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1. 发明申请

US20080087631A1 Ion gun, ion beam etching apparatus, ion beam etching facility, etching method, and method for manufacturing magnetic recording medium 审中-公开
标题翻译：离子枪，离子束蚀刻装置，离子束蚀刻装置，蚀刻方法以及制造磁记录介质的方法
公开(公告)号：US20080087631A1
公开(公告)日：2008-04-17
申请号：US11907269
申请日：2007-10-10
申请人： Kazuhiro Hattori , Kazuya Shimakawa , Mitsuru Takai
发明人： Kazuhiro Hattori , Kazuya Shimakawa , Mitsuru Takai
IPC分类号： H01J27/02 , B44C1/22
CPC分类号： H01J27/024 , H01J37/08 , H01J37/3053 , H01J2237/24528
摘要： A compact ion gun capable of flattening both sides of a substrate, an ion beam etching apparatus provided with the ion gun, an ion beam etching facility, an etching method using them, and a method for manufacturing a magnetic recording medium are provided. The ion gun includes a plasma generation source and an extraction electrode unit. The extraction electrode unit has: a first electrode unit including a portion of a plurality of electrode plates on a first side of a reference plane intersecting the electrode plates, the portion being inclined with respect to the reference plane so as to face an irradiation target area along the reference plane; and a second electrode unit including a portion of the electrode plates on a second side of the reference plane, the portion being inclined with respect to the reference plane so as to face the irradiation target area along the reference plane.
摘要翻译：提供能够使基板的两面变平的紧凑型离子枪，设置有离子枪的离子束蚀刻装置，离子束蚀刻装置，使用它们的蚀刻方法和制造磁记录介质的方法。离子枪包括等离子体产生源和引出电极单元。提取电极单元具有：第一电极单元，其包括在与电极板相交的参考平面的第一侧上的多个电极板的一部分，该部分相对于参考平面倾斜以面对照射目标区域沿着参考平面; 以及第二电极单元，其包括在所述参考平面的第二侧上的所述电极板的一部分，所述部分相对于所述参考平面倾斜，以便沿着所述参考平面面对所述照射目标区域。

2. 发明授权

US07811077B2 Stamper, imprinting method, and method of manufacturing an information recording medium 失效
标题翻译：压模，压印方法和信息记录介质的制造方法
公开(公告)号：US07811077B2
公开(公告)日：2010-10-12
申请号：US11536846
申请日：2006-09-29
申请人： Kazuhiro Hattori , Kazuya Shimakawa
发明人： Kazuhiro Hattori , Kazuya Shimakawa
IPC分类号： B29C59/00 , B29D17/00
CPC分类号： B29C59/022 , B29C2059/023 , B29L2017/005 , G11B5/855 , G11B7/263 , Y10S425/81
摘要： There is provided a stamper on which stamper-side concave/convex patterns are formed and which is capable of manufacturing an information recording medium on which at least servo patterns are formed by concave/convex patterns. First convex parts that are continuously formed along a direction corresponding to a radial direction of the information recording medium are formed in the stamper-side concave/convex patterns. Each of the first convex parts is formed so that a height of a part of the first convex part from a reference plane, which is set between a front surface and a rear surface of the stamper, to protruding end of the first convex part increases as a length of the part of the first convex part in a direction corresponding to a circumferential direction of the information recording medium increases.
摘要翻译：提供了一种压模，其上形成有压模侧凹凸图案，并且能够制造至少通过凹凸图案形成伺服图案的信息记录介质。沿着与信息记录介质的径向对应的方向连续形成的第一凸部形成在压模侧凹凸图案中。每个第一凸部形成为使得第一凸部的从设置在压模的前表面和后表面之间的参考平面的一部分的高度到第一凸部的突出端的高度随着第一凸部的与信息记录介质的圆周方向对应的方向的一部分的长度增加。

