。 为了升高和降低腔室内的机器人,布置在腔室外部的电梯机构使以气密方式插入腔室的轴前进和后退。 气密结构由设置在波纹管围绕轴并连接到腔室和升降机构的O形环固定。 插入室内的轴连接到容纳机器人的驱动单元的气密容器。 气密容器通过轴中的中空部分与外部连通,其内部总是保持在大气压力。