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1. 发明授权

US08807911B2 Transfer robot and equipment front end module including transfer robot with vent part 有权
标题翻译：传送机器人和设备前端模块，包括带排气部分的传送机器人
公开(公告)号：US08807911B2
公开(公告)日：2014-08-19
申请号：US13719273
申请日：2012-12-19
申请人： Kabushiki Kaisha Yaskawa Denki
发明人： Masatoshi Furuichi , Masayuki Suzuki
IPC分类号： H01L21/677
CPC分类号： H01L21/67748 , H01L21/67742 , Y10S901/49
摘要： A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be transferred. The base unit is formed into a substantially box shape. The guide unit includes a vertical shaft vertically arranged in the base unit. The lifting unit is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion. The vent part is opened in an upper surface of the base unit and vents downflow from an outside to an inside of the base unit.
摘要翻译：根据实施例的传送机器人包括臂单元，基座单元，引导单元，提升单元和通风部分。手臂单元包括能够保持要传送的物体的机器人手。基座单元形成为大致箱状。引导单元包括垂直设置在基座单元中的垂直轴。提升单元设置成沿着竖直轴可升高和降低，并且在上端部支撑臂单元。通气部分在基部单元的上表面中打开并且从底部单元的外部向内部向下流动。

2. 发明授权

US09293355B2 Substrate transfer system and substrate processing system 有权
标题翻译：基板转印系统和基板处理系统
公开(公告)号：US09293355B2
公开(公告)日：2016-03-22
申请号：US14073871
申请日：2013-11-07
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi , Yoshiki Kimura
IPC分类号： H01L21/677
CPC分类号： H01L21/68707 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67766 , Y10S414/137
摘要： A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus comprising an opening. The substrate transfer robot includes a hand and an arm. The hand is configured to support a substrate. The arm is configured to move the hand. The arm and the hand supporting the substrate are configured to rotate on a horizontal surface within a minimal rotation area of the substrate transfer robot such that an outer periphery of the minimal rotation area overlaps an inside of the second apparatus through the opening so as to transfer the substrate from a first position in the first apparatus to a second position in the second apparatus through the opening.
摘要翻译：衬底传送系统包括设置在包括开口的第一设备和第二设备之间限定的机器人安装区域中的衬底传送机器人。基板传送机器人包括手和臂。手被配置成支撑衬底。手臂配置为移动手。支撑基板的手臂和手被构造成在基板传送机器人的最小旋转区域内的水平表面上旋转，使得最小旋转区域的外周边通过开口与第二装置的内部重叠，以便转印所述基板通过所述开口从所述第一装置中的第一位置到所述第二装置中的第二位置。

3. 发明授权

US09252035B2 Substrate transfer system, substrate processing system, and substrate transfer robot 有权
标题翻译：基板传输系统，基板处理系统和基板传送机器人
公开(公告)号：US09252035B2
公开(公告)日：2016-02-02
申请号：US14810406
申请日：2015-07-27
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi , Yoshiki Kimura
IPC分类号： H01L21/677
CPC分类号： H01L21/68707 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67766 , Y10S414/137
摘要： A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes cassettes. The cassettes are each configured to accommodate at least one substrate. The second apparatus includes a second wall opposite to a first wall. The substrate transfer robot transfers the at least one substrate from each of the cassettes to the second apparatus. The substrate transfer robot includes a base stationary, a hand, and arms. A first arm includes a first end and a second end. The first end is rotatably coupled to the base. A second arm includes a third end and a fourth end. The third end is rotatably coupled to the second end. The second end of the first arm moves beyond the second wall when the substrate transfer robot takes out the substrate from the first apparatus.
摘要翻译：衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。第一装置包括盒。盒被配置为容纳至少一个基板。第二装置包括与第一壁相对的第二壁。基板传送机构将至少一个基板从每个盒传送到第二装置。基板传送机器人包括基座固定件，手和臂。第一臂包括第一端和第二端。第一端可旋转地联接到基座。第二臂包括第三端和第四端。第三端可旋转地联接到第二端。当基板传送机器人从第一装置取出基板时，第一臂的第二端移动超过第二壁。

