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    • 5. 发明授权
    • Semiconductor device and method for producing same
    • 半导体装置及其制造方法
    • US08471267B2
    • 2013-06-25
    • US13129825
    • 2010-08-26
    • Masashi HayashiKoichi HashimotoKazuhiro Adachi
    • Masashi HayashiKoichi HashimotoKazuhiro Adachi
    • H01L29/12H01L21/31
    • H01L29/66068H01L21/045H01L29/0619H01L29/1608H01L29/7811H01L2924/0002H01L2924/00
    • A semiconductor device of the present invention has a semiconductor element region 17 that is provided in part of a silicon carbide layer 3 and a guard-ring region 18 that is provided in another part of the silicon carbide layer 3 surrounding the semiconductor element region 17 when seen in a direction perpendicular to a principal surface of the silicon carbide layer 3. The semiconductor device includes: an interlayer insulation film 10 which is provided on the principal surface of the silicon carbide layer 3 in the semiconductor element region 17 and the guard-ring region 18, the interlayer insulation film 10 having a relative dielectric constant of 20 or more; a first protective insulation film 14 provided on the interlayer insulation film in the guard-ring region 18; and a second protective insulation film 15 provided on the first protective insulation film 14, wherein the first protective insulation film 14 has a linear expansion coefficient which is between a linear expansion coefficient of a material of the second protective insulation film 15 and a linear expansion coefficient of a material of the interlayer insulation film 10.
    • 本发明的半导体器件具有半导体元件区域17,该半导体元件区域17设置在碳化硅层3的一部分和保护环区域18之间,该保护环区域设置在围绕半导体元件区域17的碳化硅层3的另一部分中, 在与碳化硅层3的主表面垂直的方向上观察。半导体器件包括:层间绝缘膜10,其设置在半导体元件区域17中的碳化硅层3的主表面上,保护环 区域18,相对介电常数为20以上的层间绝缘膜10; 设置在保护环区域18中的层间绝缘膜上的第一保护绝缘膜14; 以及设置在第一保护绝缘膜14上的第二保护绝缘膜15,其中第一保护绝缘膜14具有在第二保护绝缘膜15的材料的线膨胀系数与线膨胀系数之间的线性膨胀系数 的层间绝缘膜10的材料。
    • 7. 发明申请
    • SEMICONDUCTOR ELEMENT, SEMICONDUCTOR DEVICE, AND ELECTRIC POWER CONVERTER
    • 半导体元件,半导体器件和电力转换器
    • US20120139623A1
    • 2012-06-07
    • US13389555
    • 2010-08-09
    • Koichi HashimotoKazuhiro AdachiOsamu KusumotoMasao UchidaShun Kazama
    • Koichi HashimotoKazuhiro AdachiOsamu KusumotoMasao UchidaShun Kazama
    • G05F3/02H01L29/78
    • H01L29/7828H01L29/1608H01L29/66068H01L29/78H01L29/7838H02M7/5387Y02B70/1483
    • A semiconductor element 100 including an MISFET according to the present invention is characterized by having diode characteristics in a reverse direction through an epitaxial channel layer 50. The semiconductor element 100 includes a semiconductor layer 20 of a first conductivity type, a body region 30 of a second conductivity type, source and drain regions 40 and 75 of the first conductivity type, an epitaxial channel layer 50 in contact with the body region, source and drain electrodes 45 and 70, a gate insulating film 60, and a gate electrode 65. If the voltage applied to the gate electrode of the MISFET is smaller than a threshold voltage, the semiconductor element 100 functions as a diode in which current flows from the source electrode 45 to the drain electrode 70 through the epitaxial channel layer 50. The absolute value of the turn-on voltage of this diode is smaller than that of the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.
    • 包括根据本发明的MISFET的半导体元件100的特征在于通过外延沟道层50在相反方向上具有二极管特性。半导体元件100包括第一导电类型的半导体层20,第一导电类型的体区30 第二导电类型,第一导电类型的源极和漏极区域40和75,与主体区域接触的外延沟道层50,源极和漏极电极45和70,栅极绝缘膜60和栅电极65.如果 施加到MISFET的栅电极的电压小于阈值电压,半导体元件100用作二极管,其中电流通过外延沟道层50从源电极45流到漏极70。绝对值 该二极管的导通电压小于由体区和第一硅碳化物形成的体二极管的导通电压的导通电压 e半导体层。
    • 10. 发明授权
    • Semiconductor element, semiconductor device, and power converter
    • 半导体元件,半导体器件和功率转换器
    • US08410489B2
    • 2013-04-02
    • US13266271
    • 2010-04-28
    • Kazuhiro AdachiOsamu KusumotoMasao UchidaKoichi HashimotoShun Kazama
    • Kazuhiro AdachiOsamu KusumotoMasao UchidaKoichi HashimotoShun Kazama
    • H01L29/24
    • H01L29/1608H01L29/45H01L29/66068H01L29/7805H01L29/7827H01L29/7828H03K17/145
    • A semiconductor element 100 including an MISFET according to the present invention is characterized by having diode characteristics in a reverse direction through an epitaxial channel layer 50. The semiconductor element 100 includes a silicon carbide semiconductor substrate 10 of a first conductivity type, a semiconductor layer 20 of the first conductivity type, a body region 30 of a second conductivity type, a source region 40 of the first conductivity type, an epitaxial channel layer 50 in contact with the body region, a source electrode 45, a gate insulating film 60, a gate electrode 65 and a drain electrode 70. If the voltage applied to the gate electrode of the MISFET is smaller than a threshold voltage, the semiconductor element 100 functions as a diode in which current flows from the source electrode 45 to the drain electrode 70 through the epitaxial channel layer 50. The absolute value of the turn-on voltage of this diode is smaller than that of the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.
    • 包括根据本发明的MISFET的半导体元件100的特征在于通过外延沟道层50在相反方向上具有二极管特性。半导体元件100包括第一导电类型的碳化硅半导体衬底10,半导体层20 第一导电类型的体区30,第一导电类型的源极区40,与体区接触的外延沟道层50,源电极45,栅极绝缘膜60, 栅电极65和漏电极70.如果施加到MISFET的栅电极的电压小于阈值电压,则半导体元件100用作二极管,其中电流从源电极45流到漏电极70通过 外延沟道层50.该二极管的导通电压的绝对值小于体二的导通电压的绝对值 由所述体区和所述第一碳化硅半导体层形成。