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1. 发明授权

US08822350B2 Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus 有权
标题翻译：半导体装置的制造方法，基板处理方法及基板处理装置
公开(公告)号：US08822350B2
公开(公告)日：2014-09-02
申请号：US13988441
申请日：2011-11-08
申请人： Kazuhiro Yuasa , Ryuji Yamamoto
发明人： Kazuhiro Yuasa , Ryuji Yamamoto
IPC分类号： H01L21/316 , H01L21/8242 , H01L21/31 , H01L27/108 , C23C16/40 , H01L21/02 , C23C16/452 , C23C16/455
CPC分类号： H01L21/02263 , C23C16/40 , C23C16/452 , C23C16/45534 , C23C16/45546 , H01L21/02164 , H01L21/02175 , H01L21/02181 , H01L21/02183 , H01L21/02186 , H01L21/02189 , H01L21/0228
摘要： An oxide film is formed, having a specific film thickness on a substrate by alternately repeating: forming a specific element-containing layer on the substrate by supplying a source gas containing a specific element, to the substrate housed in a processing chamber and heated to a first temperature; and changing the specific element-containing layer formed on the substrate, to an oxide layer by supplying a reactive species containing oxygen to the substrate heated to the first temperature in the processing chamber under a pressure of less than atmospheric pressure, the reactive species being generated by causing a reaction between an oxygen-containing gas and a hydrogen-containing gas in a pre-reaction chamber under a pressure of less than atmospheric pressure and heated to a second temperature higher than the first temperature.
摘要翻译：在衬底上形成具有特定膜厚度的氧化物膜，通过交替地重复以下步骤：通过将含有特定元素的源气体供给到容纳在处理室中的衬底并加热到第一温度并且通过在低于大气压的压力下向加工室中加热至第一温度的衬底提供含有氧的反应物质，将形成在衬底上的特定含有元素的层改变为氧化物层，产生反应性物质通过在小于大气压的压力下在预反应室中引起含氧气体和含氢气体之间的反应，并加热至高于第一温度的第二温度。

2. 发明申请

US20130280919A1 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：制造半导体器件的方法，基板处理方法和基板处理装置
公开(公告)号：US20130280919A1
公开(公告)日：2013-10-24
申请号：US13988441
申请日：2011-11-08
申请人： Kazuhiro Yuasa , Ryuji Yamamoto
发明人： Kazuhiro Yuasa , Ryuji Yamamoto
IPC分类号： H01L21/02
CPC分类号： H01L21/02263 , C23C16/40 , C23C16/452 , C23C16/45534 , C23C16/45546 , H01L21/02164 , H01L21/02175 , H01L21/02181 , H01L21/02183 , H01L21/02186 , H01L21/02189 , H01L21/0228
摘要： An oxide film is formed, having a specific film thickness on a substrate by alternately repeating: forming a specific element-containing layer on the substrate by supplying a source gas containing a specific element, to the substrate housed in a processing chamber and heated to a first temperature; and changing the specific element-containing layer formed on the substrate, to an oxide layer by supplying a reactive species containing oxygen to the substrate heated to the first temperature in the processing chamber under a pressure of less than atmospheric pressure, the reactive species being generated by causing a reaction between an oxygen-containing gas and a hydrogen-containing gas in a pre-reaction chamber under a pressure of less than atmospheric pressure and heated to a second temperature higher than the first temperature.
摘要翻译：在衬底上形成具有特定膜厚度的氧化物膜，通过交替地重复以下步骤：通过将含有特定元素的源气体供给到容纳在处理室中的衬底并加热到第一温度并且通过在低于大气压的压力下向加工室中加热至第一温度的衬底提供含有氧的反应物质，将形成在衬底上的特定含有元素的层改变为氧化物层，产生反应性物质通过在小于大气压的压力下在预反应室中引起含氧气体和含氢气体之间的反应，并加热至高于第一温度的第二温度。

3. 发明授权

US08448599B2 Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device 有权
标题翻译：用于处理衬底的器件，衬底的处理方法和制造半导体器件的方法
公开(公告)号：US08448599B2
公开(公告)日：2013-05-28
申请号：US13137023
申请日：2011-07-15
申请人： Kazuhiro Yuasa , Kazuhiro Kimura , Yasuhiro Megawa
发明人： Kazuhiro Yuasa , Kazuhiro Kimura , Yasuhiro Megawa
IPC分类号： C23C16/52 , C23C16/455 , C23C16/40
CPC分类号： H01L21/67253 , Y10S438/908 , Y10S438/913
摘要： Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate.
摘要翻译：提供了由于处理室内的压力不保持恒定而难以引起基板处理缺陷的基板处理装置和半导体装置的制造方法，能够更好地处理基板。

