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    • 6. 发明申请
    • ROBOT
    • 机器人
    • US20160218031A1
    • 2016-07-28
    • US14917699
    • 2014-09-04
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Takahiro INADAHirohiko GOTOMasayuki SAITOTakeshi SHIBATATakayuki FUKUSHIMA
    • H01L21/687B25J19/00
    • H01L21/68707B25J9/0021B25J19/0079F16C29/02F16C29/088H01L21/67766
    • A seal belt includes inner and outer belt sections. The inner belt section revolves according to the movable member movement. The outer belt section includes, between the inner belt section and an opening, a first portion in which a first end is retained at a movable member inside section portion, the portion being closer to the opening lower end, and the remaining portion extends along the opening and is retained at a third space position, and a second portion in which a first end is retained at an inside section portion, the portion being closer to the lower end, and the remaining portion extends to a fourth space position along the opening and is retained at the fourth space position. The first portion and second portions lengths are changed in a complementary manner according to the movable member movement. The drive mechanism is surrounded by the inner belt section.
    • 密封带包括内部和外部带部分。 内带部分根据活动件的运动而旋转。 所述外带部分包括在所述内带部分和开口之间的第一部分,其中第一端保持在可移动部件内部部分中,所述部分更靠近所述开口下端,并且所述其余部分沿着 并且被保持在第三空间位置,第二部分中第一端保持在内部部分,该部分更靠近下端,并且其余部分沿着开口延伸到第四空间位置, 被保留在第四空间位置。 第一部分和第二部分长度根据可移动部件的移动以互补的方式改变。 驱动机构被内带部分包围。
    • 7. 发明申请
    • END EFFECTOR
    • 终止效应
    • US20160111312A1
    • 2016-04-21
    • US14758362
    • 2013-12-25
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Tetsuya YOSHIDATakeshi SHIBATA
    • H01L21/68B25J15/00H01L21/687
    • H01L21/681B25J15/0014H01L21/67259H01L21/67265H01L21/68707
    • An end effector according to the present invention includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.
    • 根据本发明的末端执行器包括:手; 设置在手上的基板保持架; 设置在前端部分和手部的映射检测器; 发光器,其设置有手并且被配置为产生检测光; 手提供的光接收器,其被配置为接收检测光并将检测光转换成电输出; 以及形成为使得从发光体发射的检测光通过光路入射到光接收器上的光路; 光路被形成为使得检测光被由映射检测器在盒中检测到的基板阻挡,并且使得检测光被被基板保持器保持的基板阻挡。