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1. 发明申请

US20080237593A1 Semiconductor Device, Method of Fabricating the Same, and Apparatus for Fabricating the Same 审中-公开
标题翻译：半导体装置及其制造方法及其制造装置
公开(公告)号：US20080237593A1
公开(公告)日：2008-10-02
申请号：US11794874
申请日：2006-01-06
申请人： Junichiro Nakayama , Ikumi Itsumi , Tetsuya Inui
发明人： Junichiro Nakayama , Ikumi Itsumi , Tetsuya Inui
IPC分类号： H01L29/04 , H01L21/00 , H01S3/098
CPC分类号： H01L21/0268 , H01L21/0242 , H01L21/02422 , H01L21/02488 , H01L21/02532
摘要： There is provided a semiconductor device including a substrate and a semiconductor film deposited on the substrate, characterized in that the semiconductor film has a laterally grown crystal having an end with a surface projection height smaller than the thickness of the semiconductor film. There are also provided a semiconductor device fabrication method and apparatus utilizing a method and apparatus for fabricating the semiconductor device, that is capable of reducing a surface projection height or a ridge formed in a last region in repeating laser exposure in the SLS method, and a semiconductor device fabricated thereby.
摘要翻译：提供了一种半导体器件，其包括沉积在衬底上的衬底和半导体膜，其特征在于，所述半导体膜具有横向生长的晶体，其端部的表面突出高度小于半导体膜的厚度。还提供了一种半导体器件制造方法和装置，其利用半导体器件的制造方法和装置，其能够减少在SLS方法中重复激光曝光的最后区域中形成的表面突出高度或脊，由此制造半导体器件。

2. 发明授权

US6031816A Optical recording medium, method for manufacturing the same, and optical information recording and reproducing device used with respect to the same 有权
标题翻译：光记录介质及其制造方法以及与此相关的光信息记录再现装置
公开(公告)号：US6031816A
公开(公告)日：2000-02-29
申请号：US330495
申请日：1999-06-11
申请人： Tetsuya Inui , Hideaki Sato , Junichiro Nakayama , Naoyasu Iketani , Michinobu Mieda , Yoshiteru Murakami , Junji Hirokane , Akira Takahashi
发明人： Tetsuya Inui , Hideaki Sato , Junichiro Nakayama , Naoyasu Iketani , Michinobu Mieda , Yoshiteru Murakami , Junji Hirokane , Akira Takahashi
IPC分类号： G11B7/005 , G11B7/007 , G11B7/09 , G11B7/24 , G11B7/26 , G11B11/105
CPC分类号： G11B7/005 , G11B7/00718 , G11B7/00745 , G11B7/0901 , G11B7/261 , G11B11/10578 , G11B11/10582 , G11B7/0938 , G11B7/24
摘要： An optical disk has address recording sections each of which has a wobbled part of one of side walls of a groove. Each address recording section is formed by providing convexes of a groove in an adjacent land so as to widen the groove. With the wobbles thus provided in a concavo-convex form, address information is recorded. Besides, the address recording sections thus provided in the grooves are linearly disposed in radial directions of the optical disk. By thus arranging the optical disk on whose grooves and/or lands information is recorded, mixing of wobble frequency components in reproduced information signals does not occur, the sector method is applicable to the optical disk, and information signals of high quality can be obtained.
摘要翻译：光盘具有地址记录部分，每个地址记录部分具有凹槽的一个侧壁的摆动部分。每个地址记录部分通过在相邻的凸台中提供凹槽的凸起来形成，以便加宽凹槽。由于以这样提供的摆动形式为凹凸形式，所以记录地址信息。此外，这样设置在凹槽中的地址记录部分在光盘的径向上线性地设置。通过这样布置记录有槽和/或焊盘信息的光盘，不会发生重放信息信号中的摆动频率分量的混合，扇区方法可应用于光盘，并且可以获得高质量的信息信号。