4. 发明授权

US07713883B2 Manufacturing method of a semiconductor device, and substrate processing apparatus 有权
标题翻译：半导体装置的制造方法以及基板处理装置
公开(公告)号：US07713883B2
公开(公告)日：2010-05-11
申请号：US11885869
申请日：2006-03-08
申请人： Kazuhiro Yuasa , Yasuhiro Megawa
发明人： Kazuhiro Yuasa , Yasuhiro Megawa
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/31662 , H01L21/0223 , H01L21/02238 , H01L21/02255
摘要： An object of this invention is to make it possible to suppress early-stage oxidation of a substrate surface prior to oxidation processing, and to remove a natural oxidation film. For this reason, a method is provided comprising the steps of loading a substrate into a processing chamber, supplying a hydrogen-containing gas and an oxygen-containing gas into the processing chamber, and subjecting a surface of the substrate to oxidation processing, and unloading the substrate subjected to oxidation processing from the processing chamber. In the oxidation processing step, the hydrogen-containing gas is introduced in advance into the processing chamber, with the pressure inside the processing chamber set at a pressure that is less than atmospheric pressure, and the oxygen-containing gas is then introduced in the state in which the introduction of the hydrogen-containing gas is continued.
摘要翻译：本发明的目的在于，可以抑制氧化处理前的基板表面的早期氧化，并且去除天然氧化膜。因此，提供了一种方法，其包括以下步骤：将基底装载到处理室中，将含氢气体和含氧气体供应到处理室中，以及对基板的表面进行氧化处理和卸载所述基板经受来自所述处理室的氧化处理。在氧化处理步骤中，将含氢气体预先引入处理室，处理室内的压力设定在小于大气压的压力，然后将该含氧气体导入该状态其中继续引入含氢气体。

5. 发明申请

US20090233452A1 PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：半导体器件和衬底加工设备的生产方法
公开(公告)号：US20090233452A1
公开(公告)日：2009-09-17
申请号：US12404003
申请日：2009-03-13
申请人： Takashi Ozaki , Kazuhiro Yuasa , Kiyohiko Maeda
发明人： Takashi Ozaki , Kazuhiro Yuasa , Kiyohiko Maeda
IPC分类号： H01L21/316 , B05C11/00
CPC分类号： H01L21/02238 , H01L21/0223 , H01L21/02255 , H01L21/31662 , H01L21/67109
摘要： Disclosed is a producing method of a semiconductor device produced by transferring a plurality of substrates into a processing chamber, supplying oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation, and transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which is in proximity to the inner wall of the processing chamber and which corresponds to a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber.
摘要翻译：公开了一种通过将多个基板转移到处理室中而制造的半导体器件的制造方法，向处理室供给含氧气体和含氢气体，以通过氧化处理多个基板，并且将多个基板氧化处理的基板从处理室出来，其中在氧化处理中，含氢气体从位于处理室的内壁附近并对应于基板的区域的多个位置供应其中所述多个基板布置在所述处理室中。

