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    • 8. 发明申请
    • MEMS DEVICE
    • MEMS器件
    • US20140132091A1
    • 2014-05-15
    • US14079295
    • 2013-11-13
    • KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
    • Kanae MURATAIsao AOYAGIYutaka NONOMURATeruhisa AKASHI
    • H02K33/12
    • G02B26/08G02B26/0825G02B26/085G02B26/101H02K33/00H02K33/16H02K2201/18
    • A MEMS device includes a substrate, a moving part including a magnetic material and configured to tilt relative to the substrate, a first magnetic pole and a second magnetic pole configured to apply a magnetic field to the magnetic material, and a magnetic field detector configured to detect the magnetic field of the magnetic material. In the MEMS device, the first magnetic pole and the second magnetic pole are disposed on one side of the moving part, the one side being a side on which the magnetic material is located. The magnetic field detector is disposed between the first magnetic pole and the second magnetic pole. A distance between the first magnetic pole and the second magnetic pole is shorter than a length of the moving part in a direction from the first magnetic pole toward the second magnetic pole.
    • MEMS器件包括:衬底,包括磁性材料并被配置为相对于衬底倾斜的移动部件;第一磁极和被配置为向磁性材料施加磁场的第二磁极;以及磁场检测器,被配置为 检测磁性材料的磁场。 在MEMS装置中,第一磁极和第二磁极设置在移动部分的一侧,一侧是磁性材料所在的一侧。 磁场检测器设置在第一磁极和第二磁极之间。 第一磁极和第二磁极之间的距离比从第一磁极朝向第二磁极的方向的移动部的长度短。