3. 发明申请

US20060019474A1 Semiconductor thin film crystallization device and semiconductor thin film crystallization method 失效
标题翻译：半导体薄膜结晶装置和半导体薄膜结晶方法
公开(公告)号：US20060019474A1
公开(公告)日：2006-01-26
申请号：US11190707
申请日：2005-07-26
申请人： Tetsuya Inui , Junichiro Nakayama , Yoshihiro Taniguchi , Masanori Seki , Hiroshi Tsunasawa , Ikumi Kashiwagi
发明人： Tetsuya Inui , Junichiro Nakayama , Yoshihiro Taniguchi , Masanori Seki , Hiroshi Tsunasawa , Ikumi Kashiwagi
IPC分类号： H01L21/84 , H01L21/324 , H01L21/20
CPC分类号： H01L21/0268 , B23K26/0604 , B23K26/0608 , B23K26/0622 , B23K26/0732 , B23K26/0738 , H01L21/02686 , H01L21/2026 , H01L21/268 , H01L27/1285 , H01L29/04 , H01L29/6675 , H01L29/78672 , H01L29/78696
摘要： A first laser beam is emitted from a first laser oscillator in a pulsed manner at a high repetition frequency, and converged onto a substrate by a first intermediate optical system 2 so as to form a slit-like first beam spot. A second laser beam is emitted from a second laser beam oscillator in a pulsed manner to rise precedent to and fall subsequent to the first laser beam, and converged onto the substrate by a second intermediate optical system so as to form a second beam spot similar in configuration to the first beam spot and to contain the first beam spot. Crystallization of a semiconductor thin film on the substrate is carried out while the substrate or the first, second beam spots are moved. Thereby, the whole semiconductor thin film is formed into a crystal surface that has grown in one direction and free from ridges. Thus, the semiconductor thin film has an extremely flat surface, extremely few defects, large crystal grains and high throughput.
摘要翻译：第一激光束以高重复频率以脉冲方式从第一激光振荡器发射，并且通过第一中间光学系统2会聚到基板上，以形成狭缝状的第一光束点。第二激光束以脉冲方式从第二激光束振荡器发射，以在第一激光束之前先进并落下，并且通过第二中间光学系统会聚到衬底上，以便形成与第配置到第一束斑并且包含第一束斑。在基板或第一，第二光束点移动的同时进行半导体薄膜在基板上的结晶。由此，整个半导体薄膜形成为在一个方向上生长并且没有脊的晶体表面。因此，半导体薄膜具有非常平坦的表面，极少的缺陷，大的晶粒和高的通量。

4. 发明授权

US07381632B2 Semiconductor thin film crystallization device and semiconductor thin film crystallization method 失效
公开(公告)号：US07381632B2
公开(公告)日：2008-06-03
申请号：US11190707
申请日：2005-07-26
申请人： Tetsuya Inui , Junichiro Nakayama , Yoshihiro Taniguchi , Masanori Seki , Hiroshi Tsunasawa , Ikumi Kashiwagi
发明人： Tetsuya Inui , Junichiro Nakayama , Yoshihiro Taniguchi , Masanori Seki , Hiroshi Tsunasawa , Ikumi Kashiwagi
IPC分类号： H01L21/36
CPC分类号： H01L21/0268 , B23K26/0604 , B23K26/0608 , B23K26/0622 , B23K26/0732 , B23K26/0738 , H01L21/02686 , H01L21/2026 , H01L21/268 , H01L27/1285 , H01L29/04 , H01L29/6675 , H01L29/78672 , H01L29/78696
摘要： A first laser beam is emitted from a first laser oscillator in a pulsed manner at a high repetition frequency, and converged onto a substrate by a first intermediate optical system 2 so as to form a slit-like first beam spot. A second laser beam is emitted from a second laser beam oscillator in a pulsed manner to rise precedent to and fall subsequent to the first laser beam, and converged onto the substrate by a second intermediate optical system so as to form a second beam spot similar in configuration to the first beam spot and to contain the first beam spot. Crystallization of a semiconductor thin film on the substrate is carried out while the substrate or the first, second beam spots are moved. Thereby, the whole semiconductor thin film is formed into a crystal surface that has grown in one direction and free from ridges. Thus, the semiconductor thin film has an extremely flat surface, extremely few defects, large crystal grains and high throughput.

