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    • 4. 发明申请
    • MICROSCOPE
    • 显微镜
    • US20090161209A1
    • 2009-06-25
    • US12343208
    • 2008-12-23
    • Kazuhiro HAYASHIMinoru SukekawaTakayuki Kono
    • Kazuhiro HAYASHIMinoru SukekawaTakayuki Kono
    • G02B21/06
    • G02B21/14G01J1/04G01J1/0411G01J1/0414G01J1/0444G01J1/0462G01J1/08G02B26/007
    • Provided are an illuminating optical system which illuminates a sample, an illumination-side pupil modulating device which is arranged on a side of the illuminating optical system, an illumination-side turret which holds the illumination-side pupil modulating device, an illumination-side-turret revolving mechanism which revolves the illumination-side turret to move the illumination-side pupil modulating device along an orbital circumference on a plane perpendicular to an optical axis, a relaying optical system which relays a pupil of an objective lens; an imaging-side pupil modulating device which is arranged on a side of the relaying optical system, an imaging-side turret which holds the imaging-side pupil modulating device, and an imaging-side-turret revolving mechanism which revolves the imaging-side turret to move the imaging-side pupil modulating device along the orbital circumference on a plane perpendicular to the optical axis.
    • 本发明提供一种照射样品的照明光学系统,配置在照明光学系统一侧的照明侧光瞳调制装置,保持照明侧光瞳调制装置的照明侧转塔,照明侧光瞳调制装置, 转台旋转机构,其使照明侧转台沿着与光轴垂直的平面上的轨道圆周移动照明侧光瞳调制装置,中继光学系统,其中继物镜的光瞳; 配置在中继光学系统的一侧的成像侧光瞳调制装置,保持摄像侧光瞳调制装置的成像侧转塔和成像侧转盘旋转的成像侧转塔旋转机构 以沿垂直于光轴的平面上的轨道圆周移动成像侧光瞳调制装置。
    • 5. 发明申请
    • ILLUMINATION OPTICAL SYSTEM FOR MICROSCOPE, AND MICROSCOPE
    • 用于微阵列和微阵列的照明光学系统
    • US20100182680A1
    • 2010-07-22
    • US12687296
    • 2010-01-14
    • Kazuhiro HAYASHI
    • Kazuhiro HAYASHI
    • G02B21/06
    • G02B21/06G02B13/22
    • An illumination optical system includes, in order from a light source side a collector lens, a field stop, a field lens having positive power, an aperture stop, and a collective lens having positive power. The illumination optical system is a substantially both-side telecentric optical system between the field stop and a sample surface, and satisfies the following conditional expressions where DFS indicates a diameter of the field stop, β indicates a magnification from the sample surface to the field stop, and NA indicates a numerical aperture on the sample surface side of the illumination optical system. 15≧DFS/β≧9   (1) 0.85≧NA≧0.5   (2)
    • 照明光学系统从光源侧依次包括集光透镜,场阻,具有正光焦度的场透镜,孔径光阑和具有正光焦度的集体透镜。 照明光学系统是在场停止和样品表面之间的基本上两侧的远心光学系统,并且满足以下条件表达式,其中DFS表示场停止的直径&bgr; 表示从样品表面到场停止的放大率,NA表示照明光学系统的样品表面侧的数值孔径。 15≥DFS/&bgr;≥9(1)0.85≥NA≥0.5(2)
    • 7. 发明申请
    • EXPOSURE DEVICE AND IMAGE FORMING APPARATUS
    • 曝光装置和图像形成装置
    • US20100259592A1
    • 2010-10-14
    • US12614799
    • 2009-11-09
    • Jiro MINABEKatsunori KAWANOKazuhiro HAYASHIYasuhiro OGASAWARAShin YASUDA
    • Jiro MINABEKatsunori KAWANOKazuhiro HAYASHIYasuhiro OGASAWARAShin YASUDA
    • B41J2/435
    • G03G15/326G02B5/1885G02B5/32G03G15/04045G03H1/04G03H2001/0434G03H2001/0439G03H2250/37G03H2260/34
    • There is provided an exposure device including: a light-emitting element array having an elongated support and plural light-emitting elements, the light-emitting elements being arranged in at least one row along a length direction of the support such that a spacing between two adjacent light-emitting elements is a pre-specified first spacing; and a hologram element array having a hologram recording layer disposed on the support and plural hologram elements formed, the plural hologram elements corresponding with each of the light-emitting elements and being formed such that a spacing along the support length direction between two adjacent hologram elements is the first spacing, and a diameter in the support length direction of each of the plural hologram elements being larger than the first spacing, such that a respective light emitted from each of the light-emitting elements is diffracted and focused toward a pre-specified image-forming plane by the corresponding hologram element.
    • 提供了一种曝光装置,包括:发光元件阵列,其具有细长的支撑件和多个发光元件,所述发光元件沿着支撑件的长度方向布置在至少一排中,使得两个 相邻的发光元件是预先指定的第一间隔; 以及全息元件阵列,其具有设置在支撑体上的全息图记录层和形成的多个全息元件,所述多个全息元件对应于每个发光元件并且形成为使得沿两个相邻全息元件之间的支撑长度方向的间隔 是第一间隔,并且多个全息元件中的每一个的支撑长度方向上的直径大于第一间隔,使得从每个发光元件发射的各个光被衍射并聚焦到预先指定的 成像平面由相应的全息元件。