4. 发明授权

US09570336B2 Substrate transfer system and substrate processing system 有权
标题翻译：基板转印系统和基板处理系统
公开(公告)号：US09570336B2
公开(公告)日：2017-02-14
申请号：US15016272
申请日：2016-02-05
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi , Yoshiki Kimura
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/68707 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67766 , Y10S414/137
摘要： A substrate transfer system includes a substrate transfer robot. The substrate transfer robot is provided between a first apparatus and a second apparatus which has a wall provided opposite to the substrate transfer robot and having an opening on the wall. The substrate transfer robot is configured to transfer a substrate from the first apparatus to the second apparatus via the opening and includes a base having a first axis, an arm body, and a hand. The arm body has a proximal end and a distal end and is connected to the base at the proximal end to rotate around the first axis. The substrate transfer robot includes a minimum distance from the first axis to an outermost portion of the arm body and the hand in a radius direction from the first axis being larger than a distance between the first axis and the opening on the wall.
摘要翻译：基板传送系统包括基板传送机器人。衬底传送机器人设置在第一设备和第二设备之间，第二设备具有与衬底传送机器人相对设置的壁，并且在壁上具有开口。基板传送机器人构造成经由开口将基板从第一装置传送到第二装置，并且包括具有第一轴，臂主体和手的基部。臂体具有近端和远端，并且在近端处连接到基部以围绕第一轴线旋转。基板传送机器人包括从臂体的第一轴线到最外侧部分的最小距离，并且距离第一轴线的半径方向上的手大于第一轴线与壁上的开口之间的距离。

5. 发明授权

US09252036B2 Substrate transfer system, substrate processing system, and substrate transfer robot 有权
标题翻译：基板传输系统，基板处理系统和基板传送机器人
公开(公告)号：US09252036B2
公开(公告)日：2016-02-02
申请号：US14810409
申请日：2015-07-27
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi , Yoshiki Kimura
IPC分类号： H01L21/677
CPC分类号： H01L21/68707 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67766 , Y10S414/137
摘要： A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes a first cassette, a second cassette and a first wall. The second apparatus includes a second wall. The substrate transfer robot transfers a substrate from each of the first cassette and the second cassette to the second apparatus. The substrate transfer robot includes a hand and an arm. The arm includes a first arm rotatable about a center of rotation. The first cassette is closer to the center of rotation than the second cassette. The arm moves with being partially disposed beyond the second wall in plan view and the arm moves without being disposed beyond the second wall in plan view when taking out the substrate from the first cassette.
摘要翻译：衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。第一装置包括第一盒，第二盒和第一壁。第二装置包括第二壁。基板传送机构将基板从第一盒和第二盒中的每一个传送到第二装置。基板传送机器人包括手和臂。臂包括可围绕旋转中心旋转的第一臂。第一盒比第二盒更接近旋转中心。臂在平面图中部分地设置在第二壁之外移动，并且当从第一盒取出基板时，臂在平面图中移动而不设置在第二壁之外。

6. 发明授权

US09620405B2 Substrate transfer system, substrate processing system, and substrate transfer robot 有权
公开(公告)号：US09620405B2
公开(公告)日：2017-04-11
申请号：US14810408
申请日：2015-07-27
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi , Yoshiki Kimura
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/68707 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67766 , Y10S414/137
摘要： A substrate transfer robot is disposed in a robot installment area defined between a first apparatus and a second apparatus including an opening. The first apparatus includes a first wall, the second apparatus including a second wall. The first apparatus accommodates the substrate at each of a lowest height position and a highest height position. The substrate transfer robot includes a base stationary, a hand configured, and an arm. The arm is rotatably mounted to the base to move the hand. The hand and the arm move in a height direction between a movable range defined between a lowest position and a highest position. The arm rotates with partially entering the opening when the substrate transfer robot takes out the substrate from the first apparatus. The substrate is accommodated at each of the lowest height position and the highest height position.

7. 发明授权

US09272413B2 Conveying system 有权
标题翻译：输送系统
公开(公告)号：US09272413B2
公开(公告)日：2016-03-01
申请号：US13688219
申请日：2012-11-29
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi , Yoshiki Kimura , Tomohiro Matsuo , Yoshihiro Kusama
IPC分类号： B25J9/16 , B25J9/04 , H01L21/677
CPC分类号： B25J9/042 , B25J9/1664 , H01L21/677 , H01L21/67766 , Y10S901/02 , Y10S901/15
摘要： A conveying system according to an embodiment includes a robot and a controller. The controller includes a switching unit. The robot includes an arm unit formed of a hand and a plurality of arms connected rotatably with respect to one another, and a base unit. An arm on a rear end side is connected to the base unit rotatably about a rotation axis, and the hand is rotatably connected to an arm on a front end side. The switching unit switches cylindrical coordinate control for controlling the arm unit such that a trajectory of the hand overlaps with any one of lines radiating from the rotation axis and rectangular coordinate control for controlling the arm unit such that the trajectory of the hand overlaps with none of the lines at a predetermined timing.
摘要翻译：根据实施例的输送系统包括机器人和控制器。控制器包括切换单元。机器人包括由手和相对于彼此可旋转地连接的多个臂形成的臂单元和基座单元。后端侧的臂与旋转轴可旋转地连接在基座上，手可旋转地与前端侧的臂连接。切换单元切换用于控制臂单元的圆柱坐标控制，使得手的轨迹与从旋转轴辐射的线中的任何一个重叠，并且用于控制臂单元的直角坐标控制，使得手的轨迹与线在预定的时间。