5. 发明申请

US20080084901A1 Semiconductor thin film crystallization device and semiconductor thin film crystallization method 审中-公开
标题翻译：半导体薄膜结晶装置和半导体薄膜结晶方法
公开(公告)号：US20080084901A1
公开(公告)日：2008-04-10
申请号：US11982568
申请日：2007-11-02
申请人： Tetsuya Inui , Junichiro Nakayama , Yoshihiro Taniguchi , Masanori Seki , Hiroshi Tsunasawa , Ikumi Kashiwagi
发明人： Tetsuya Inui , Junichiro Nakayama , Yoshihiro Taniguchi , Masanori Seki , Hiroshi Tsunasawa , Ikumi Kashiwagi
IPC分类号： H01S3/10 , H01L31/0248
CPC分类号： H01L21/0268 , B23K26/0604 , B23K26/0608 , B23K26/0622 , B23K26/0732 , B23K26/0738 , H01L21/02686 , H01L21/2026 , H01L21/268 , H01L27/1285 , H01L29/04 , H01L29/6675 , H01L29/78672 , H01L29/78696
摘要： A first laser beam is emitted from a first laser oscillator in a pulsed manner at a high repetition frequency, and converged onto a substrate by a first intermediate optical system 2 so as to form a slit-like first beam spot. A second laser beam is emitted from a second laser beam oscillator in a pulsed manner to rise precedent to and fall subsequent to the first laser beam, and converged onto the substrate by a second intermediate optical system so as to form a second beam spot similar in configuration to the first beam spot and to contain the first beam spot. Crystallization of a semiconductor thin film on the substrate is carried out while the substrate or the first, second beam spots are moved. Thereby, the whole semiconductor thin film is formed into a crystal surface that has grown in one direction and free from ridges. Thus, the semiconductor thin film has an extremely flat surface, extremely few defects, large crystal grains and high throughput.
摘要翻译：第一激光束以高重复频率以脉冲方式从第一激光振荡器发射，并且通过第一中间光学系统2会聚到基板上，以形成狭缝状的第一光束点。第二激光束以脉冲方式从第二激光束振荡器发射，以在第一激光束之前先进并落下，并且通过第二中间光学系统会聚到衬底上，以形成与第二激光束相似的第二光束点配置到第一束斑并且包含第一束斑。在基板或第一，第二光束点移动的同时进行半导体薄膜在基板上的结晶。由此，整个半导体薄膜形成为在一个方向上生长并且没有脊的晶体表面。因此，半导体薄膜具有非常平坦的表面，极少的缺陷，大的晶粒和高的通量。

6. 发明授权

US5933411A Optical recording medium having a wobbling section for recording address information and methods of recording and reproduction using same 失效
标题翻译：具有用于记录地址信息的摆动部分和使用其的记录和再现方法的光学记录介质
公开(公告)号：US5933411A
公开(公告)日：1999-08-03
申请号：US890401
申请日：1997-07-09
申请人： Tetsuya Inui , Hideaki Sato , Junichiro Nakayama , Naoyasu Iketani , Michinobu Mieda , Yoshiteru Murakami , Junji Hirokane , Akira Takahashi
发明人： Tetsuya Inui , Hideaki Sato , Junichiro Nakayama , Naoyasu Iketani , Michinobu Mieda , Yoshiteru Murakami , Junji Hirokane , Akira Takahashi
IPC分类号： G11B7/005 , G11B7/007 , G11B7/09 , G11B7/24 , G11B7/26 , G11B11/105
CPC分类号： G11B7/005 , G11B7/00718 , G11B7/00745 , G11B7/0901 , G11B7/261 , G11B11/10578 , G11B11/10582 , G11B7/0938 , G11B7/24
摘要： An optical disk has address recording sections each of which has a wobbled part of one of side walls of a groove. Each address recording section is formed by providing convexes of a groove in an adjacent land so as to widen the groove. With the wobbles thus provided in a concavo-convex form, address information is recorded. Besides, the address recording sections thus provided in the grooves are linearly disposed in radial directions of the optical disk. By thus arranging the optical disk on whose grooves and/or lands information is recorded, mixing of wobble frequency components in reproduced information signals does not occur, the sector method is applicable to the optical disk, and information signals of high quality can be obtained.
摘要翻译：光盘具有地址记录部分，每个地址记录部分具有凹槽的一个侧壁的摆动部分。每个地址记录部分通过在相邻的凸台中提供凹槽的凸起来形成，以便加宽凹槽。由于以这样提供的摆动形式为凹凸形式，所以记录地址信息。此外，这样设置在凹槽中的地址记录部分在光盘的径向上线性地设置。通过这样布置记录有槽和/或焊盘信息的光盘，不会发生重放信息信号中的摆动频率分量的混合，扇区方法可应用于光盘，并且可以获得高质量的信息信号。

