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    • 1. 发明授权
    • Vacuum processing apparatus and ion pump capable of suppressing leakage of ions and electrons from ion pump
    • 能够抑制离子泵离子和电子泄漏的真空处理装置和离子泵
    • US06411023B1
    • 2002-06-25
    • US09496643
    • 2000-02-03
    • Katsuhito OguraRyoichi HiranoToru Tojo
    • Katsuhito OguraRyoichi HiranoToru Tojo
    • H05H1900
    • H01J37/18H01J2237/022
    • A vacuum processing apparatus performs processing such-as a pattern depiction with a charged beam within a process chamber evacuated to a high vacuum by an ion pump. The vacuum processing apparatus, which makes it possible to prevent the accuracy of the charged beam pattern depiction from being deteriorated by ions and electrons leaking from the ion pump, has a conductor and a voltage applying unit. The conductor is arranged in the vicinity of the suction port of the process chamber communicating with the ion pump such that the conductor is electrically insulated from the process chamber. The voltage applying unit imparts a potential differing from that of the process chamber to the conductor. Because of the potential difference between the conductor and the process chamber, the ions and electrons leaking from the ion pump are reflected or adsorbed by the conductor so as to suppress leakage of the ions and electrons into the process chamber.
    • 真空处理装置通过离子泵在被抽成高真空的处理室内进行诸如利用带电束的图案描绘的处理。 能够防止带电波束图形的精度被从离子泵泄漏的离子和电子劣化的真空处理装置具有导体和电压施加单元。 导体布置在与离子泵连通的处理室的吸入口附近,使得导体与处理室电绝缘。 电压施加单元将不同于处理室的电位赋予导体。 由于导体和处理室之间的潜在差异,离子泵泄漏的离子和电子被导体反射或吸收,以便抑制离子和电子向处理室的泄漏。
    • 2. 发明授权
    • Injection molding machine
    • 注塑机
    • US07165966B2
    • 2007-01-23
    • US10448226
    • 2003-05-30
    • Hiroyuki OnumaKatsuhito OguraKatsuyoshi KidoHarumichi Tokuyama
    • Hiroyuki OnumaKatsuhito OguraKatsuyoshi KidoHarumichi Tokuyama
    • B29B11/06
    • B29C45/5008B29C2045/1793B29C2045/5032Y10T408/75
    • There is provided an injection molding machine provided with an injection mechanism that enables a high-speed injection.The injection molding machine includes: a heating barrel for melting and kneading a resin fed from a hopper, said barrel having an injection nozzle at its front end; a screw movably and rotatably inserted in the heating barrel; a screw drive shaft coupled at its one end to the rear end of the screw; charging means including a charging motor for rotationally driving the screw drive shaft to rotate the screw so as to melt the resin in the heating barrel while conveying the resin forward of the screw, and measure the volume of the molten resin, and torque transmission means for transmitting the driving torque of the charging motor to the screw drive shaft and permitting a displacement of the screw drive shaft in the axial direction; a body frame fixing and supporting the charging motor and the torque transmission means, said frame including a front plate fixing and supporting the base of the heating barrel; injection drive means including a linear-movement shaft coupled to the rear end of the screw drive shaft and movable in the axial direction, and an injection motor for advancing the screw and producing an injection force for injecting the molten resin in the heating barrel; and shaft coupling means for coupling the rear end of the screw drive shaft to the linear-movement shaft such that only a thrust in the axial direction is transmitted to the screw drive shaft.