3. 发明申请

US20060098343A1 Magnetic recording medium and magnetic recording and reproduction apparatus 失效
标题翻译：磁记录介质和磁记录和再现设备
公开(公告)号：US20060098343A1
公开(公告)日：2006-05-11
申请号：US11220542
申请日：2005-09-08
申请人： Kazuhiro Hattori , Kazuya Shimakawa
发明人： Kazuhiro Hattori , Kazuya Shimakawa
IPC分类号： G11B5/82
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/667 , G11B5/732 , G11B5/7325 , G11B5/743 , G11B5/855
摘要： A magnetic recording medium is provided, which includes a recording layer formed in a concavo-convex pattern to achieve high areal density and can ensure good recording and reproduction characteristics so as to provide high reliability. The magnetic recording medium has a substrate and a recording layer formed in the predetermined concavo-convex pattern over the substrate. The recording layer has a non-recording element and recording elements. The non-recording element is formed as convex portion of the concavo-convex pattern at an outer circumferential end and/or an inner circumferential end. The recording elements are formed as convex portions of the concavo-convex pattern in a region other than a region where the non-recording element is arranged. The magnetic recording medium further has a non-magnetic material with which concave portions of the concavo-convex pattern are filled and which covers the non-recording element, and a protective layer formed over the recording layer and the non-magnetic material.
摘要翻译：提供了一种磁记录介质，其包括形成为凹凸图案的记录层以实现高面密度并且可以确保良好的记录和再现特性，从而提供高可靠性。磁记录介质具有在衬底上形成为预定凹凸图案的衬底和记录层。记录层具有非记录元件和记录元件。非记录元件在外周端和/或内周端形成凹凸图案的凸部。记录元件在非记录元件布置的区域以外的区域中形成为凹凸图案的凸部。磁记录介质还具有非磁性材料，凹凸图案的凹部被填充并覆盖非记录元件，以及形成在记录层和非磁性材料上的保护层。

4. 发明授权

US07385785B2 Magnetic recording medium and magnetic recording and reproduction apparatus 失效
标题翻译：磁记录介质和磁记录和再现设备
公开(公告)号：US07385785B2
公开(公告)日：2008-06-10
申请号：US11220542
申请日：2005-09-08
申请人： Kazuhiro Hattori , Kazuya Shimakawa
发明人： Kazuhiro Hattori , Kazuya Shimakawa
IPC分类号： G11B5/82
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/667 , G11B5/732 , G11B5/7325 , G11B5/743 , G11B5/855
摘要： A magnetic recording medium is provided, which includes a recording layer formed in a concavo-convex pattern to achieve high areal density and can ensure good recording and reproduction characteristics so as to provide high reliability. The magnetic recording medium has a substrate and a recording layer formed in the predetermined concavo-convex pattern over the substrate. The recording layer has a non-recording element and recording elements. The non-recording element is formed as convex portion of the concavo-convex pattern at an outer circumferential end and/or an inner circumferential end. The recording elements are formed as convex portions of the concavo-convex pattern in a region other than a region where the non-recording element is arranged. The magnetic recording medium further has a non-magnetic material with which concave portions of the concavo-convex pattern are filled and which covers the non-recording element, and a protective layer formed over the recording layer and the non-magnetic material.
摘要翻译：提供了一种磁记录介质，其包括形成为凹凸图案的记录层以实现高面密度并且可以确保良好的记录和再现特性，从而提供高可靠性。磁记录介质具有在衬底上形成为预定凹凸图案的衬底和记录层。记录层具有非记录元件和记录元件。非记录元件在外周端和/或内周端形成凹凸图案的凸部。记录元件在非记录元件布置的区域以外的区域中形成为凹凸图案的凸部。磁记录介质还具有非磁性材料，凹凸图案的凹部被填充并且覆盖非记录元件，以及形成在记录层和非磁性材料上的保护层。

5. 发明授权

US07352529B2 Magnetic recording medium and magnetic recording and reproducing device using a magnetic recording layer formed with a predetermined concavo-convex pattern 失效
标题翻译：磁记录介质和使用以预定的凹凸图案形成的磁记录层的磁记录和再现装置
公开(公告)号：US07352529B2
公开(公告)日：2008-04-01
申请号：US11061503
申请日：2005-02-22
申请人： Mikiharu Hibi , Kazuhiro Hattori , Kazuya Shimakawa
发明人： Mikiharu Hibi , Kazuhiro Hattori , Kazuya Shimakawa
IPC分类号： G11B5/82 , G11B5/64
CPC分类号： G11B5/855
摘要： A magnetic recording medium including at least a disk substrate 1A, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1A, and a non-magnetic layer 6 filled into concave portions of the concavo-convex pattern, so as to have data track regions 20 and servo pattern regions 21. Due to the existence of concaves and convexes in the surface of each servo pattern region 21, the foregoing problem is solved. On this occasion, arithmetical mean deviation of the assessed profile Ra of the surface of each servo pattern region 21 is preferably not lower than 0.3 nm. The difference in surface level between each concave and each convex existing in the surface of the servo pattern region 21 is preferably not larger than 6 nm.
摘要翻译：一种磁记录介质，至少包括盘基片1A，在盘基片1A上形成预定的凹凸图形的磁记录层5和填充在凹凸图案的凹部中的非磁性层6 ，以便具有数据轨道区域20和伺服模式区域21。由于在每个伺服图案区域21的表面中存在凹凸，所以解决了上述问题。在这种情况下，每个伺服图案区域21的表面的评估轮廓Ra的算术平均偏差优选地不低于0.3nm。存在于伺服图案区域21的表面中的每个凹部和每个凸起之间的表面水平差异优选不大于6nm。