7. 发明授权

US06295271B1 Optical recording medium having tracks, each track having a plurality of wobble sections/one-side wobble regions 失效
标题翻译：具有轨道的光记录介质，每个轨道具有多个摆动部分/一侧摆动区域
公开(公告)号：US06295271B1
公开(公告)日：2001-09-25
申请号：US09475414
申请日：1999-12-30
申请人： Tetsuya Inui , Hideaki Sato , Junichiro Nakayama , Naoyasu Iketani , Michinobu Mieda , Yoshiteru Murakami , Junji Hirokane , Akira Takahashi
发明人： Tetsuya Inui , Hideaki Sato , Junichiro Nakayama , Naoyasu Iketani , Michinobu Mieda , Yoshiteru Murakami , Junji Hirokane , Akira Takahashi
IPC分类号： G11B724
CPC分类号： G11B7/005 , G11B7/00718 , G11B7/00745 , G11B7/0901 , G11B7/0938 , G11B7/24 , G11B7/261 , G11B11/10578 , G11B11/10582
摘要： An optical disk has address recording sections each of which has a wobbled part of one of side walls of a groove. Each address recording section is formed by providing convexes of a groove in an adjacent land so as to widen the groove. With the wobbles thus provided in a concavo-convex form, address information is recorded. Besides, the address recording sections thus provided in the grooves are linearly disposed in radial directions of the optical disk. By thus arranging the optical disk on whose grooves and/or lands information is recorded, mixing of wobble frequency components in reproduced information signals does not occur, the sector method is applicable to the optical disk, and information signals of high quality can be obtained.
摘要翻译：光盘具有地址记录部分，每个地址记录部分具有凹槽的一个侧壁的摆动部分。每个地址记录部分通过在相邻的凸台中提供凹槽的凸起来形成，以便加宽凹槽。由于以这样提供的摆动形式为凹凸形式，所以记录地址信息。此外，这样设置在凹槽中的地址记录部分在光盘的径向上线性地设置。通过这样布置记录有槽和/或焊盘信息的光盘，不会发生重放信息信号中的摆动频率分量的混合，扇区方法可应用于光盘，并且可以获得高质量的信息信号。

8. 发明授权

US5699088A Recording head for a magnetic printer 失效
标题翻译：磁性打印机的记录头
公开(公告)号：US5699088A
公开(公告)日：1997-12-16
申请号：US291464
申请日：1994-08-17
申请人： Hitoshi Isono , Tetsuya Inui , Kenji Ohta , Junichiro Nakayama
发明人： Hitoshi Isono , Tetsuya Inui , Kenji Ohta , Junichiro Nakayama
IPC分类号： B41J2/42 , B41J2/43 , G03G19/00 , G11B5/004 , G11B5/127
CPC分类号： B41J2/43 , G03G19/005
摘要： A recording head for a magnetic printer utilizes a so-called magnetography, in which a magnetic latent image formed on a magnetic recording medium is developed and actualized by a magnetic toner and which image is transferred and fixed on a sheet of recording paper to provide a hard copy. The recording head for a magnetic printer includes a first thermal head member, second thermal head member juxtaposed with the first thermal head member with a space therebetween, and a magnetic head member arranged on the first and the second thermal head members. A magnetic gap of the magnetic head member extends immediately above the space between the first and the second thermal head members linearly in the same direction. By this structure, a recording head for a magnetic printer which has simple structure and allows formation of a magnetic latent image having clear boundary between opposite magnetic polarities on a magnetic recording medium, is provided.
摘要翻译：用于磁性打印机的记录头利用所谓的磁光记录法，其中形成在磁记录介质上的磁潜象通过磁性调色剂显影和实现，哪个图像被转印并固定在一张记录纸上，以提供硬拷贝。用于磁性打印机的记录头包括第一热敏头部件，与第一热敏打印头部件并置的第二热敏打印头部件，以及设置在第一和第二热敏头部件上的磁头部件。磁头构件的磁隙在第一和第二热头构件之间的空间的正上方沿相同的方向直线地延伸。通过这种结构，提供了一种具有简单结构并且允许形成在磁记录介质上具有相反磁极性之间具有清晰边界的磁潜象的磁性打印机的记录头。

