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    • 3. 发明申请
    • Two-Layered Copper-Clad Laminate Material, and Method for Producing Same
    • 两层铜包覆层压材料及其制造方法
    • US20140011047A1
    • 2014-01-09
    • US13983786
    • 2012-01-25
    • Hajime InazumiKazuhiko SakaguchiShinichi Sasaki
    • Hajime InazumiKazuhiko SakaguchiShinichi Sasaki
    • H05K1/03C25D7/00C23C14/20
    • H05K1/0346C23C14/022C23C14/025C23C14/20C23C14/205C23C28/00C25D7/00Y10T428/12569Y10T428/24975
    • A two-layered copper-clad laminate material, in which one surface or both surfaces of a polyimide film having a thickness of 12.5 to 50 μm is subjected to a modification treatment by means of a glow discharge plasma treatment in an oxygen gas atmosphere, and a copper layer having a thickness of 1 to 5 μm is formed by means of sputtering or electroplating on one surface or both surfaces of the polyimide film after the modification treatment; characterized in that the integrated intensity ratio of a C1S peak at 287 to 290 eV to a C1S peak at 283 to 287 eV, obtained by analyzing the photoelectron spectroscopy (XPS) spectra of the surface of the polyimide film after the plasma treatment, is within the range of 0.03 to 0.11. The present invention aims at discovering; as a consequence of performing surface characterization by subjecting the PI film surface to XPS analysis before and after the plasma treatment, and of evaluating the dissolution properties and adhesive strength of the PI film before and after the plasma treatment; a two-layered copper-clad laminate material that is ideal to be processed during a wet PI etching step, and a production method for said two-layered copper-clad laminate material.
    • 通过在氧气气氛中的辉光放电等离子体处理对厚度为12.5〜50μm的聚酰亚胺膜的一面或两面进行改性处理的双层覆铜层叠材料, 在改性处理之后,通过溅射或电镀在聚酰亚胺膜的一个表面或两个表面上形成厚度为1至5μm的铜层; 其特征在于,通过分析等离子体处理后聚酰亚胺膜表面的光电子能谱(XPS)光谱获得的287〜290eV的C1S峰与283〜287eV的C1S峰的积分强度比在 范围为0.03〜0.11。 本发明旨在发现; 作为通过在等离子体处理之前和之后对PI膜表面进行XPS分析并且评估PI膜在等离子体处理之前和之后的溶解性能和粘合强度进行表面表征的结果的结果。 在湿式PI蚀刻步骤中理想的加工的双层覆铜层压材料以及所述两层覆铜层压材料的制造方法。
    • 5. 发明申请
    • METHOD OF FORMING CIRCUIT ON FLEXIBLE LAMINATE SUBSTRATE
    • 在柔性层压基板上形成电路的方法
    • US20130001186A1
    • 2013-01-03
    • US13577493
    • 2011-02-04
    • Kazuhiko SakaguchiHajime Inazumi
    • Kazuhiko SakaguchiHajime Inazumi
    • H05K3/06
    • H05K3/062C23F1/02C23F1/14C23F1/18C23F1/26C23F1/44H05K1/0393H05K3/381H05K3/388H05K2201/0154H05K2203/095
    • Disclosed is a method of forming a circuit on a flexible laminate substrate. When forming a circuit using an adhesiveless flexible laminate which includes a polyimide film as the flexible laminate substrate in which at least one surface thereof is subject to plasma treatment, a tie-coat layer A formed on the polyimide film, a metal conductor layer B formed on the tie-coat layer, and a layer C which has the same components as the tie-coat layer that was formed on the metal conductor layer, the following method is used. The photoresist is coated on the layer C which has the same components as the tie-coat layer that was formed on the metal conductor layer, the photoresist is exposed and developed, the layer C other than the circuit forming parts thereof is selectively removed in advance via pre-etching, the conductor layer B is thereafter removed by supplemental etching with leaving the circuit portion, and the photoresist of the circuit portion is further removed so as to form the circuit. By forming a tie-coat layer or a metal or alloy that is equivalent to the tie-coat layer on the metal conductor layer of the adhesiveless flexible laminate, simultaneously achieved are the inhibition of side etching, which interferes with the achievement of finer pitches of circuit wiring, and the improvement of linearity of the wiring.