6. 发明授权

US07225528B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , H01R31/00
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

7. 发明申请

US20070059562A1 Magnetic recording medium 审中-公开
标题翻译：磁记录介质
公开(公告)号：US20070059562A1
公开(公告)日：2007-03-15
申请号：US11600725
申请日：2006-11-17
申请人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
发明人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
IPC分类号： G11B5/65
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/74 , G11B5/743 , G11B5/851 , G11B11/10582
摘要： A magnetic recording medium which is prevented from deterioration of the partitioned recording elements is provided. A magnetic recording medium has partitioned recording elements, a non-magnetic body filled in grooves between the partitioned recording elements, and a barrier film formed between the partitioned recording elements and the non-magnetic body.
摘要翻译：提供防止划分的记录元件劣化的磁记录介质。磁记录介质具有划分的记录元件，填充在分隔的记录元件之间的凹槽中的非磁性体以及形成在分隔的记录元件和非磁性体之间的阻挡膜。

8. 发明申请

US20060115584A1 Production process and production system of magnetic recording medium 审中-公开
标题翻译：磁记录介质的生产过程和生产系统
公开(公告)号：US20060115584A1
公开(公告)日：2006-06-01
申请号：US10544895
申请日：2004-08-03
申请人： Kazuhiro Hattori , Mitsuru Takai
发明人： Kazuhiro Hattori , Mitsuru Takai
IPC分类号： B05D5/12 , G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method and a manufacturing apparatus of a magnetic recording medium are provided, which can efficiently manufacture a magnetic recording medium having good magnetic characteristics while suppressing warpage of the medium, magnetic degradation of divided recording elements, and misalignment of the processed shape of the divided recording elements. In the manufacturing method and the manufacturing apparatus, both surfaces of an object to be processed 10 are simultaneously processed. As a dry etching technique for a continuous recording layer 20, ion beam etching is employed. A resist layer 26 is removed before dry etching of the continuous recording layer 20.
摘要翻译：提供一种磁记录介质的制造方法和制造装置，其能够有效地制造具有良好磁特性的磁记录介质，同时抑制介质的翘曲，划分的记录元件的磁性劣化，以及分割的记录元件的加工形状的未对准录音元素在制造方法和制造装置中，同时处理被处理物体10的两面。作为连续记录层20的干蚀刻技术，采用离子束蚀刻。在连续记录层20的干蚀刻之前去除抗蚀剂层26。

9. 发明申请

US20050284842A1 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效
标题翻译：干蚀刻方法，制造磁记录介质的方法和磁记录介质
公开(公告)号：US20050284842A1
公开(公告)日：2005-12-29
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , C23F4/00 , G11B5/65 , G11B5/73 , G11B5/74 , G11B5/82 , G11B5/855
CPC分类号： B82Y10/00 , C23F4/00 , G11B5/732 , G11B5/7325 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译：在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。主掩模层主要由碳制成。在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

10. 发明申请

US20050089725A1 Substrate for magnetic recording medium, magnetic recording medium, and method of manufacturing the same 审中-公开
标题翻译：磁记录介质用基板，磁记录介质及其制造方法
公开(公告)号：US20050089725A1
公开(公告)日：2005-04-28
申请号：US10932139
申请日：2004-09-02
申请人： Mitsuru Takai , Kazuhiro Hattori
发明人： Mitsuru Takai , Kazuhiro Hattori
IPC分类号： C03C15/00 , C03C17/00 , C03C17/09 , C03C17/22 , C03C17/34 , G11B5/73 , G11B5/84 , G11B5/64 , B05D5/12 , B32B1/00
CPC分类号： G11B5/7315 , C03C15/00 , C03C17/002 , C03C17/09 , C03C17/22 , C03C17/34 , C03C2204/08 , G11B5/82 , G11B5/8404 , Y10T428/265
摘要： A substrate for a magnetic recording medium with a small surface roughness at a low cost, a magnetic recording medium including the substrate for the magnetic recording medium, and a method of manufacturing the same are provided. The substrate for a magnetic recording medium includes a main substrate one face of which serves as a base surface, and a sub-substrate formed on the base surface of the main substrate by a deposition technique such as a bias sputtering method which applies a bias power thereon. In this configuration, a surface roughness of the sub-substrate is smaller than a surface roughness of the base surface of the main substrate.
摘要翻译：提供了一种用于低成本地具有小表面粗糙度的磁记录介质的基板，包括用于磁记录介质的基板的磁记录介质及其制造方法。用于磁记录介质的基片包括其一面用作基面的主基片和通过诸如偏压溅射法的沉积技术形成在主基片的基面上的副基片，上。在该结构中，副基板的表面粗糙度小于主基板的基面的表面粗糙度。

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