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    • 7. 发明授权
    • Corrective fiber-optic microprobe for white light interferometric measurements
    • 用于白光干涉测量的校正光纤微探针
    • US09074862B2
    • 2015-07-07
    • US13692025
    • 2012-12-03
    • GRINTECH GmbH
    • Bernhard Messerschmidt
    • G01B9/02G02B27/10G02B27/14G02B6/26G02B27/00G02B3/00G02B6/293
    • G01B9/02049G01B9/02007G01B9/0205G01B9/02057G01B9/02058G01B9/0209G01B9/02091G02B3/0087G02B6/26G02B6/262G02B6/29364G02B23/2423G02B27/005G02B27/1006G02B27/141
    • An optically corrective microprobe for white light interferometry is disclosed. In white light interferometry which uses different spectral ranges, the dispersion-induced dependency of optical path differences on the wavelength between measurement light bundle and reference light bundle is compensated by an efficient, easily miniaturized arrangement. A reference beamsplitter with partially reflecting filters in at least two different spectral ranges for generating at least two transmitted measurement light bundles and associated reflected reference light bundles of nonoverlapping spectral ranges is arranged between the light output surface of the light-conducting fiber and the focusing optics. An axial distance between two partially reflecting filters is adjusted in such a way that a spectrally induced optical path difference to which the respective measurement light bundles are subjected when passing through dispersive elements in the light path to the object surface and back is present to the same magnitude between the respective reference light bundles.
    • 公开了用于白光干涉测量的光学校正微探针。 在使用不同光谱范围的白光干涉测量中,光路差异对测量光束和参考光束之间的波长的色散引起的依赖性通过有效的,容易的小型化布置来补偿。 具有至少两个不同光谱范围的部分反射滤光器的参考分束器被布置在导光光纤的光输出表面和聚焦光学器件之间,用于产生至少两个透射的测量光束和不重叠光​​谱范围的相关联的反射参考光束 。 调节两个部分反射滤光器之间的轴向距离,使得当通过到物体表面和背面的光路中的分散元件时,相应的测量光束经受的光谱感应光程差存在于 各个参考光束之间的大小。