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    • 4. 发明授权
    • Process for sawing substrate strip
    • 锯切基板条的工艺
    • US07168352B2
    • 2007-01-30
    • US09394918
    • 1999-09-13
    • Jau-Yuen SuTao-Yu ChenSu Tao
    • Jau-Yuen SuTao-Yu ChenSu Tao
    • B26D1/00
    • H01L21/67092B23D59/002Y10T83/04Y10T83/0495Y10T83/05Y10T83/0548Y10T83/0572Y10T83/531
    • A process for sawing a substrate strip marks corresponding to substrate areas of substrate strips which are arranged side-by-side on a plate. A saw machine is mechanically moved to the substrate areas and positioned by the alignment marks of corresponding substrate areas for cutting the substrate areas of the substrate strips in the first phase. Then the saw machine is further mechanically moved to the substrate areas again and is positioned by the alignment marks of corresponding substrate areas again for cutting the substrate areas of the substrate strips in the second phase. Therefore, an error in any of the substrate areas in the first phase and second phase will not accumulate to the subsequent substrate areas in the substrate strip.
    • 用于锯切对应于在板上并排布置的衬底条的衬底区域的衬底条的标记的方法。 锯床机械地移动到基板区域并且由对应的基板区域的对准标记定位,以便在第一阶段中切割基板条的基板区域。 然后再次将锯床机械地移动到基板区域,并再次通过对应基板区域的对准标记定位,以在第二阶段中切割基板条带的基板区域。 因此,第一相和第二相中的任何一个衬底区域中的误差将不会累积到衬底条中的随后的衬底区域。