    • 提供了一种具有能够高速注射的注射机构的注射成型机。 注射成型机包括:加热筒,用于熔化和捏合从料斗供给的树脂,所述筒在其前端具有喷嘴; 可移动地和可旋转地插入加热筒中的螺钉; 螺钉驱动轴在其一端连接到螺钉的后端; 充电装置包括用于旋转驱动螺杆驱动轴以旋转螺杆的充电电机,以便在将树脂向前输送到螺杆的同时熔化加热筒中的树脂,并测量熔融树脂的体积,以及扭矩传递装置 将所述充电电动机的驱动转矩传递到所述螺杆驱动轴,并允许所述螺杆驱动轴在轴向方向上的位移; 固定和支撑所述充电马达和所述扭矩传递装置的主体框架,所述框架包括固定和支撑所述加热筒的基座的前板; 注射驱动装置,包括联接到螺杆驱动轴的后端并沿轴向移动的线性运动轴,以及用于使螺杆前进并产生用于将熔融树脂注入加热筒中的注射力的注射马达; 以及用于将螺杆驱动轴的后端联接到线性运动轴的轴联结装置,使得仅在轴向方向上的推力传递到螺杆驱动轴。
    • 4. 发明授权
    • Industrial robot
    • 工业机器人
    • US07530287B2
    • 2009-05-12
    • US11282666
    • 2005-11-21
    • Katsuhito Ogura
    • Katsuhito Ogura
    • B25J17/00
    • B25J9/1005B25J18/04Y10T74/20305Y10T74/20323Y10T74/20329Y10T74/20348
    • An industrial robot able to reliably prevent fall of an elevating part and able to improve a degree of freedom of design, that is, an industrial robot comprising a base body; an elevating part able to rise and descend with respect to the base body; an elevation drive source; a transmission mechanism for transmitting the drive force of the elevation drive source; a drive mechanism for making the elevating part rise and descend by the drive force transmitted via the transmission mechanism; a sensor for detecting an abnormality of the transmission of the drive force from the drive source to the elevating part; and a fall prevention part supported by one of the base body and the elevating part and abutting against the other of the base body and the elevating part and preventing fall of the elevating part when the sensor detects an abnormality of the transmission mechanism.
    • 一种工业机器人,其能够可靠地防止升降部件的坠落,能够提高设计自由度,即包括基体的工业机器人; 能够相对于基体上升和下降的升降部; 升降驱动源; 用于传递升降驱动源的驱动力的传动机构; 驱动机构,用于使升降部分通过传动机构传递的驱动力而上升和下降; 用于检测从所述驱动源到所述升降部的所述驱动力的传递异常的传感器; 以及由所述基体和所述升降部中的一个支撑的防倒落部,并且在所述传感器检测到所述传递机构的异常时,抵靠所述基体和所述升降部中的另一个并防止所述升降部的下降。
    • 6. 发明授权
    • Injection molding machine using a linear motor
    • 注塑机采用直线电机
    • US06962491B2
    • 2005-11-08
    • US10385469
    • 2003-03-12
    • Makoto NishizawaKatsuhito OguraKatsuyoshi KidoHarumichi TokuyamaHiroyuki Onuma
    • Makoto NishizawaKatsuhito OguraKatsuyoshi KidoHarumichi TokuyamaHiroyuki Onuma
    • B29C45/17B29C45/50B29C45/78
    • B29C45/78B29C45/5008B29C2045/1793B29C2945/7604B29C2945/76531B29C2945/76943
    • An injection molding machine using a linear motor, has a linear motor serving as a linear drive mechanism; a temperature sensor configured to detect a temperature of a coil of said linear motor or an ambient temperature thereof; an input unit configured to input a signal of the temperature detected by said temperature sensor; a data converting unit configured to convert the detected temperature signal into temperature data; a storage unit, including a temperature data setting unit configured to preset an allowable temperature, etc., configured to store temperature data converted by said data converting unit; a comparing/calculating unit configured to compare the temperature data converted by said data converting unit with a set value set in said data setting unit and make a calculation thereof; an output unit configured to output an instruction signal and display data, corresponding to a result of the calculation by said comparing/calculating unit; and a display unit configured to display the display data outputted from said comparing/calculating unit.
    • 使用线性电动机的注射成型机具有作为线性驱动机构的线性电动机; 温度传感器,被配置为检测所述线性电动机的线圈的温度或其环境温度; 输入单元,被配置为输入由所述温度传感器检测到的温度的信号; 数据转换单元,被配置为将检测到的温度信号转换为温度数据; 存储单元,包括被配置为预设容许温度等的温度数据设置单元,其被配置为存储由所述数据转换单元转换的温度数据; 比较/计算单元,被配置为将由所述数据转换单元转换的温度数据与在所述数据设置单元中设置的设定值进行比较并进行计算; 输出单元,被配置为输出与所述比较/计算单元的计算结果相对应的指令信号和显示数据; 以及显示单元,被配置为显示从所述比较/计算单元输出的显示数据。