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    • 5. 发明申请
    • Piezoelectric element and method for manufacturing the same
    • 压电元件及其制造方法
    • US20070120447A1
    • 2007-05-31
    • US11390673
    • 2006-03-28
    • Shigeyoshi UmemiyaMasaharu Hida
    • Shigeyoshi UmemiyaMasaharu Hida
    • H01L41/083
    • H01L41/0533H01L41/083H01L41/0833H01L41/23
    • A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.
    • 在身体部分的整个表面区域上形成涂膜。 涂膜的形成可以通过将身体部分浸入到双氟聚醚的溶液中来进行。 然后,通过在氮气气氛中照射氙准分子激光器到身体部分的侧面,或暴露于电极层的表面,将构成涂膜的全氟聚醚与身体部分的侧表面接合。 结果,保护膜仅形成在主体部分的侧表面上。 因此,保护​​膜形成为单分子膜。 然后将全身部分用2,3-二氢十氟戊烷清洗以除去未反应的涂膜,从而完成层叠型压电元件。
    • 9. 发明授权
    • Piezoelectric element and method for manufacturing the same
    • 压电元件及其制造方法
    • US07923905B2
    • 2011-04-12
    • US11390673
    • 2006-03-28
    • Shigeyoshi UmemiyaMasaharu Hida
    • Shigeyoshi UmemiyaMasaharu Hida
    • H01L41/053
    • H01L41/0533H01L41/083H01L41/0833H01L41/23
    • A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.
    • 在身体部分的整个表面区域上形成涂膜。 涂膜的形成可以通过将身体部分浸入到双氟聚醚的溶液中来进行。 然后,通过在氮气气氛中照射氙准分子激光器到身体部分的侧面,或暴露于电极层的表面,将构成涂膜的全氟聚醚与身体部分的侧表面接合。 结果,保护膜仅形成在主体部分的侧表面上。 因此,保护​​膜形成为单分子膜。 然后将全身部分用2,3-二氢十氟戊烷清洗以除去未反应的涂膜,从而完成层叠型压电元件。