    • 公开了一种在柔性层压基板上形成电路的方法。 当使用包括聚酰亚胺膜作为其至少一个表面进行等离子体处理的柔性层压基板的无粘合剂柔性层压体形成电路时,形成在聚酰亚胺膜上的粘结层A,形成的金属导体层B 在连接层上形成的层C和与金属导体层上形成的结合层相同的层C,使用以下方法。 光致抗蚀剂被涂覆在具有与形成在金属导体层上的结合层相同成分的层C上,光致抗蚀剂被曝光和显影,除了其电路形成部分之外的层C被预先选择性地去除 通过预蚀刻,然后通过补充蚀刻除去导体层B,留下电路部分,并且进一步去除电路部分的光致抗蚀剂以形成电路。 通过形成与无粘合剂柔性层压体的金属导体层上的粘结层相当的粘结层或金属或合金,同时实现的侧蚀刻的抑制,这妨碍了更好的间距 电路布线,线路线性的提高。
    • 6. 发明申请
    • Metal-Coated Polyimide Resin Substrate with Excellent Thermal Aging Resistance Properties
    • 金属涂层聚酰亚胺树脂基材具有优异的耐热老化性能
    • US20120034475A1
    • 2012-02-09
    • US13148831
    • 2010-02-17
    • Taku YoshidaHajime Inazumi
    • Taku YoshidaHajime Inazumi
    • B32B15/08
    • B32B15/20B32B15/08B32B27/281B32B2255/205B32B2307/202B32B2307/546B32B2307/732C25D5/34H05K1/0346H05K3/381H05K3/388H05K2201/0154Y10T428/31681
    • [Object] To provide a metal-coated polyimide resin substrate that does not deteriorate the initial adhesion between the metal-coated polyimide resin film and the metal layer and has high adhesion after aging at 150° C. for 168 hours.[Solution] A metal-coated polyimide resin substrate in which a barrier layer is formed by a dry process after performing surface modification to one surface or both surfaces of a polyimide resin film by a dry process, a seed layer is thereafter formed by a wet process or a dry process, and a conductive film is formed on a surface layer thereof by a wet process; wherein, at the peeling surface on the conductive film layer side after the metal-coated polyimide resin substrate is subject to a 90-degree peel test, the thickness of a mixed layer of polyimide residue and barrier metal layer residue according to in-depth profiling with a time-of-flight secondary ion mass spectrometer (TOF-SIMS) is 0.70 nm or less based on Si sputter rate conversion, and peel strength retention after an aging test at 150° C. for 168 hours (peel strength after aging at 150° C. for 168 hours/initial peel strength) is 50% or higher.
    • 本发明提供一种金属包覆的聚酰亚胺树脂基板,其不会使金属包覆的聚酰亚胺树脂膜与金属层之间的初始粘合性劣化,并且在150℃下老化168小时后具有高粘附性。 [解决方案]通过干法对聚酰亚胺树脂膜的一面或两面进行表面改性后,通过干法形成阻挡层的金属涂布的聚酰亚胺树脂基板,然后通过湿法形成种子层 工艺或干法,并且通过湿法在其表面层上形成导电膜; 其中,在金属涂覆的聚酰亚胺树脂基板进行90度剥离试验之后的导电膜层侧的剥离面上,根据深度图案,聚酰亚胺残留物和阻隔金属层残留物的混合层的厚度 使用飞行时间二次离子质谱仪(TOF-SIMS)为基于Si溅射速率转换为0.70nm以下,150℃下老化试验后的剥离强度保持168小时(老化后的剥离强度 150℃,168小时/初始剥离强度)为50%以上。