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    • 1. 发明申请
    • Measurement of Thickness Profile and Elastic Modulus Profile of a Polishing Pad
    • 抛光垫的厚度剖面和弹性模量曲线的测量
    • US20060196283A1
    • 2006-09-07
    • US11306766
    • 2006-01-10
    • Kai YangSheng-Hun JengYu-Ting Lin
    • Kai YangSheng-Hun JengYu-Ting Lin
    • G01N19/00B24B49/00
    • G01B21/08B24B37/013B24B49/00G01N2203/0075
    • An apparatus for measuring the thickness profile and elastic modulus profile of a polishing pad comprise an eddy current sensor and a mechanism to press the eddy current sensor against the polishing pad. The pad thickness is given by the signal of the eddy current sensor. The elastic modulus of the polishing pad is extracted from measurements at different forces applied to the eddy current sensor. The thickness profile and elastic modulus profile of the polishing pad are obtained by scanning the measurement across the whole polishing pad or along a diameter of the polishing pad. The pad thickness profile is used to adjust pad conditioning recipe so that more pad materials is eroded away at thicker area of the pad. By employing the apparatus of present invention, the thickness uniformity of a polishing pad can be better maintained, resulting in longer pad lifetime and better CMP removal rate uniformity.
    • 用于测量抛光垫的厚度分布和弹性模量分布的装置包括涡流传感器和将涡流传感器压靠抛光垫的机构。 焊盘厚度由涡流传感器的信号给出。 抛光垫的弹性模量从施加到涡流传感器的不同力的测量中提取出来。 抛光垫的厚度分布和弹性模量分布是通过扫描整个抛光垫或沿研磨垫的直径进行测量而得到的。 衬垫厚度轮廓用于调整衬垫调节配方,使得更多的衬垫材料在衬垫的较厚区域被侵蚀掉。 通过采用本发明的装置,可以更好地保持抛光垫的厚度均匀性,从而延长焊垫寿命和更好的CMP去除速率均匀性。
    • 4. 发明授权
    • Pixel array, active device array substrate and flat display panel
    • 像素阵列,有源器件阵列基板和平板显示面板
    • US08704966B2
    • 2014-04-22
    • US13300674
    • 2011-11-21
    • Chuan-Sheng WeiMing-Tao ChiangYu-Ting LinMaw-Song ChenWei-Ming Huang
    • Chuan-Sheng WeiMing-Tao ChiangYu-Ting LinMaw-Song ChenWei-Ming Huang
    • G02F1/136
    • H01L29/41733G02F1/13624H01L27/124
    • A pixel array including a pixel electrode and an active device is provided. The active device includes a gate, a channel layer, a source, a drain, a connection electrode, a first branch portion and a second branch portion. The gate is electrically connected with a scan line. The channel layer located at a side of the gate is electrically isolated from the gate. The source, the drain and the connection electrode are disposed on a part region of the channel layer. The first branch portion disposed on a part region of the channel layer is connected with an end of the connection electrode. The first branch portion surrounds the source located on the channel layer. The second branch portion disposed on a part region of the channel layer is connected with the other end of the connection electrode. The second branch portion surrounds the drain located on the channel layer.
    • 提供了包括像素电极和有源器件的像素阵列。 有源器件包括栅极,沟道层,源极,漏极,连接电极,第一分支部分和第二分支部分。 栅极与扫描线电连接。 位于栅极侧的沟道层与栅极电绝缘。 源极,漏极和连接电极设置在沟道层的一部分区域上。 设置在沟道层的一部分区域上的第一分支部分与连接电极的一端连接。 第一分支部分围绕位于通道层上的源。 设置在沟道层的一部分区域上的第二分支部分与连接电极的另一端连接。 第二分支部分围绕位于通道层上的漏极。