8. 发明授权

US09108320B2 Suction structure, robot hand and robot 有权
标题翻译：抽吸结构，机器人手和机器人
公开(公告)号：US09108320B2
公开(公告)日：2015-08-18
申请号：US14324244
申请日：2014-07-07
申请人： KABUSHIKI KAISHA YASKAWA DENKI
发明人： Masatoshi Furuichi
IPC分类号： B25J15/06 , H01L21/677 , H01L21/683
CPC分类号： B25J15/0616 , H01L21/67766 , H01L21/6838 , Y10S414/141 , Y10S901/40
摘要： A suction structure includes a fixing base, a pad fixed to the fixing base and a seal member arranged between the pad and the fixing base. The pad includes a contact portion arranged to make contact with a target object to be sucked, a space surrounded by the contact portion, a suction hole through which the space communicates with a vacuum source via the seal member, and one or more support portions fixing the pad to the fixing base. Each of the support portions is arranged on an axis of tilting movement, and being provided with a twist portion for supporting the contact portion such that the contact portion makes the tilting movement about the axis.
摘要翻译：抽吸结构包括固定基座，固定在固定基座上的垫片和布置在垫片和固定底座之间的密封构件。该垫包括接触部分，其被布置成与要被吸收的目标物体接触，由接触部分包围的空间，该空间经由该密封部件与真空源连通的吸入孔以及一个或多个支撑部分固定垫到固定底座。每个支撑部分布置在倾斜运动的轴线上，并且设置有用于支撑接触部分的扭曲部分，使得接触部分围绕轴线进行倾斜运动。

9. 发明授权

US09028197B2 Robot with plurality of belts and intermediate pulley 有权
标题翻译：具有多个皮带和中间皮带轮的机器人
公开(公告)号：US09028197B2
公开(公告)日：2015-05-12
申请号：US13739271
申请日：2013-01-11
申请人： Kabushiki Kaisha Yaskawa Denki
发明人： Masatoshi Furuichi , Osamu Komiyaji , Masayuki Suzuki , Hiroki Sanemasa
IPC分类号： B25J9/10 , B25J18/04 , B25J19/00 , B25J9/04
CPC分类号： B25J18/04 , B25J9/043 , B25J9/104 , B25J9/1045 , B25J19/0066
摘要： A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley.
摘要翻译：机器人包括具有可旋转地安装在接合部上的基端部和安装有输出轴的前端部的臂; 以及驱动机构，其布置在所述臂内并且构造成以降低的速度驱动所述输出轴。驱动机构包括具有马达轴的马达，安装在马达轴上的驱动皮带轮，安装在输出轴上的从动皮带轮，设置在驱动滑轮与从动皮带轮之间的至少一个中间滑轮，以及多个皮带，通过中间滑轮将驱动滑轮和从动滑轮可操作地互连。

10. 发明授权

US08992160B2 Transfer robot 有权
标题翻译：传送机器人
公开(公告)号：US08992160B2
公开(公告)日：2015-03-31
申请号：US13666906
申请日：2012-11-01
申请人： Kabushiki Kaisha Yaskawa Denki
发明人： Masatoshi Furuichi
IPC分类号： B25J21/00 , H01L21/677
CPC分类号： H01L21/67742 , B25J9/042 , H01L21/67748 , Y10S414/139 , Y10S901/17
摘要： A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece.
摘要翻译：根据实施例的传送机器人包括臂和身体。臂在其末端设置有传递薄板状工件的机器人手，并且在水平方向上操作。身体包括提升和降低手臂的升降机构。在传送机器人中，主体的至少一部分设置在与打开和关闭用于薄板状工件的存储容器的打开和关闭装置连接的转移室的侧壁的外侧，以及处理室处理薄板状工件。

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