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    • 5. 发明申请
    • EVALUATION DEVICE FOR OXIDE SEMICONDUCTOR THIN FILM
    • 氧化物半导体薄膜评估装置
    • US20160223462A1
    • 2016-08-04
    • US14917452
    • 2014-09-10
    • KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.)
    • Kazushi HAYASHITomoya KISHI
    • G01N21/64G01N22/00
    • G01N21/6489G01N22/00G01N2201/06113G01N2201/0697H01L22/12
    • An evaluation device for an oxide semiconductor thin film includes a first excitation light irradiation unit configured to irradiate a measurement region of a sample with first excitation light and to generate an electron-hole pair, an electromagnetic wave irradiation unit configured to irradiate with electromagnetic wave, a reflecting electromagnetic wave intensity detection unit configured to detect intensity of a reflected electromagnetic wave, a second excitation light irradiation unit configured to irradiate the sample with second excitation light and to generate photoluminescence light, an emission intensity measurement unit configured to measure emission intensity of the photoluminescence light, and an evaluation unit configured to evaluate mobility and stress stability. The first excitation light irradiation unit and the second excitation light irradiation unit are the same or different excitation light radiation units.
    • 用于氧化物半导体薄膜的评估装置包括:第一激发光照射单元,被配置为用第一激发光照射样品的测量区域并产生电子 - 空穴对;电磁波照射单元,被配置为用电磁波照射, 反射电磁波强度检测单元,被配置为检测反射电磁波的强度;第二激发光照射单元,被配置为用第二激发光照射样品并产生光致发光;发射强度测量单元,被配置为测量 光致发光灯和评估单元,其被配置为评估移动性和应力稳定性。 第一激发光照射单元和第二激发光照射单元是相同或不同的激发光辐射单元。