专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US09528942B2 Front quartersphere scattered light analysis 有权
公开(公告)号：US09528942B2
公开(公告)日：2016-12-27
申请号：US14525673
申请日：2014-10-28
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
IPC分类号： G01N21/88 , G01N21/21 , G01N21/47 , G01N21/55 , G01N21/95 , G01N21/956 , G06T7/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

2. 发明申请

US20150042987A1 Front Quartersphere Scattered Light Analysis 有权
标题翻译：前四分之一散射光分析
公开(公告)号：US20150042987A1
公开(公告)日：2015-02-12
申请号：US14525673
申请日：2014-10-28
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
IPC分类号： G01N21/88 , G01N21/47 , G01N21/55 , G01N21/21
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
摘要翻译：提供了表面检查系统，以及相关的部件和方法。表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力系统。光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。

3. 发明申请

US20170010222A1 Front Quartersphere Scattered Light Analysis 审中-公开
标题翻译：前四分之一散射光分析
公开(公告)号：US20170010222A1
公开(公告)日：2017-01-12
申请号：US15265805
申请日：2016-09-14
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
IPC分类号： G01N21/95 , G01N21/47 , G06T7/00 , G01N21/21
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
摘要翻译：提供了表面检查系统，以及相关的部件和方法。表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力系统。光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。

4. 发明授权

US09103800B2 System with multiple scattered light collectors 有权
标题翻译：具有多个散射光收集器的系统
公开(公告)号：US09103800B2
公开(公告)日：2015-08-11
申请号：US13953644
申请日：2013-07-29
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Timothy R. Tiemeyer , James P. McNiven
IPC分类号： G01N21/00 , G01N21/88 , G01N21/21 , G01N21/47 , G01N21/55 , G01N21/95 , G01N21/956 , G06T7/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.
摘要翻译：一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。

5. 发明申请

US20130335733A1 System With Multiple Scattered Light Collectors 审中-公开
标题翻译：具有多个散射光收集器的系统
公开(公告)号：US20130335733A1
公开(公告)日：2013-12-19
申请号：US13953644
申请日：2013-07-29
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Timothy R. Tiemeyer , James P. McNiven
IPC分类号： G01N21/956
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.
摘要翻译：一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。

6. 发明申请

US20130342833A1 System With Polarized Scattered Light 有权
标题翻译：带有偏振散射光的系统
公开(公告)号：US20130342833A1
公开(公告)日：2013-12-26
申请号：US13964399
申请日：2013-08-12
申请人： KLA-Tencor Corporation
发明人： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit. The collector output slit has a width that is selected to be proportional to the scanned spot size, so as to allow passage of the focused scattered light associated with the scanned spot, and exclude the focused scattered light associated with the workpiece regions other than the desired spot. A collector output varying subsystem varies the collector output slit so as to at least one of minimize passage of Rayleigh light scatter through the collector output slit or optimize a signal to air-scatter-noise ratio.
摘要翻译：一种用于表面检查系统中用于检查工件表面的光学收集和检测系统。表面检查系统具有通过背面四分之一球并且朝向表面上的期望位置投射的入射光束，其是具有已知扫描光斑尺寸的扫描点。入射光束撞击在表面上以产生由收集器模块收集的散射光。收集器模块包括用于收集和聚焦散射光以形成聚焦散射光的收集光学器件。收集器输出狭缝位于收集器模块的输出处，收集光学器件通过该收集器模块聚焦散射光。与扫描点相关联的散射光在收集器输出狭缝处形成成像点。集电极输出狭缝具有被选择成与扫描光斑尺寸成比例的宽度，以便允许与扫描光点相关联的聚焦散射光的通过，并且排除与除了所需的以外的工件区域相关联的聚焦散射光点。集电极输出变化子系统使收集器输出狭缝变化，以便使瑞利光散射通过集电极输出狭缝的最小化通道中的至少一个或将信号优化为空气散射噪声比。