6. 发明授权

US5625440A Developing device having seals between a toner transport roller and the toner hopper which prevent toner leakage and scattering 失效
标题翻译：在调色剂输送辊和调色剂料斗之间具有防止调色剂泄漏和散射的密封件的显影装置
公开(公告)号：US5625440A
公开(公告)日：1997-04-29
申请号：US526101
申请日：1995-09-11
申请人： Iwao Matsumae , Kazuhiro Yuasa , Shuichi Endoh , Yoshiaki Tanaka , Hiroshi Hosokawa , Mugijiroh Uno , Hiroshi Saitoh , Eiji Takenaka , Toshihiro Sugiyama , Tetsuo Yamanaka , Eisaku Murakami , Satoru Komatsubara
发明人： Iwao Matsumae , Kazuhiro Yuasa , Shuichi Endoh , Yoshiaki Tanaka , Hiroshi Hosokawa , Mugijiroh Uno , Hiroshi Saitoh , Eiji Takenaka , Toshihiro Sugiyama , Tetsuo Yamanaka , Eisaku Murakami , Satoru Komatsubara
IPC分类号： G03G15/08
CPC分类号： G03G15/0898 , G03G15/0817
摘要： A developing device which includes a first toner transporting roller, a second toner transporting roller to which toner is transported from the first toner transporting roller and an image bearing member such as a photoconductive drum or belt. Seals are located between the circumferential ends of one of the toner transporting rollers and a bottom portion of a toner hopper. When the seals are between the bottom of toner hopper and the first toner transporting roller, the first toner transporting roller is longer than the second toner transporting roller and the circumferential portions of the first toner transporting roller which contact the seals do not contact the second toner transporting roller. Alternatively, when the seals are between the bottom of toner hopper and the second toner transporting roller, the second toner transporting roller is longer than the first toner transporting roller and the circumferential portions of the second toner transporting roller which contact the seals do not contact the first toner transporting roller. Additionally, when the seals contact the second toner transporting roller, side seals may be placed against the ends of the first toner transporting roller. In both of these arrangements, the length of the second toner transporting roller is shorter than a length of an effective area of a photoconductive layer on the image bearing member.
摘要翻译：一种显影装置，包括第一调色剂输送辊，第二调色剂输送辊，调色剂从第一调色剂输送辊输送到该第二调色剂输送辊和图像承载部件，例如感光鼓或带。密封件位于调色剂输送辊之一的周向端部和调色剂料斗的底部之间。当密封件位于调色剂料斗的底部和第一调色剂传送辊之间时，第一调色剂传送辊比第二调色剂传送辊长，并且与密封件接触的第一调色剂传送辊的圆周部分不接触第二调色剂运输辊。或者，当密封件位于调色剂料斗的底部和第二调色剂输送辊之间时，第二调色剂输送辊比第一调色剂输送辊长，并且与密封件接触的第二调色剂输送辊的圆周部分不接触第一调色剂输送辊。此外，当密封件接触第二调色剂传送辊时，可以将侧面密封件抵靠第一调色剂传送辊的端部放置。在这两种布置中，第二调色剂输送辊的长度短于图像承载部件上的光电导层的有效面积的长度。

7. 发明授权

US5552870A Developing device for an image forming apparatus 失效
标题翻译：用于图像形成装置的显影装置
公开(公告)号：US5552870A
公开(公告)日：1996-09-03
申请号：US365080
申请日：1994-12-28
申请人： Eisaku Murakami , Kazuhiro Yuasa , Shuichi Endoh , Iwao Matsumae , Yoshiaki Tanaka , Hiroshi Hosokawa , Mugijiroh Uno , Hiroshi Saitoh , Eiji Takenaka , Toshihiro Sugiyama , Tetsuo Yamanaka , Satoru Komatsubara
发明人： Eisaku Murakami , Kazuhiro Yuasa , Shuichi Endoh , Iwao Matsumae , Yoshiaki Tanaka , Hiroshi Hosokawa , Mugijiroh Uno , Hiroshi Saitoh , Eiji Takenaka , Toshihiro Sugiyama , Tetsuo Yamanaka , Satoru Komatsubara
IPC分类号： G03G15/08 , G03G15/06
CPC分类号： G03G15/0818
摘要： A developing device for an image forming apparatus and using a single component type developer, i.e., toner, has a developing roller, a doctor blade, and an elastic intermediae roller. The developing roller and intermediate roller contact each other and rotate in the same directions such that they move in opposite directions at the position where they contact each other. The developing roller is provide with a surface roughness of Rz 10 .mu.m or less in terms of ten-point mean value as prescribed by JIS (Japanese Industrial Standards) in order to deposit an adequate charge on toner.
摘要翻译：用于图像形成装置和使用单组分型显影剂即调色剂的显影装置具有显影辊，刮刀和弹性中间辊。显影辊和中间辊彼此接触并沿相同的方向旋转，使得它们在彼此接触的位置处以相反的方向移动。为了在调色剂上沉积足够的电荷，显影辊的表面粗糙度以JIS（日本工业标准）规定的十点平均值计为10微米以下。

