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1. 发明申请

US20100188077A1 APPARATUS FOR CHARACTERIZING A MAGNETIC FIELD IN A MAGNETICALLY ENHANCED SUBSTRATE PROCESSING SYSTEM 失效
标题翻译：用于表征磁场增强基板处理系统中的磁场的装置
公开(公告)号：US20100188077A1
公开(公告)日：2010-07-29
申请号：US12360664
申请日：2009-01-27
申请人： KARTIK RAMASWAMY , HIROJI HANAWA , LAWRENCE WONG , CHINH DINH
发明人： KARTIK RAMASWAMY , HIROJI HANAWA , LAWRENCE WONG , CHINH DINH
IPC分类号： G01R33/02
CPC分类号： G01R33/0206 , G01R33/0023
摘要： Embodiments of sensor devices for characterizing magnetic fields formed in substrate processing systems and methods of use thereof are provided herein. In some embodiments, an apparatus for characterizing a magnetic field in a substrate processing system may include a carrier having a form substantially similar to a substrate to be processed in the substrate processing system. One or more magnetic sensors are disposed on the carrier for measuring a magnitude of a magnetic field formed in the processing system in an x-, y-, and z-direction. A microprocessor is coupled to the one or more magnetic sensors to sample data representative of the magnitude of the magnetic field in the x-, y-, and z-directions proximate a position of each sensor. A memory device is coupled to the microprocessor for storing the sampled data. A power source is provided to supply power to each magnetic sensor and the microprocessor.
摘要翻译：本文提供了用于表征在基板处理系统中形成的磁场的传感器装置的实施例及其使用方法。在一些实施例中，用于表征衬底处理系统中的磁场的装置可以包括具有基本上类似于在衬底处理系统中要处理的衬底的形式的载体。一个或多个磁传感器设置在载体上，用于测量在x，y和z方向上在处理系统中形成的磁场的大小。微处理器耦合到一个或多个磁性传感器以对表示在每个传感器的位置附近的x，y和z方向上的磁场的大小的数据进行采样。存储器件耦合到微处理器以存储采样数据。提供电源以向每个磁传感器和微处理器供电。

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