7. 发明申请

US20130094023A1 Back Quartersphere Scattered Light Analysis 有权
标题翻译： Back Quartersphere散射光分析
公开(公告)号：US20130094023A1
公开(公告)日：2013-04-18
申请号：US13709493
申请日：2012-12-10
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： An optical collection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a location on the surface of the workpiece to impinge on the surface. This forms a reflected beam that extends along a light channel axis in a front quartersphere, and forms scattered light having a haze scatter portion. The incident beam and the light channel axis form an incident plane. The optical collection system includes back collectors that are positioned in the back quartersphere for collecting the scattered light, where each of the back collectors is disposed in the back quartersphere outside the incident plane, and at a relative minimum in the Rayleigh scatter.
摘要翻译：一种用于表面检查系统中用于检查工件表面的光学收集系统。表面检查系统具有通过背面四分之一球并且朝向工件表面上的位置投射的入射光束撞击在表面上。这形成沿着前四分之一圆的光通道轴延伸的反射光束，并形成具有雾度散射部分的散射光。入射光束和光通道轴形成入射平面。光学收集系统包括位于后方四分之一圈中的后收集器，用于收集散射光，其中每个后收集器设置在入射平面外侧的后四分之一圆周中，并且在瑞利散射中相对最小。

8. 发明授权

US10018572B2 Front quartersphere scattered light analysis 有权
公开(公告)号：US10018572B2
公开(公告)日：2018-07-10
申请号：US15265805
申请日：2016-09-14
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
IPC分类号： G01N21/88 , G01N21/95 , G01N21/21 , G01N21/47 , G01N21/55 , G01N21/956 , G06T7/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

9. 发明授权

US09518930B2 Scattered light measurement system 有权
标题翻译：散射光测量系统
公开(公告)号：US09518930B2
公开(公告)日：2016-12-13
申请号：US13964399
申请日：2013-08-12
申请人： KLA-Tencor Corporation
发明人： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
IPC分类号： G01N21/88 , G01N21/21 , G01N21/47 , G01N21/55 , G01N21/95 , G01N21/956 , G06T7/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit. The collector output slit has a width that is selected to be proportional to the scanned spot size, so as to allow passage of the focused scattered light associated with the scanned spot, and exclude the focused scattered light associated with the workpiece regions other than the desired spot. A collector output varying subsystem varies the collector output slit so as to at least one of minimize passage of Rayleigh light scatter through the collector output slit or optimize a signal to air-scatter-noise ratio.
摘要翻译：一种用于表面检查系统中用于检查工件表面的光学收集和检测系统。表面检查系统具有通过背面四分之一球并且朝向表面上的期望位置投射的入射光束，其是具有已知扫描光斑尺寸的扫描点。入射光束撞击在表面上以产生由收集器模块收集的散射光。收集器模块包括用于收集和聚焦散射光以形成聚焦散射光的收集光学器件。收集器输出狭缝位于收集器模块的输出处，收集光学器件通过该收集器模块聚焦散射光。与扫描点相关联的散射光在收集器输出狭缝处形成成像点。集电极输出狭缝具有被选择成与扫描光斑尺寸成比例的宽度，以便允许与扫描光点相关联的聚焦散射光的通过，并且排除与除了所需的以外的工件区域相关联的聚焦散射光点。集电极输出变化子系统使收集器输出狭缝变化，以便使瑞利光散射通过集电极输出狭缝的最小化通道中的至少一个或将信号优化为空气散射噪声比。

10. 发明授权

US09488591B2 Front quartersphere scattered light analysis 有权
公开(公告)号：US09488591B2
公开(公告)日：2016-11-08
申请号：US14525647
申请日：2014-10-28
申请人： KLA-Tencor Corporation
发明人： Richard E. Bills , Neil Judell , Klaus R. Freischlad , James P. McNiven
IPC分类号： G01N21/00 , G01N21/88 , G01N21/21 , G01N21/47 , G01N21/55 , G01N21/95 , G01N21/956 , G06T7/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
摘要： A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式