会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Method for forming high-resolution pattern and substrate having prepattern formed thereby
    • 用于形成由其形成的预制图案的高分辨率图案和基板的方法
    • US07462570B2
    • 2008-12-09
    • US11431923
    • 2006-05-11
    • Dong-Youn ShinTae Su Kim
    • Dong-Youn ShinTae Su Kim
    • H01L21/469
    • C09D11/30H01L21/02118H01L21/02288H01L21/312
    • A patterning method comprising (a) providing a substrate having a sacrificial layer made of a first material, partially or totally formed on the substrate; (b) forming pattern grooves, which are free from the first material and have a line width of a first resolution or lower, on the sacrificial layer by using a first means; (c) filling the pattern grooves with a second material by using a second means; and (d) removing the first material present in a remaining sacrificial layer by way of irradiation or heating, wherein the first material has a threshold fluence of less than a threshold fluence of the second material, the first material is removed in step (d) under a dose ranging from the threshold fluence of the first material to that of the second material, and the pattern is formed on the substrate by the second material.
    • 一种图案化方法,包括(a)提供具有由基板上部分或全部形成的第一材料制成的牺牲层的基板; (b)通过使用第一装置在牺牲层上形成不含第一材料且具有第一分辨率或更低的线宽的图案凹槽; (c)使用第二装置用第二材料填充图案凹槽; 和(d)通过照射或加热去除剩余牺牲层中存在的第一材料,其中第一材料具有小于第二材料的阈值注量的阈值注量,在步骤(d)中将第一材料除去, 在从第一材料的阈值注量与第二材料的阈值注量之间的剂量下,通过第二材料在基板上形成图案。
    • 4. 发明授权
    • Method for forming buried contact electrode of semiconductor device having pn junction and optoelectronic semiconductor device using the same
    • 用于形成具有pn结的半导体器件的掩埋接触电极的方法和使用其的光电半导体器件
    • US07576008B2
    • 2009-08-18
    • US11526690
    • 2006-09-26
    • Tae Su KimBu Gon ShinJae Sung YouHyun Woo Shin
    • Tae Su KimBu Gon ShinJae Sung YouHyun Woo Shin
    • H01L21/311
    • H01L31/022425H01L33/382H01L33/42H05K3/0029H05K3/107H05K3/1241Y02E10/50
    • Disclosed is a method for manufacturing an optoelectronic semiconductor device having a p-n junction diode, which includes the steps of: (a) etching at least one surface of the p-n junction diode in a depth direction to form a plurality of continuous, isolated or mixed type electrode pattern grooves with a certain array; and (b) filling the formed grooves with a conductive ink containing a transparent conducting particle through an inkjet and then performing heat treatment to form a buried transparent electrode, the optoelectronic semiconductor device, and an apparatus for manufacturing the optoelectronic semiconductor device. In the present invention, covering loss is significantly reduced due to a buried transparent electrode so that the high efficiency of photoelectric conversion can be implemented, and there can be provided the easiness of a manufacturing process and the enhancement of productivity through the unification of etching and electrode forming processes.
    • 公开了一种制造具有pn结二极管的光电子半导体器件的方法,其包括以下步骤:(a)在深度方向上蚀刻pn结二极管的至少一个表面以形成多个连续,隔离或混合型 具有一定阵列的电极图形凹槽; 和(b)通过喷墨用含有透明导电颗粒的导电油墨填充所形成的槽,然后进行热处理以形成掩埋的透明电极,光电子半导体器件和用于制造光电半导体器件的装置。 在本发明中,由于埋入了透明电极而导致的覆盖损耗显着降低,从而可以实现高效率的光电转换,并且可以提供制造工艺的容易性和通过蚀刻的统一提高生产率 电极形成工艺。
    • 5. 发明申请
    • Method for forming high-resolution pattern and substrate having prepattern formed thereby
    • 用于形成由其形成的预制图案的高分辨率图案和基板的方法
    • US20060281334A1
    • 2006-12-14
    • US11431923
    • 2006-05-11
    • Dong-Youn ShinTae Su Kim
    • Dong-Youn ShinTae Su Kim
    • H01L21/20H01L23/58
    • C09D11/30H01L21/02118H01L21/02288H01L21/312
    • Disclosed is a method for forming a pattern, which comprises the steps of: (a) providing a substrate having a sacrificial layer made of a first material, partially or totally formed on the substrate; (b) forming pattern grooves, which are free from the first material and have a line width of a first resolution or lower, on the sacrificial layer by using a first means; (c) filling the pattern grooves with a second material by using a second means; and (d) removing the first material present in a remaining sacrificial layer by way of irradiation or heating, wherein the first material has a threshold fluence of less than a threshold fluence of the second material, the first material is removed in step (d) under a dose ranging from the threshold fluence of the first material to that of the second material, and the pattern is formed on the substrate by the second material. A substrate having a pre-pattern formed by the method is also disclosed. The method for forming a pattern provides a high-resolution pattern with little or no waste of the second material, thereby reducing production costs. The method includes use of the first means with a high resolution, such as focused energy beams of laser, combined with the second means with a low resolution, such as ink-jet, and provides a high-resolution pattern with high processing efficiency.
    • 公开了一种用于形成图案的方法,其包括以下步骤:(a)提供具有由第一材料制成的牺牲层的基板,部分地或全部地形成在基板上; (b)通过使用第一装置在牺牲层上形成不含第一材料且具有第一分辨率或更低的线宽的图案凹槽; (c)使用第二装置用第二材料填充图案凹槽; 和(d)通过照射或加热去除剩余牺牲层中存在的第一材料,其中第一材料具有小于第二材料的阈值注量的阈值注量,在步骤(d)中将第一材料除去, 在从第一材料的阈值注量与第二材料的阈值注量之间的剂量下,通过第二材料在基板上形成图案。 还公开了通过该方法形成的预制图案的基板。 形成图案的方法提供了高分辨率图案,几乎或不浪费第二材料,从而降低了生产成本。 该方法包括使用具有高分辨率的第一装置,例如与诸如喷墨的低分辨率与第二装置结合的激光的聚焦能量束,并且提供具有高处理效率的高分辨率图案。