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    • 10. 发明授权
    • Process for manufacturing an electro-mechanical grating device
    • 制造机电光栅装置的方法
    • US06238581B1
    • 2001-05-29
    • US09216202
    • 1998-12-18
    • Gilbert A. HawkinsJohn A. LebensConstantine N. Anagnostopoulos
    • Gilbert A. HawkinsJohn A. LebensConstantine N. Anagnostopoulos
    • B81B300
    • G02B5/1828G02B26/0808
    • A method for manufacturing a mechanical grating device is presented. The device consists of a plurality of parallel-suspended ribbons that are deformed using, for example, an electrostatic force to actuate alternate ribbons. Actuation is a deformation of the ribbon resulting from an applied voltage to affect the height of the ribbons above a substrate. The method for manufacturing a mechanical gating device comprises the steps of: providing a spacer layer on top of a protective layer which covers a substrate; etching a channel entirely through the spacer layer; depositing a sacrificial layer at least as thick as the spacer layer; rendering the deposited sacrificial layer optically coplanar by chemical mechanical polishing; providing a tensile ribbon layer completely covering the area of the channel; providing a conductive layer patterned in the form of a grating; transferring the conductive layer pattern to the ribbon layer and etching entirely through the ribbon layer; and removing entirely the sacrificial layer from the channel.
    • 提出了一种制造机械光栅装置的方法。 该装置由多个平行悬挂的带组成,其使用例如静电力来变形以致动交替色带。 致动是由施加的电压产生的带状物的变形,以影响衬底上方的带的高度。 用于制造机械门控装置的方法包括以下步骤:在覆盖衬底的保护层的顶部上设置间隔层;通过间隔层整体蚀刻通道;沉积至少与间隔层一样厚的牺牲层; 通过化学机械抛光使沉积的牺牲层光学共面;提供完全覆盖通道区域的拉伸带层;提供以光栅形式图案化的导电层;将导电层图案转移到带层并完全蚀刻 色带层; 并从通道中完全移除牺牲层。