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    • 5. 发明授权
    • Apparatus for measuring surface form
    • 用于测量表面形状的装置
    • US06459493B1
    • 2002-10-01
    • US08663742
    • 1996-06-14
    • Minako SugiuraShigeo KubotaNaoya Eguchi
    • Minako SugiuraShigeo KubotaNaoya Eguchi
    • G01B1124
    • G01B11/06
    • A second harmonic generating element radiates a laser beam having a wavelength of 532 nm onto a substrate surface. The laser beam corresponds to the second harmonic beam of a fundamental laser beam having a wavelength of 1064 nm. An emitting optical system emits the laser beam vertically to the substrate surface so that the laser beam is made linear. An observing means has a optical axis Lo oriented in a different direction from a optical axis Li of the emitting optical system and provides a CCD image sensor served as a two-dimensional imaging device located in conjugation with the height or thickness of the substrate surface. The observing means operates to observe a light section image formed by the linear beam fired by the emitting optical system onto the substrate surface. Then, an image processing means precisely measures the form of the surface of an object to be measured as suppressing degrade of an S/N ratio, on the basis of the image data of the light section image observed by the observing means.
    • 二次谐波发生元件将具有532nm波长的激光束辐射到衬底表面上。 激光束对应于波长为1064nm的基本激光束的二次谐波。 发射光学系统将激光束垂直地发射到衬底表面,使得激光束被线性化。 观察装置具有沿与发射光学系统的光轴Li不同的方向定向的光轴Lo,并且提供用作与基板表面的高度或厚度共轭的二维成像装置的CCD图像传感器。 观察装置用于观察由发射光学系统激发的线性光束形成的光线图像到基板表面上。 然后,图像处理装置基于由观察装置观察到的光截面图像的图像数据,精确地测量待测物体的表面的形状,以抑制S / N比的降低。
    • 10. 发明申请
    • Image projector and image projecting method
    • 图像投影仪和图像投影方法
    • US20050128578A1
    • 2005-06-16
    • US10486055
    • 2003-06-10
    • Yutaka SugawaraNaoya Eguchi
    • Yutaka SugawaraNaoya Eguchi
    • G03B21/00G08B21/02H04N5/57H04N5/74H04N9/31H04N17/00H04N17/04G03B21/56
    • H04N9/3179G03B21/005G03B21/2086H04N5/57H04N5/74H04N9/3129
    • In an image projection on a screen, an image projection apparatus improves the safety of entry into a projection region by the human body and does not bring about the increase of complexity of the configuration thereof owing to the improvement of the safety. A monitoring area is regulated on the outside of the projection area (3) of the screen (2). A detection wave such as infrared rays is emitted from a detection wave source (1c) of the image projection apparatus (1). A reflection wave from the monitoring area is detected by reflection wave detection means (1d) such as a CCD sensor. Whether the human body or an obstacle enters the monitoring space, which is surrounded by a detection wave (4) between the main body unit of the image projection apparatus (1) and the screen (2), or not is detected. Once the entry is detected, the intensity of the radiation light traveling toward the projection area (3) is reduced or cut off according to the situation or the degree of the entry.
    • 在屏幕上的图像投影中,图像投影装置提高了人体进入投影区域的安全性,并且由于安全性的提高,不会导致其配置的复杂性的增加。 监视区域在屏幕(2)的投影区域(3)的外侧被调节。 从图像投影装置(1)的检测波源(1C)发射诸如红外线的检测波。 来自监视区域的反射波由诸如CCD传感器的反射波检测装置(1d)检测。 检测人体或障碍物是否进入由图像投影装置(1)的主体单元和屏幕(2)之间的检测波(4)包围的监视空间。 一旦检测到入口,根据情况或进入程度减小或切断朝向投影区域(3)行进的辐射光的强度。