8. 发明授权

US4567495A Record head cleaning device for image recording apparatus 失效
标题翻译：记录头清洁装置用于图像记录装置
公开(公告)号：US4567495A
公开(公告)日：1986-01-28
申请号：US477463
申请日：1983-03-21
申请人： Kazuhiro Yuasa , Kenya Komada
发明人： Kazuhiro Yuasa , Kenya Komada
IPC分类号： G03G15/32 , H04N1/032 , H04N1/30
CPC分类号： G03G15/321 , H04N1/032
摘要： A record head of an image recording apparatus is reciprocally tilted to suitably vary the contact condition between the surface of the record head and that of a recording medium, thereby removing toner particles which are momentarily stuck to the record head surface. To maintain styluses of the head unchanged in position, the reciprocation of the record head is effected for the interval between the end of a recording cycle for one page and the start of the next recording cycle for another page, which interval has no influence on the image recording operation.
摘要翻译：图像记录装置的记录头相互倾斜以适当地改变记录头的表面与记录介质的表面之间的接触状态，从而去除瞬时粘附到记录头表面的调色剂颗粒。为了保持头部的枪头不变，记录头的往复运动是在一页的记录周期结束与另一页的下一个记录周期的开始之间的间隔中进行的，该间隔对图像记录操作。

9. 发明授权

US4537491A Development apparatus for developing latent electrostatic images 失效
标题翻译：显影静电潜像显影装置
公开(公告)号：US4537491A
公开(公告)日：1985-08-27
申请号：US434005
申请日：1982-10-13
申请人： Kenya Komada , Kazuhiro Yuasa , Shiroh Kondoh
发明人： Kenya Komada , Kazuhiro Yuasa , Shiroh Kondoh
IPC分类号： G03G15/09
CPC分类号： G03G15/09
摘要： A development apparatus for developing latent electrostatic images to visible or transferable images of high quality for use in electrophotographic copying apparatus, electrostatic recording apparatus, facsimile apparatus or other recording apparatus, in which a development roller is in arc-contact with a latent-electrostatic-image-bearing flexible recording medium and is capable of supplying a sufficient amount of toner to the recording medium for development of the latent electrostatic images, without requiring any delicate adjustment of the gap between the development roller and the recording medium or of the gap between the development roller and a doctor blade for regulating the thickness of a toner layer on the development roller, and without increasing the rotary speed of the development roller to conventional speeds, and the doctor blade is also capable of performing charge injection to the toner with high efficiency, whereby images can be developed with high quality with a minimum deposition of toner on the background.
摘要翻译：一种显影装置，用于将静电潜像显影到用于电子照相复印装置，静电记录装置，传真装置或其它记录装置中的高质量可见或可转印图像，其中显影辊与潜伏静电图像电弧接触，图像承载的柔性记录介质，并且能够将足够量的调色剂供应到用于显影静电潜像的记录介质中，而不需要对显影辊和记录介质之间的间隙进行微妙的调节，显影辊和刮刀，用于调节显影辊上的调色剂层的厚度，并且不将显影辊的转速提高到常规速度，并且刮刀还能够以高效率对调色剂进行电荷注入，从而可以以最小的质量开发图像调色剂沉积在背景上。

10. 发明授权

US4483611A Magnetic cleaning device 失效
标题翻译：磁性清洁装置
公开(公告)号：US4483611A
公开(公告)日：1984-11-20
申请号：US459347
申请日：1983-01-20
申请人： Yozo Matsuura , Kazuhiro Yuasa
发明人： Yozo Matsuura , Kazuhiro Yuasa
IPC分类号： G03G21/00
CPC分类号： G03G21/0047 , G03G2221/0005
摘要： A magnetic cleaning device for cleaning a surface to be cleaned by removing magnetic particles therefrom includes a rotatable sleeve of a nonmagnetic material on the outer peripheral surface of which is planted a plurality of fibers to form a fur brush, a plurality of magnets disposed inside of and along the inner peripheral surface of the sleeve, a rotatable magnetic roll disposed adjacent to the sleeve for having the magnetic particles transferred from the sleeve to the roll, and a collection unit including a scraper to scrape the transferred particles off the roll.
摘要翻译：一种用于通过去除磁性颗粒来清洁待清洁表面的磁性清洁装置，包括：非磁性材料的可旋转套筒，其外周表面上装有多根纤维，以形成毛刷;多个磁体设置在并且沿着所述套筒的内周面，设置有与所述套筒相邻的可旋转的磁辊，用于使所述磁性颗粒从所述套筒转移到所述辊上;以及收集单元，其包括用于将所转移的颗粒从所述辊上刮除的刮刀。

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