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1. 发明授权

US06724464B2 Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method 失效
标题翻译：位置检测方法和单元，光学特性测量方法和单元，曝光装置和装置制造方法
公开(公告)号：US06724464B2
公开(公告)日：2004-04-20
申请号：US10025917
申请日：2001-12-26
申请人： Juping Yang , Toru Fujii , Fuyuhiko Inoue
发明人： Juping Yang , Toru Fujii , Fuyuhiko Inoue
IPC分类号： G03B2752
CPC分类号： G03F7/706 , G06T7/73
摘要： Correlation values between a plurality of templates prepared beforehand and a picture-element data distribution as a pick-up result of an image are calculated, and the position of a maximum template whose correlation value is the maximum of the calculated correlation values is obtained. Subsequently, a curved surface function is calculated which fits the distribution of calculated correlation-values in positions near the maximum template's position, and the position of the picked-up image is calculated based on the curved surface function. As a result, the number of templates prepared beforehand to achieve desired accuracy in detecting a position and the number of times of calculating correlation-values can be reduced, and the image position can be quickly and accurately detected.
摘要翻译：计算预先准备的多个模板与作为图像的拾取结果的图像元素数据分布之间的相关值，并获得相关值为所计算的相关值的最大值的最大模板的位置。随后，计算出适合于最大模板位置附近的计算的相关值的分布的曲面函数，并且基于曲面函数来计算拍摄图像的位置。结果，可以减少预先准备的用于实现检测位置的精确度和计算相关值的次数的模板的数量，并且可以快速和准确地检测图像位置。

2. 发明授权

US07042602B1 Image correction apparatus and recording medium having image correction program 有权
标题翻译：图像校正装置和具有图像校正程序的记录介质
公开(公告)号：US07042602B1
公开(公告)日：2006-05-09
申请号：US09584268
申请日：2000-06-01
申请人： Juping Yang , Yukio Nakagawa
发明人： Juping Yang , Yukio Nakagawa
IPC分类号： G06F13/00
CPC分类号： H04N1/6077
摘要： An image correction apparatus includes: an image obtaining unit that obtains image data from outside constituted of a plurality of pixels each having a value in a color component among a plurality of color components; an average value calculation unit that calculates average values of color component values corresponding to individual color components in the image data; and a correction unit that corrects the color component values of individual pixels to match the average values of the color component values corresponding to individual color components with at least one specific reference value.
摘要翻译：一种图像校正装置，包括：图像获取单元，从多个颜色分量中的颜色分量中具有值的多个像素构成的外部获取图像数据; 平均值计算单元，计算与图像数据中的各个颜色成分对应的颜色成分值的平均值; 以及校正单元，其校正各个像素的颜色分量值，以使与具有至少一个特定参考值的各个颜色分量对应的颜色分量值的平均值相匹配。

3. 发明授权

US06771815B2 Image correction apparatus and recording medium for storing image correction program 失效
标题翻译：用于存储图像校正程序的图像校正装置和记录介质
公开(公告)号：US06771815B2
公开(公告)日：2004-08-03
申请号：US09505691
申请日：2000-02-18
申请人： Juping Yang , Yukio Nakagawa
发明人： Juping Yang , Yukio Nakagawa
IPC分类号： G06K936
CPC分类号： G06T5/40 , G06T5/009
摘要： A histogram is prepared by calculating the pixel number ratio corresponding to each gradation in relation to the total number of pixels in image data obtained from the outside. A threshold value for the pixel number ratio corresponding to a given gradation that is determined through user specification is compared against the pixel number ratio corresponding to each gradation in the histogram. Based upon the results of the comparison, the histogram gradation width is corrected. For instance, the width representing the range of gradations with pixel number ratios smaller than the threshold value in the histogram is compressed. Then, the gradation width in the histogram is expanded to achieve the number of pre-compression gradations.
摘要翻译：通过计算与从外部获得的图像数据中的总像素数相关的每个灰度值的像素数比率来准备直方图。将与通过用户指定确定的给定灰度相对应的像素数比的阈值与对应于直方图中的每个灰度的像素数比进行比较。基于比较的结果，校正直方图灰度宽度。例如，表示像素数比例小于直方图中的阈值的灰度范围的宽度被压缩。然后，扩大直方图中的灰度宽度以实现预压缩等级的数量。

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