9. 发明申请

US20060183303A1 Crystallized semiconductor device, method for producing same and crystallization apparatus 审中-公开
标题翻译：结晶半导体器件及其制造方法及结晶装置
公开(公告)号：US20060183303A1
公开(公告)日：2006-08-17
申请号：US10542663
申请日：2004-01-19
申请人： Tetsuya Inui , Hiroshi Tsunazawa , Shinya Okazaki
发明人： Tetsuya Inui , Hiroshi Tsunazawa , Shinya Okazaki
IPC分类号： H01L21/84 , C30B11/00 , H01L21/20
CPC分类号： H01L21/02675 , H01L21/02686 , H01L21/2026 , Y10T117/1024
摘要： In a method of manufacturing a crystallized semiconductor device of the present invention, a thermal diffusion layer (1) having higher thermal conductivity than that of a substrate (4) is formed on a surface of a semiconductor layer (2), and then laser light is applied to the semiconductor layer (2) from above the thermal diffusion layer (1). As a result, it becomes possible to manufacture the crystallized semiconductor device in which a crystal is longer than that of a conventional arrangement. According to the present invention, it is possible to provide the crystallized semiconductor device having the semiconductor layer in which the size of the crystal grain is larger than that of the conventional arrangement.
摘要翻译：在制造本发明的结晶化半导体器件的方法中，在半导体层（2）的表面上形成热导率高于衬底（4）的热扩散层（1），然后将激光从热扩散层（1）的上方施加到半导体层（2）。结果，可以制造晶体长于常规布置的晶体化半导体器件。根据本发明，可以提供具有其中晶粒尺寸大于常规布置的半导体层的结晶半导体器件。

10. 发明授权

US5586109A Optical memory having narrowed track pitch 失效
标题翻译：具有窄轨道间距的光学存储器
公开(公告)号：US5586109A
公开(公告)日：1996-12-17
申请号：US354457
申请日：1994-12-12
申请人： Tetsuya Inui , Akira Takahashi , Kenji Ohta , Michinobu Mieda , Yoshiteru Murakami
发明人： Tetsuya Inui , Akira Takahashi , Kenji Ohta , Michinobu Mieda , Yoshiteru Murakami
IPC分类号： G11B7/0045 , G11B7/007 , G11B7/09 , G11B7/24 , G11B7/26 , G11B11/105 , G11B3/70
CPC分类号： G11B7/261 , G11B11/10582 , G11B7/24 , G11B7/24079 , G11B7/26 , G11B7/00454 , G11B7/007 , G11B7/0938
摘要： A transparent substrate of an optical memory is produced by injection molding using a stamper. Grooves and lands are alternately arranged on the optical memory, for tracking of light converged on the optical memory. The groove width is set in the range of 0.3 .mu.m to 0.4 .mu.m and the groove depth is set in the rage of 80 nm to 100 nm. A decrease in the width of a land at each edge is restrained to 0.2 .mu.m in maximum. With such dimensions, even when the track pitch is set to about 1.4 .mu.m, it is possible to obtain a track crossing signal with intensity sufficient for performing an access operation to a target track. Moreover, since the dimensions bring about an improved reflectance at a land, the optical memory achieves an improved C/N and recording density.
摘要翻译：通过使用压模的注射成型制造光学存储器的透明基板。沟槽和焊盘交替布置在光学存储器上，用于跟踪会聚在光学存储器上的光。槽宽度设定在0.3μm〜0.4μm的范围内，槽深度设定在80nm〜100nm的范围内。每个边缘的陆地宽度减小最大限制在0.2亩。利用这样的尺寸，即使当轨道间距设置为大约1.4μm时，也可以获得具有足以对目标轨道进行访问操作的强度的轨迹交叉信号。此外，由于尺寸在陆地上产生改进的反射率，所以光学存储器实现了改进的C / N和记录密度。

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